US4652290A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for making optical channel waveguides and product manufactured thereby
Assignee: NXP USA Inc
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Filing: 1983-07-05
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Granted: 1987-03-24
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Expires: 2003-07-05
Abstract
Abstract An optical channel waveguide is manufactured by forming an optical isolation pedestal or ridge on a substrate and coating the substrate and pedestal with an optical channel layer. The optical channel waveguide is that portion of the optical channel layer which overlies the pedestal. Cladding layers may be added overlying the optical channel film or the cladding function may be performed by air. The disclosed process requires no high temperature diffusion steps and is thus suitable for manufacturing optical channel waveguides integrated on a semiconductor substrate with semiconductor devices. In addition, the entire process for manufacturing the optical channel waveguide may be carried out during a single pumpdown of a vacuum system.
Inventors
- 👤 Frederick Y. Cho
- 👤 Fred S. Hickernell
- 👤 Fred V. Richard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:13
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/132
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
65 words
A method of making an optical channel waveguide comprising the steps of: forming a pedestal on a substrate; depositing an optical channel layer at least on said pedestal, said optical channel layer having an index of refraction greater than said pedestal; and providing a cladding layer overlying said optical channel layer, said cladding layer having an index of refraction lower than said optical channel layer.
Claim 2
Independent Claim
65 words
A method of making an optical channel waveguide comprising the steps of: forming a pedestal on a substrate; depositing an optical channel layer at least on said pedestal, said optical channel layer having an index of refraction greater than said pedestal; and providing a cladding layer overlying said optical channel layer, said cladding layer having an index of refraction lower than said optical channel layer.
Claim 3
Dependent Claim
45 words
A method according to claim 1 wherein said step of forming a pedestal further comprises the steps of: forming an optical isolation layer on a semiconductor substrate; masking a pedestal portion of said optical isolation layer; and removing unmasked portions of said optical isolation layer.
Claim 4
Dependent Claim
25 words
A method according to claim 1 wherein said step of providing a cladding layer comprises the step of: exposing said optical channel layer to air.
Claim 5
Dependent Claim
18 words
A method according to claim 2 wherein said optical isolation layer comprises approximately two microns of silicon dioxide.
Claim 6
Dependent Claim
32 words
A method according to claim 1 wherein said step of depositing said channel layer further comprises the step of: depositing an optical quality zinc oxide film on said pedestal and said substrate.
Claim 7
Dependent Claim
18 words
A method according to claim 5 wherein said zinc oxide film is from 6,000 to 8,000 angstroms thick.
Claim 8
Dependent Claim
62 words
An optical channel waveguide comprising: a substrate; an optical isolation pedestal on said substrate; an optical channel film overlying said pedestal and said substrate, said optical channel film having an index of refraction greater than said optical isolation pedestal; and a cladding layer overlying said optical channel film, said cladding layer having an index of refraction lower than said optical channel film.
Claim 9
Dependent Claim
62 words
An optical channel waveguide comprising: a substrate; an optical isolation pedestal on said substrate; an optical channel film overlying said pedestal and said substrate, said optical channel film having an index of refraction greater than said optical isolation pedestal; and a cladding layer overlying said optical channel film, said cladding layer having an index of refraction lower than said optical channel film.
Claim 10
Dependent Claim
23 words
An optical channel waveguide according to claim 7 wherein: said substrate is a semiconductor material; and said optical isolation pedestal is silicon dioxide.
Claim 11
Dependent Claim
16 words
An optical channel waveguide according to claim 7 wherein: said optical channel film is zinc oxide.
Claim 12
Dependent Claim
14 words
An optical channel waveguide according to claim 7 wherein: said cladding layer is air.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-23 | 1990-09-22 | 1991-03-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-23 | 1994-09-22 | 1995-03-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-23 | 1998-09-22 | 1999-03-24 | $7700.00 | Window Closed / Lapsed |