Formation of three-dimensionally disposed glass waveguide

Abstract

Abstract PURPOSE:To obtain a titled waveguide which has functions such as three-dimensional wiring of light, optical synthesizing and coupling and the like and has high degrees of integration by integrating and forming the other plane of waveguides on the surface including one plane of waveguides. CONSTITUTION:Grooves for forming core parts are formed on a smooth-surfaced glass substrate 1 by etching, and fine glass particles 2 for forming cores are deposited thereon, after which they are vitrified to transparent glass and the glass other than the grooves is etched off to form hollow cores 3; thereafter, fine glass particles 4 for forming clad are deposited thereon and are then vitrified to transparent glass, thereby forming one plane of waveguides. Next, fine glass particles 6 for forming the other plane of cores are deposited on the surface of said glass 5, and are vitrified to transparent glass, after which the glass other than the core parts is etched off to form raised cores 7; thereafter, fine glass particles 8 for forming clad are deposited thereon, and are vitrified to transparent glass to form clad glass 9, thereby forming the other plane of glass waveguides.

Inventors

• 👤 Taiji Murakami
• 👤 Nobuo Shimizu
• 👤 Masahiro Ikeda

Bibliographic Details