Bipolar transistor construction

Claim 2

A process for bipolar transistor fabrication, comprising the steps of: forming a base region overlying a collector region in a semiconductor material, the base and collector materials having opposite conductivity types; forming an appropriately patterned emitter region overlying the base region, of the same conductivity type as the collector region; forming a wall of insulating material on the base region and adjacent to the edges of the emitter region; and forming a conductive layer over the base and emitter regions but not over the wall of insulating material, whereby the conductive layer serves to establish separate electrical contacts with the base and emitter regions, and the wall of insulating material minimizes the size of inactive portions of the base region.

Claim 3

A process as set forth in claim 1, wherein said steps of forming an appropriately patterned emitter region and forming a wall of insulating material include: forming an emitter layer over the base region; depositing an oxidation-masking film over the emitter layer; patterning and etching the emitter region in the oxidation-masking film and in the emitter layer, including undercutting the oxidation-masking film by a controlled amount; forming an insulating film over the surfaces of semiconductor materials but not over the oxidation masking film; etching the insulating film by a directionally preferential technique that leaves a wall of insulating material at the edges of the emitter region, beneath the undercut edges of the oxidation-masking film; and stripping the oxidation-masking film from the emitter region.

Claim 4

A process as set forth in claim 2, wherein: the process further includes the step of forming an oxide layer over the emitter layer before said depositing step; and said step of undercutting the oxidation-masking film includes patterning and etching the oxidation-masking film, etching the oxide layer from the emitter layer, with a desired degree of undercut beneath the oxidation-masking film, and etching the exposed emitter layer, whereby undercutting is achieved without prolonged exposure to etching.

Claim 5

A process as set forth in claim 2, and further including the step of: further doping portions of the base region not directly beneath the emitter region, to further reduce the base resistance of the transistor.

Claim 6

A process as set forth in claim 1, wherein said steps of forming an appropriately patterned emitter region and forming a wall of insulating material include: forming an emitter layer over the base region; patterning and etching the emitter layer to define the emitter region; forming an insulating film over the base and emitter regions; and etching the insulating film by a directionally preferential technique that leaves a wall of insulating material at the edges of the emitter region.

Claim 7

A process as set forth in claim 5, and further including the step of: further doping portions of the base region not directly beneath the emitter region, to further reduce the base resistance of the transistor.

Claim 8

A process for bipolar transistor fabrication, comprising the steps of: implanting a base region in a silicon semiconductor material, to form a base region over a collector region of opposite conductivity types; depositing an emitter layer over the base layer, of the same conductivity type as the collector region; depositing a film of silicon nitride over the emitter layer; selectively etching the silicon nitride film and the emitter layer to define an emitter region, said selectively etching step including undercutting the edges of the silicon nitride film by a controlled amount; forming a thermal oxide film over the base region and at the edges of the emitter region, but not over the silicon nitride film; etching the thermal oxide film by a directionally preferential etching technique, to leave a wall of thermal oxide material at the edges of the emitter region, beneath the undercut edges of the silicon nitride film; stripping the remaining portions of the silicon nitride film from the emitter region; depositing a film of platinum over the entire device; sintering the platinum film to form platinum silicide layers over the emitter region and the base region, leaving unsintered platinum over the wall of oxide material; and etching away the unsintered platinum to expose the wall of oxide material, which electrically isolates the conductive platinum silicide on the emitter and base regions.

Claim 9

A process for bipolar transistor fabrication, comprising the steps of: implanting a base region in a silicon semiconductor material, to form a base region over a collector region of opposite conductivity types; depositing an emitter layer over the base layer, of the same conductivity type as the collector region; depositing a film of silicon nitride over the emitter layer; selectively etching the silicon nitride film and the emitter layer to define an emitter region, said selectively etching step including undercutting the edges of the silicon nitride film by a controlled amount; forming a thermal oxide film over the base region and at the edges of the emitter region, but not over the silicon nitride film; etching the thermal oxide film by a directionally preferential etching technique, to leave a wall of thermal oxide material at the edges of the emitter region, beneath the undercut edges of the silicon nitride film; stripping the remaining portions of the silicon nitride film from the emitter region; depositing a film of platinum over the entire device; sintering the platinum film to form platinum silicide layers over the emitter region and the base region, leaving unsintered platinum over the wall of oxide material; and etching away the unsintered platinum to expose the wall of oxide material, which electrically isolates the conductive platinum silicide on the emitter and base regions.

