US4742377A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Schottky barrier device with doped composite guard ring
Assignee: Arris Technology Inc
•
Filing: 1986-10-23
•
Granted: 1988-05-03
•
Expires: 2006-10-23
Abstract
Abstract An improved Schottky barrier device and the method of its manufacture are disclosed. The device comprises a semiconductor layer of first conductivity type, an insulating layer covering one face of the semiconductor layer and having an opening therein, a conductor layer covering the semiconductor layer where it is exposed by the opening and forming a Schottky contact with the semiconductor layer, a first region of opposite conductivity type within the semiconductor layer generally beginning where the conductor layer meets the insulating layer and extending below the conductor layer, and a second region of opposite conductivity type within the semiconductor layer generally beginning where the conductor layer meets the insulting layer and extending below the insulating layer, the second region having a lower concentration of dopants, so that there is formed an asymmetric guard ring, and the opening in the insulating layer has an edge which is bevelled with a slope of between 0.1 and 0.4.
Inventors
- 👤 Willem G. Einthoven
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:53
CPC Classifications
H; H10; H10D; H10D8/00; H10D8/60; H10D62/00; H10D62/10; H10D62/102; H10D62/103; H10D62/105; H10D62/106
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
191 words
A Schottky barrier device comprising (a) a semiconductor layer whose major portion is of a first conductivity type, (b) an insulating layer covering one face of the semiconductor layer, the insulating layer having an opening therein, (c) a conductor layer extending over a portion of the insulating layer including the opening for making contact with said one face of the semiconductor layer, said contact being rectifying where made to the portion of the first conductivity type, and (d) an asymmetric guard ring in the semiconductor layer at said one face and of the conductivity type opposite the first conductivity type and including an innermost ring portion of a first doping level for forming an inner PN junction portion with the bulk portion of the semiconductor layer, said inner ring portion generally underlying and contacting a portion of the conductor layer, and an outermost ring portion of a second doping level for forming an outer PN junction portion with the bulk portion of the semiconductor layer, said outer ring portion generally underlying and contacting a portion of the insulating layer and said first doping level being higher than said second doping level.
Claim 2
Dependent Claim
191 words
A Schottky barrier device comprising (a) a semiconductor layer whose major portion is of a first conductivity type, (b) an insulating layer covering one face of the semiconductor layer, the insulating layer having an opening therein, (c) a conductor layer extending over a portion of the insulating layer including the opening for making contact with said one face of the semiconductor layer, said contact being rectifying where made to the portion of the first conductivity type, and (d) an asymmetric guard ring in the semiconductor layer at said one face and of the conductivity type opposite the first conductivity type and including an innermost ring portion of a first doping level for forming an inner PN junction portion with the bulk portion of the semiconductor layer, said inner ring portion generally underlying and contacting a portion of the conductor layer, and an outermost ring portion of a second doping level for forming an outer PN junction portion with the bulk portion of the semiconductor layer, said outer ring portion generally underlying and contacting a portion of the insulating layer and said first doping level being higher than said second doping level.
Claim 3
Dependent Claim
20 words
The Schottky barrier device of claim 1 in which the semiconductor is silicon and the conductor layer is a silicide.
Claim 4
Dependent Claim
36 words
The Schottky barrier device of claim 1 in which the semiconductor layer is an epitaxial layer on a semiconductor substrate of the first conductivity type and of a lower resistivity than the resistivity of said substrate.
Claim 5
Dependent Claim
54 words
The Schottky barrier device of claim 1 in which the opening in the insulating layer has a bevelled edge whose slope is between 0.1 and 0.4 where the slope is the ratio of the height of the unbevelled insulating layer to the projection of the bevelled edge on the face of the semiconductor layer.
Claim 6
Dependent Claim
36 words
The Schottky barrier device of claim 1 in which the conductor layer includes a central portion which contacts the face of the semiconductor layer and an outer portion which overlaps the opening in the insulating layer.
Claim 7
Dependent Claim
29 words
A Schottky barrier device in accordance with claim 3 in which the width of the outermost ring portion is at least equal to the thickness of the epitaxial layer.
Claim 8
Dependent Claim
45 words
A Schottky barrier device in accordance with claim 6 in which the depth of the PN junction portion along the edge of the innermost ring portion is at least twice the depth of the PN junction portion along the edge of the outermost ring portion.
References Cited (Backward Citations)
US3146135A
Cited
US3113220A
Cited
US3204160A
Cited
US3243669A
Cited
US3397450A
Cited
US3341380A
Cited
US3515956A
Cited
US3541403A
Cited
US3513366A
Cited
US3694705A
Cited
US3891479A
Cited
US3907617A
Cited
US3769109A
Cited
US3938243A
Cited
US3923975A
Cited
US4000502A
Cited
US4223327A
Cited
US4206540A
Cited
JPS5585077A
Cited
US4310362A
Cited
US4377030A
Cited
US4505023A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-03 | 1991-11-02 | 1992-05-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-03 | 1995-11-02 | 1996-05-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-03 | 1999-11-02 | 2000-05-03 | $7700.00 | Window Closed / Lapsed |