US4579623A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for surface treatment by plasma
Assignee: Hitachi Ltd
•
Filing: 1984-08-21
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Granted: 1986-04-01
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Expires: 2004-08-21
Abstract
Abstract A gas is introduced into a vacuum chamber after the vacuum chamber is evacuated, and a plasma is generated within at least part of the vacuum chamber. The specimen surface is exposed to the plasma so that the surface is treated. A plurality of different gases, such as SF 6 , N 2 , and the like, are used as the gas being introduced. The quantity of the gas is changed during the surface treatment. A controller is used as a mechanism for changing the quantity of gas introduced. The controller is operated in accordance with a predetermined program, or by signals obtained by detecting the surface conditions of the specimen during the surface treatment.
Inventors
- 👤 Keizo Suzuki
- 👤 Ken Ninomiya
- 👤 Shigeru Nishimatsu
- 👤 Sadayuki Okudaira
- 👤 Osami Okada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:57
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; C23C16/4404; C23C16/50; C23C16/511; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/694; H10P14/6943; H10P14/69433; H10P50/00; H10P50/20; H10P50/24; H10P50/242; H10P50/244; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
105 words
In a method of treating the surface of a specimen in which a vacuum chamber is evacuated, a gas is introduced into said vacuum chamber, a plasma is generated within at least part of said vacuum chamber, and the surface of said specimen is treated by said plasma, a plasma surface treatment method characterized in that a first quantity of said gas is introduced, and the quantity of gas introduced is changed during the surface treatment of said specimen, the introducing of the first quantity of gas and the changed quantity of gas constituting a cycle, and wherein said cycle is repeated at least once.
Claim 2
Dependent Claim
105 words
In a method of treating the surface of a specimen in which a vacuum chamber is evacuated, a gas is introduced into said vacuum chamber, a plasma is generated within at least part of said vacuum chamber, and the surface of said specimen is treated by said plasma, a plasma surface treatment method characterized in that a first quantity of said gas is introduced, and the quantity of gas introduced is changed during the surface treatment of said specimen, the introducing of the first quantity of gas and the changed quantity of gas constituting a cycle, and wherein said cycle is repeated at least once.
Claim 3
Dependent Claim
25 words
The plasma surface treatment method as defined in claim 1 wherein the quantity of said gas introduced is changed in accordance with a predetermined program.
Claim 4
Dependent Claim
27 words
The surface treatment method as defined in claim 1 wherein the quantity of said gas introduced is changed in accordance with the conditions of said surface treatment.
Claim 5
Dependent Claim
126 words
In an apparatus consisting essentially of a vacuum chamber, means for evacuating said vacuum chamber, means for introducing a gas into said vacuum chamber, means for generating plasma within at least part of said vacuum chamber, and means for holding a specimen being surface-treated by said plasma, a plasma surface treatment apparatus characterized in that said gas introduction means is equipped with a mechanism for changing the quantity of said gas introduced during surface treatment, to introduce a first quantity of gas and then a changed quantity of gas during surface treatment, the introduction of the first quantity of gas and the changed quantity of gas being a cycle of gas introduction, the gas introduction means further including means to repeat said cycle at least once.
Claim 6
Dependent Claim
126 words
In an apparatus consisting essentially of a vacuum chamber, means for evacuating said vacuum chamber, means for introducing a gas into said vacuum chamber, means for generating plasma within at least part of said vacuum chamber, and means for holding a specimen being surface-treated by said plasma, a plasma surface treatment apparatus characterized in that said gas introduction means is equipped with a mechanism for changing the quantity of said gas introduced during surface treatment, to introduce a first quantity of gas and then a changed quantity of gas during surface treatment, the introduction of the first quantity of gas and the changed quantity of gas being a cycle of gas introduction, the gas introduction means further including means to repeat said cycle at least once.
Claim 7
Dependent Claim
24 words
The plasma surface treatment apparatus as defined in claim 4 wherein said mechanism for changing the quantity of said gas introduced is a controller.
Claim 8
Dependent Claim
34 words
The plasma surface treatment apparatus as defined in claim 4 wherein said mechanism for changing the quantity of said gas introduced changes the quantity of said gas introduced in accordance with a predetermined program.
Claim 9
Dependent Claim
19 words
The plasma surface treatment apparatus as defined in claim 6 wherein the change in said gas introduced is periodical.
Claim 10
Dependent Claim
32 words
The plasma surface treatment apparatus as defined in claim 7 wherein the period of said change is longer than the time during which gas molecules or atoms remain within said vacuum chamber.
