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US4615763A Expired / Lapsed US ⏱️ 0.0 years remaining

Roughening surface of a substrate

Assignee: International Business Machines Corp
•
Filing: 1985-01-02
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Granted: 1986-10-07
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Expires: 2005-01-02
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Abstract

Abstract The surface of a substrate is roughened by providing a substrate which comprises a resinous material and an inorganic particulate material; and etching a surface of the substrate to selectively etch the resinous material and thereby produce the roughened surface.

Inventors

  • 👤 Jeffrey D. Gelorme
  • 👤 William H. Lawrence
  • 👤 Peter Slota, Jr.

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 23:18
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/38; H05K3/381; C; C23; C23C; C23C18/00; C23C18/16; C23C18/18; C23C18/20; C23C18/22; H05K2201/00; H05K2201/02; H05K2201/0203; H05K2201/0206; H05K2201/0209; H05K2203/00; H05K2203/09; H05K2203/095; H05K3/10; H05K3/18; H05K3/181

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 63 words
A method of improving the adhesion between a photosensitive adhesive and a dielectric substrate which comprises roughening the surface of said dielectric substrate by: providing a substrate comprising a resinous material and inorganic particulate material; etching a surface of said substrate which selectively etches said resinous material to thereby provide a roughened surface; and then coating a photosensitive adhesive onto said roughened surface.
Claim 2
Independent Claim 63 words
A method of improving the adhesion between a photosensitive adhesive and a dielectric substrate which comprises roughening the surface of said dielectric substrate by: providing a substrate comprising a resinous material and inorganic particulate material; etching a surface of said substrate which selectively etches said resinous material to thereby provide a roughened surface; and then coating a photosensitive adhesive onto said roughened surface.
Claim 3
Dependent Claim 13 words
The method of claim 1 wherein said resinous material comprises an epoxy resin.
Claim 4
Dependent Claim 37 words
The method of claim 1 wherein said inorganic particulate material is selected from the group of SiO 2 , CaCO 3 , Al 2 O 3 , CaO 2 , SiC, CaF 2 , and mixtures thereof.
Claim 5
Dependent Claim 12 words
The method of claim 1 wherein said inorganic particulate material comprises silica.
Claim 6
Dependent Claim 28 words
The method of claim 1 wherein said inorganic particulate material is an aggregate of fused spherical particles having an aggregate size of about 0.002 to about 10 microns.
Claim 7
Dependent Claim 16 words
The method of claim 5 wherein said aggregate size is about 0.1 to about 1 micron.
Claim 8
Dependent Claim 33 words
The method of claim 1 wherein the amount of said inorganic particulate material is about 1% to about 10% by weight based upon the total of said resinous material and inorganic particulate material.
Claim 9
Dependent Claim 33 words
The method of claim 1 wherein the amount of said inorganic particulate material is about 4% to about 8% by weight of the total of said resinous material and said inorganic particulate material.
Claim 10
Dependent Claim 12 words
The method of claim 1 wherein said substrate also contains reinforcing fibers.
Claim 11
Dependent Claim 12 words
The method of claim 1 wherein said reinforcing fibers are glass fibers.
Claim 12
Dependent Claim 39 words
The method of claim 8 wherein the amount of the combination of resinous material and inorganic particulate material is about 30% to about 70% by weight of the total of the resinous material, inorganic particulate material, and reinforcing fibers.
Claim 13
Dependent Claim 16 words
The method of claim 8 wherein said amount is about 55% to about 65% by weight.
Claim 14
Dependent Claim 13 words
The method of claim 1 wherein said etching is a dry etching process.
Claim 15
Dependent Claim 13 words
The method of claim 1 wherein said etching is a plasma etching process.
Claim 16
Dependent Claim 29 words
The method of claim 14 wherein said plasma etching employs a gas containing CF 4 and O 2 in a ratio of about 4:96 to about 65:35 by volume.
Claim 17
Dependent Claim 22 words
The method of claim 1 which further comprises catalyzing the roughened surface for subsequent deposition of copper from an electroless plating bath.
Claim 18
Dependent Claim 14 words
The method of claim 1 wherein said photosensitive adhesive is a negative photosensitive adhesive.
Claim 19
Dependent Claim 15 words
The method of claim 17 wherein said negative photosensitive adhesive is a polymer from methylmethacrylate.
Claim 20
Dependent Claim 13 words
The method of claim 17 wherein said resinous material comprises an epoxy resin.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-10-06 1990-04-07 1990-10-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-10-06 1994-04-07 1994-10-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-10-06 1998-04-07 1998-10-07 $7700.00 Window Closed / Lapsed

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