Claim 10

A process as set forth in claim 7, wherein: the process further includes the step of forming an oxide layer over the emitter layer before said silicon nitride depositing step; and said step of undercutting the silicon nitride film includes first etching the oxide layer from the emitter layer, with a desired degree of undercut beneath the silicon nitride film, whereby the step of etching the emitter layer can proceed uniformly without prolonged etchant exposure to achieve undercutting.

Claim 11

A process as set forth in claim 7, wherein: the process further includes the step of further doping portions of the base region not directly beneath the emitter region, to further reduce the base resistance of the transistor, after said stripping step.

Claim 12

A process for bipolar transistor fabrication, comprising the steps of: implanting a base region in a silicon semiconductor material, to form a base region over a collector region of opposite conductivity types; depositing an emitter layer over the base layer, of the same conductivity type as the collector region; selectively etching the emitter layer to define an emitter region; forming a thermal oxide film over the base region and at the edges of the emitter region; etching the thermal oxide film by a directionally preferential etching technique, to leave a wall of thermal oxide material at the edges of the emitter region; depositing a film of platinum over the entire device; sintering the platinum film to form platinum silicide layers over the emitter region and the base region, leaving unsintered platinum over the wall of oxide material; and etching away the unsintered platinum to expose the wall of oxide material, which electrically isolates the conductive platinum silicide on the emitter and base regions.

Claim 13

A process for bipolar transistor fabrication, comprising the steps of: implanting a base region in a silicon semiconductor material, to form a base region over a collector region of opposite conductivity types; depositing an emitter layer over the base layer, of the same conductivity type as the collector region; selectively etching the emitter layer to define an emitter region; forming a thermal oxide film over the base region and at the edges of the emitter region; etching the thermal oxide film by a directionally preferential etching technique, to leave a wall of thermal oxide material at the edges of the emitter region; depositing a film of platinum over the entire device; sintering the platinum film to form platinum silicide layers over the emitter region and the base region, leaving unsintered platinum over the wall of oxide material; and etching away the unsintered platinum to expose the wall of oxide material, which electrically isolates the conductive platinum silicide on the emitter and base regions.

Claim 14

A process as set forth in claim 10, wherein: the process further includes the step of further doping portions of the base region not directly beneath the emitter region, to further reduce the base resistance of the transistor, after said etching step.

Claim 15

A process for bipolar transistor fabrication, comprising the steps of: forming a base region overlying a collector region in a semiconductor material, the base and collector materials having opposite conductivity types; forming an appropriately patterned emitter region overlying the base region, of the same conductivity type as the collector region; forming a wall of insulating material on the base region and adjacent to the edges of the emitter region; and forming a conductive layer over the base and emitter regions but not over the wall of insulating material, whereby the conductive layer serves to establish separate electrical contacts with the base and emitter regions, and the wall of insulating material minimizes the size of inactive portions of the base region; and wherein said step of forming an appropriately patterned emitter region includes forming a wide inactive emitter portion not overlapping the base region, and forming an active emitter region that has a first area contiguous with and approximately as wide as the inactive portion, to provide a relatively low emitter resistance, and a second area adjoining the first, but being narrower to provide a relatively long active emitter perimeter and therefore a relatively low base resistance.