Claim 11
Dependent Claim
49 words
The plasma surface treatment apparatus as defined in claim 7 wherein said mechanism for changing the quantity of said gas introduced changes the quantity of said gas introduced in accordance with a program which measures the condition of the progress of said surface treatment, and feeds back said condition.
Claim 12
Dependent Claim
137 words
In an apparatus consisting essentially of a vacuum chamber, means for evacuating said vacuum chamber, means for introducing a gas into said vacuum chamber, means for generating plasma within at least part of said vacuum chamber, means for holding a specimen being surface-treated by said plasma, and means for applying an external voltage to said specimen, a plasma surface treatment apparatus characterized in that said gas introduction means is equipped with a mechanism for changing the quantity of said gas introduced during said surface treatment, to introduce a first quantity of gas and then a changed quantity of gas during said surface treatment, the introduction of the first quantity of gas and the changed quantity of gas being a cycle of gas introduction, the gas introduction means further including means to repeat said cycle at least once.
Claim 13
Dependent Claim
137 words
In an apparatus consisting essentially of a vacuum chamber, means for evacuating said vacuum chamber, means for introducing a gas into said vacuum chamber, means for generating plasma within at least part of said vacuum chamber, means for holding a specimen being surface-treated by said plasma, and means for applying an external voltage to said specimen, a plasma surface treatment apparatus characterized in that said gas introduction means is equipped with a mechanism for changing the quantity of said gas introduced during said surface treatment, to introduce a first quantity of gas and then a changed quantity of gas during said surface treatment, the introduction of the first quantity of gas and the changed quantity of gas being a cycle of gas introduction, the gas introduction means further including means to repeat said cycle at least once.
Claim 14
Dependent Claim
19 words
The plasma surface treatment apparatus as defined in claim 10 wherein said external voltage is a radio-frequency (RF) voltage.
Claim 15
Dependent Claim
41 words
The plasma surface treatment apparatus as defined in claim 10 or 11 wherein said mechanism for changing the quantity of said gas introduced changes the application of said voltage in accordance with said change in the quantity of said gas introduced.
Claim 16
Dependent Claim
41 words
The plasma surface treatment apparatus as defined in claim 10 wherein said mechanism for changing the quantity of said gas introduced changes intermittently the plasma radiation onto said specimen in accordance with said change in the quantity of said gas introduced.
Claim 17
Dependent Claim
139 words
In an apparatus consisting essentially of a vacuum chamber, means for evacuating said vacuum chamber, means for introducing a gas into said vacuum chamber, means for generating plasma within at least part of said vacuum chamber, and means for holding a specimen being surface-treated by said plasma, a plasma surface treatment apparatus characterized by including a mechanism for changing the quantity of said gas introduced, to introduce a first quantity of gas and then a changed quantity of gas into the vacuum chamber during the plasma surface treatment, the introduction of the first quantity of gas and the changed quantity of gas being a cycle of gas introduction, the mechanism further including means to repeat said cycle at least once, and means for detecting the end point of the surface treatment of said specimen from signals from said mechanism.
Claim 18
Dependent Claim
139 words
In an apparatus consisting essentially of a vacuum chamber, means for evacuating said vacuum chamber, means for introducing a gas into said vacuum chamber, means for generating plasma within at least part of said vacuum chamber, and means for holding a specimen being surface-treated by said plasma, a plasma surface treatment apparatus characterized by including a mechanism for changing the quantity of said gas introduced, to introduce a first quantity of gas and then a changed quantity of gas into the vacuum chamber during the plasma surface treatment, the introduction of the first quantity of gas and the changed quantity of gas being a cycle of gas introduction, the mechanism further including means to repeat said cycle at least once, and means for detecting the end point of the surface treatment of said specimen from signals from said mechanism.
Claim 19
Dependent Claim
78 words
The plasma surface treatment method as defined in claim 1 wherein in introducing one of said first quantity of gas and the changed quantity of gas the surface of the specimen is treated under a discharge condition for promoting etching, and in introducing the other of the first quantity of gas and the changed quantity of gas the surface of the specimen is treated under a discharge condition for changing the characteristics of the surface of the specimen.
Claim 20
Dependent Claim
61 words
The plasma surface treatment method as defined in claim 15 wherein in introducing the first quantity of gas the surface of the specimen is treated under a discharge condition for promoting etching, and in introducing the changed quantity of gas the surface of the specimen is treated under a discharge condition for changing the characteristics of the surface of the specimen.
