US4715941A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface modification of organic materials to improve adhesion
Assignee: International Business Machines Corp
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Filing: 1986-04-14
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Granted: 1987-12-29
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Expires: 2006-04-14
Abstract
Abstract A silicon-modified organic surface is roughened by treatment with an oxygen containing plasma. If necessary the organic surface may be silicon-modified by treatment with a silicon containing material prior to plasma treatment. The roughened organic surface provides improved adhesion to other organic surfaces and to deposited metals. Improvements in methods for laminating organic surfaces and for depositing metals on organic surfaces which achieve improved adhesion are disclosed. Structures comprising laminated organic layers or metal deposited on organic surfaces which provide improved adhesion between the organic layers or between the metal and the organic surface are also disclosed.
Inventors
- 👤 Carol R. Jones
- 👤 Robin A. Susko
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 09:00
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/38; H05K3/381; C; C23; C23C; C23C18/00; C23C18/16; C23C18/18; C23C18/20; C23C18/22
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
52 words
A method of roughening an organic surface previously modified by a silicon containing fluid, said method comprising subjecting said surface to an oxygen containing plasma whereby all portions of said organic surface subjected to said oxygen containing plasma are uniformly roughened to promote adhesion between said surface and material subsequently applied thereto.
Claim 2
Independent Claim
52 words
A method of roughening an organic surface previously modified by a silicon containing fluid, said method comprising subjecting said surface to an oxygen containing plasma whereby all portions of said organic surface subjected to said oxygen containing plasma are uniformly roughened to promote adhesion between said surface and material subsequently applied thereto.
Claim 3
Dependent Claim
53 words
The method of claim 1 wherein the plasma also contains a fluorine entity selected from the group consisting of CF 4 , C 2 F 6 , CF 3 Cl, SF 6 , CCl 2 F 2 and NF 3 in amounts ranging from about 2 mole % to about 70 mole %.
Claim 4
Dependent Claim
16 words
The method of claim 2 wherein the plasma contains about 30 mole % CF 4 .
Claim 5
Dependent Claim
33 words
The method of claim 1 including the subsequent additional step of subjecting said surface to a predominantly fluorine containing plasma for a time sufficient to substantially remove silicon containing molecules from said surface.
Claim 6
Dependent Claim
20 words
The method of claim 4 wherein the fluorine containing plasma comprises more than about 70 mole % CF 4 .
Claim 7
Dependent Claim
16 words
The method of claim 1 wherein said surface comprises an organic polymer having silicon containing moieties.
Claim 8
Dependent Claim
21 words
The method of claim 1 wherein said surface comprises an organic polymer which has been treated with a silicon containing material.
Claim 9
Independent Claim
34 words
A method for modifying an organic surface which comprises the sequential steps of: (a) treating the organic surface with a silicon containing material and (b) subjecting the treated surface to an oxygen containing plasma.
Claim 10
Independent Claim
34 words
A method for modifying an organic surface which comprises the sequential steps of: (a) treating the organic surface with a silicon containing material and (b) subjecting the treated surface to an oxygen containing plasma.
Claim 11
Dependent Claim
23 words
The method of claim 8 wherein the organic surface is treated sufficiently that it comprises at least about 0.5 atomic weight percent silicon.
Claim 12
Dependent Claim
25 words
The method of claim 9 wherein the organic surface is treated sufficiently that it comprises from about 5 to about 25 atomic weight percent silicon.
Claim 13
Dependent Claim
17 words
The method of claim 9 wherein the organic surface is treated by contact with a liquid silicone.
Claim 14
Dependent Claim
11 words
The method of claim 11 wherein the liquid silicone is hexamethyldisilane.
Claim 15
Dependent Claim
16 words
The method of claim 9 wherein the organic surface is treated by contact with silicone vapors.
Claim 16
Dependent Claim
12 words
The method of claim 13 wherein the silicone vapors are hexamethyldisilane vapors.
Claim 17
Dependent Claim
53 words
The method of claim 8 wherein the plasma also contains a fluorine entity selected from the group consisting of CF 4 , C 2 F 6 , CF 3 Cl, SF 6 , CCl 2 F 2 and NF 3 in amounts ranging from about 2 mole % to about 70 mole %.
Claim 18
Dependent Claim
16 words
The method of claim 15 wherein the plasma contains about 30 mole % CF 4 .
Claim 19
Dependent Claim
33 words
The method of claim 8 including the subsequent additional step of subjecting said surface to a predominantly fluorine containing plasma for a time sufficient to substantially remove silicon containing molecules from said surface.
Claim 20
Dependent Claim
20 words
The method of claim 17 wherein the fluorine containing plasma comprises more than about 70 mole % CF 4 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-12-28 | 1991-06-29 | 1991-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-12-28 | 1995-06-29 | 1995-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-12-28 | 1999-06-29 | 1999-12-29 | $7700.00 | Window Closed / Lapsed |