Claim 16

A process for bipolar transistor fabrication, comprising the steps of: forming a base region overlying a collector region in a semiconductor material, the base and collector materials having opposite conductivity types; forming an appropriately patterned emitter region overlying the base region, of the same conductivity type as the collector region; forming a wall of insulating material on the base region and adjacent to the edges of the emitter region; and forming a conductive layer over the base and emitter regions but not over the wall of insulating material, whereby the conductive layer serves to establish separate electrical contacts with the base and emitter regions, and the wall of insulating material minimizes the size of inactive portions of the base region; and wherein said step of forming an appropriately patterned emitter region includes forming a wide inactive emitter portion not overlapping the base region, and forming an active emitter region that has a first area contiguous with and approximately as wide as the inactive portion, to provide a relatively low emitter resistance, and a second area adjoining the first, but being narrower to provide a relatively long active emitter perimeter and therefore a relatively low base resistance.

Claim 17

A process as set forth in claim 12, wherein said steps of forming an appropriately patterned emitter region and forming a wall of insulating material include: forming an emitter layer over the base region; depositing an oxidation-masking film over the emitter layer; patterning and etching the emitter region in the oxidation-masking film and in the emitter layer, undercutting the oxidation-masking film by a controlled amount; forming an insulating film over the surfaces of semiconductor materials but not over the oxidation masking film; etching the insulating film by a directionally preferential technique that leaves a wall of insulating material at the edges of the emitter region, beneath the undercut edges of the oxidation-masking film; and stripping the oxidation-masking film from the emitter region.

Claim 18

A process as set forth in claim 13, wherein: the process further includes the step of forming an oxide layer over the emitter layer before said depositing step; and said step of undercutting the oxidation-masking film includes patterning and etching the oxidation-masking film, etching the oxide layer from the emitter layer, with a desired degree of undercut beneath the oxidation-masking film, and etching the exposed emitter layer, whereby undercutting is achieved without prolonged exposure to etching.

Claim 19

A process as set forth in claim 13, and further including the step of: further doping portions of the base region not directly beneath the emitter region, to further reduce the base resistance of the transistor.

Claim 20

A process as set forth in claim 12, wherein said steps of forming an appropriately patterned emitter region and forming a wall of insulating material include: forming an emitter layer over the base region; patterning and etching emitter layer to define the emitter region; forming an insulating film over the base and emitter regions; and etching the insulating film by a directionally preferential technique that leaves a wall of insulating material at the edges of the emitter region.

Claim 21

A process as set forth in claim 16, and further including the step of: further doping portions of the base region not directly beneath the emitter region, to further reduce the base resistance of the transistor.

Claim 22

A process for bipolar transistor fabrication, comprising the steps of: implanting a base region in a silicon semiconductor material, to form a base region over a collector region of opposite conductivity types; depositing an emitter layer over the base layer, of the same conductivity type as the collector region; depositing a film of silicon nitride over the emitter layer; selectively etching the silicon nitride film and the emitter layer to define an emitter region, said selectively etching step including undercutting the edges of the silicon nitride film by a controlled amount; forming a thermal oxide film over the base region and at the edges of the emitter region, but not over the silicon nitride film; etching the thermal oxide film by a directionally preferential etching technique, to leave a wall of thermal oxide material at the edges of the emitter region, beneath the undercut edges of the silicon nitride film; stripping the remaining portions of the silicon nitride film from the emitter region; depositing a film of platinum over the entire device; sintering the platinum film to form platinum silicide layers over the emitter region and the base region, leaving unsintered platinum over the wall of oxide material; and etching away the unsintered platinum to expose the wall of oxide material, which electrically isolates the conductive platinum silicide on the emitter and base regions; and wherein said step of selectively etching to define the emitter region includes forming a wide inactive emitter portion not overlapping the base region, and forming an active emitter region that has a first area contiguous with and approximately as wide as the inactive portion, to provide a relatively low emitter resistance, and a second area adjoining the first, but being narrower to provide a relatively long active emitter perimeter and therefore a relatively low base resistance.