Claim 21
Dependent Claim
20 words
The plasma surface treatment method as defined in claim 16 wherein the first quantity of gas includes a halogen-containing gas.
Claim 22
Dependent Claim
18 words
The plasma surface treatment method as defined in claim 17 wherein the halogen-containing gas is SF 6 .
Claim 23
Dependent Claim
34 words
The plasma surface treatment method as defined in claim 17 wherein the changed quantity of gas includes at least one of elemental nitrogen, carbon or oxygen, or a compound containing oxygen, nitrogen or carbon.
Claim 24
Dependent Claim
34 words
The plasma surface treatment method as defined in claim 16 wherein the changed quantity of gas includes at least one of elemental nitrogen, carbon or oxygen, or a compound containing oxygen, nitrogen or carbon.
Claim 25
Dependent Claim
47 words
The plasma surface treatment method as defined in claim 20 wherein the changed quantity of gas consists essentially of at least one rare gas and H 2 in addition to at least one of elemental nitrogen, carbon or oxygen, or a compound containing oxygen, nitrogen or carbon.
Claim 26
Dependent Claim
19 words
The plasma surface treatment method as defined in claim 16 wherein the cycle is repeated at least ten times.
Claim 27
Dependent Claim
40 words
The plasma surface treatment method as defined in claim 22 wherein, for each cycle, the first quantity of gas is introduced for a longer period of time than the period of time that the changed quantity of gas is introduced.
Claim 28
Dependent Claim
38 words
The plasma surface treatment method as defined in claim 1 wherein the surface of the specimen is made of a material selected from the group consisting of Si, Mo, W, Al, and silicides of Mo, W and Al.
Claim 29
Dependent Claim
59 words
The plasma surface treatment method as defined in claim 1 wherein in introducing the first quantity of gas the surface of the specimen is treated under a discharge condition for depositing a coating on the surface, and in introducing the changed quantity of gas the specimen is treated under a discharge condition for changing the characteristics of the coating.
Claim 30
Dependent Claim
37 words
The plasma surface treatment method as defined in claim 25 wherein the first quantity of gas includes SiF 4 and N 2 , and the changed quantity of gas includes N 2 with no SiF 4 .
Claim 31
Dependent Claim
31 words
The plasma surface treatment method as defined in claim 26 wherein the coating deposited during each cycle of introducing the first quantity of gas is at most 10 nm in thickness.
Claim 32
Dependent Claim
29 words
The plasma surface treatment apparatus as defined in claim 4 further comprising cooling means for cooling the specimen during plasma surface treatment to prevent temperature rise of the specimen.
Claim 33
Dependent Claim
27 words
The plasma surface treatment apparatus as defined in claim 4 wherein said means for holding a specimen comprises a rotatable means for holding a plurality of specimens.
Claim 34
Dependent Claim
34 words
The plasma surface treatment apparatus as defined in claim 29 further comprising means for rotating said rotatable means, and wherein said means for rotating said rotatable means and said gas introduction means are interlocked.
Claim 35
Dependent Claim
77 words
The plasma surface treatment apparatus as defined in claim 4 further comprising means for treating the surface of the specimen under a discharge condition for promoting etching when one of the first quantity and changed quantity of gas is introduced, and means for treating the surface of the specimen under a discharge condition for changing the characteristics of the surface of the specimen when the other of the first quantity and changed quantity of gas are introduced.
Claim 36
Dependent Claim
77 words
The plasma surface treatment apparatus as defined in claim 10 further comprising means for treating the surface of the specimen under a discharge condition for promoting etching when one of the first quantity and changed quantity of gas is introduced, and means for treating the surface of the specimen under a discharge condition for changing the characteristics of the surface of the specimen when the other of the first quantity and changed quantity of gas are introduced.
Claim 37
Dependent Claim
77 words
The plasma surface treatment apparatus as defined in claim 14 further comprising means for treating the surface of the specimen under a discharge condition for promoting etching when one of the first quantity and changed quantity of gas is introduced, and means for treating the surface of the specimen under a discharge condition for changing the characteristics of the surface of the specimen when the other of the first quantity and changed quantity of gas are introduced.
References Cited (Backward Citations)
US4417947A
Cited
US4426246A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-03-31 | 1989-09-30 | 1990-04-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-03-31 | 1993-09-30 | 1994-04-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-03-31 | 1997-09-30 | 1998-04-01 | $7700.00 | Window Closed / Lapsed |