Claim 23

A process for bipolar transistor fabrication, comprising the steps of: implanting a base region in a silicon semiconductor material, to form a base region over a collector region of opposite conductivity types; depositing an emitter layer over the base layer, of the same conductivity type as the collector region; depositing a film of silicon nitride over the emitter layer; selectively etching the silicon nitride film and the emitter layer to define an emitter region, said selectively etching step including undercutting the edges of the silicon nitride film by a controlled amount; forming a thermal oxide film over the base region and at the edges of the emitter region, but not over the silicon nitride film; etching the thermal oxide film by a directionally preferential etching technique, to leave a wall of thermal oxide material at the edges of the emitter region, beneath the undercut edges of the silicon nitride film; stripping the remaining portions of the silicon nitride film from the emitter region; depositing a film of platinum over the entire device; sintering the platinum film to form platinum silicide layers over the emitter region and the base region, leaving unsintered platinum over the wall of oxide material; and etching away the unsintered platinum to expose the wall of oxide material, which electrically isolates the conductive platinum silicide on the emitter and base regions; and wherein said step of selectively etching to define the emitter region includes forming a wide inactive emitter portion not overlapping the base region, and forming an active emitter region that has a first area contiguous with and approximately as wide as the inactive portion, to provide a relatively low emitter resistance, and a second area adjoining the first, but being narrower to provide a relatively long active emitter perimeter and therefore a relatively low base resistance.

Claim 24

A process as set forth in claim 18, wherein: the process further includes the step of forming an oxide layer over the emitter layer before said silicon nitride depositing step; and said step of undercutting the silicon nitride film includes first etching the oxide layer from the emitter layer, with a desired degree of undercut beneath the silicon nitride film, whereby the step of etching the emitter layer can proceed uniformly without prolonged etchant exposure to achieve undercutting.

Claim 25

A process as set forth in claim 18, wherein: the process further includes the step of further doping portions of the base region not directly beneath the emitter region, to further reduce the base resistance of the transistor, after said stripping step.

Claim 26

A process for bipolar transistor fabrication, comprising the steps of: implanting a base region in a silicon semiconductor material, to form a base region over a collector region of opposite conductivity types; depositing an emitter layer over the base layer, of the same conductivity type as the collector region; selectively etching the emitter layer to define an emitter region; forming a thermal oxide film over the base region and at the edges of the emitter region; etching the thermal oxide film by a directionally preferential etching technique, to leave a wall of thermal oxide material at the edges of the emitter region; depositing a film of platinum over the entire device; sintering the platinum film to form platinum silicide layers over the emitter region and the base region, leaving unsintered platinum over the wall of oxide material; and etching away the unsintered platinum to expose the wall of oxide material, which electrically isolates the conductive platinum silicide on the emitter and base regions; and wherein said step of selectively etching to define the emitter region includes forming a wide inactive emitter portion not overlapping the base region, and forming an active emitter region that has a first area contiguous with and approximately as wide as the inactive portion, to provide a relatively low emitter resistance, and a second area adjoining the first, but being narrower to provide a relatively long active emitter perimeter and therefore a relative low base resistance.

Claim 27

A process for bipolar transistor fabrication, comprising the steps of: implanting a base region in a silicon semiconductor material, to form a base region over a collector region of opposite conductivity types; depositing an emitter layer over the base layer, of the same conductivity type as the collector region; selectively etching the emitter layer to define an emitter region; forming a thermal oxide film over the base region and at the edges of the emitter region; etching the thermal oxide film by a directionally preferential etching technique, to leave a wall of thermal oxide material at the edges of the emitter region; depositing a film of platinum over the entire device; sintering the platinum film to form platinum silicide layers over the emitter region and the base region, leaving unsintered platinum over the wall of oxide material; and etching away the unsintered platinum to expose the wall of oxide material, which electrically isolates the conductive platinum silicide on the emitter and base regions; and wherein said step of selectively etching to define the emitter region includes forming a wide inactive emitter portion not overlapping the base region, and forming an active emitter region that has a first area contiguous with and approximately as wide as the inactive portion, to provide a relatively low emitter resistance, and a second area adjoining the first, but being narrower to provide a relatively long active emitter perimeter and therefore a relative low base resistance.

Claim 28

A process as set forth in claim 21, wherein: the process further includes the step of further doping portions of the base region not directly beneath the emitter region, to further reduce the base resistance of the transistor, after said etching step.