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US4376160A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of making and structure for monolithic optical circuits

Assignee: California Institute of Technology
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Filing: 1981-01-27
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Granted: 1983-03-08
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Expires: 2001-01-27
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Abstract

Abstract A method for making monolithic optical circuits, with related optical devices as required or desired, on a supporting surface (10) consists of coating the supporting surface with reflecting metal or cladding resin, spreading a layer of liquid radiation senstivie plastic (12) on the surface, exposing the liquid plastic with a mask (14) to cure it in a desired pattern of light conductors (16, 18, 20), washing away the unexposed liquid plastic, and coating the conductors thus formed with reflective metal or cladding resin. The index of refraction for the cladding (22) is selected to be lower than for the conductors so that light in the conductors will be reflected by the interface with the cladding. For multiple level conductors, as where one conductor must cross over another, the process may be repeated to fabricate a "bridge" with columns (24, 26) of conductors to the next level, and conductor (28) between the columns. For more efficient transfer of energy over the bridge, faces at 45° may be formed to reflect light up and across the bridge.

Inventors

  • 👤 Vincent L. Evanchuk

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 14:57
CPC Classifications
B; B05; B05D; B05D3/00; B05D3/06; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/138; G03; G03F; G03F7/00; G03F7/0005

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 377 words
A method for making a multilevel monolithic optical circuit on a supporting surface, said optical circuit consisting of conductors on at least two levels with optical coupling of conductors on one level to optical conductors on the second level through optical conductive columns, comprising the steps of preparing the supporting surface to be reflective to light in said circuit at the interface between light conductors of said circuit and said surface, spreading a layer of liquid radiation sensitive plastic on said surface to a thickness desired for said conductors of said circuit, exposing said radiation sensitive plastic to radiation in a pattern desired for said conductors, thereby to harden said liquid radiation sensitive plastic to form said circuit conductors on a first level, washing away unexposed liquid radiation sensitive plastic, coating said pattern of optical conductors thus formed on said support surface with liquid radiation sensitive cladding material that will assure light in said conductors on said first level to be reflected by the interface between said conductors and said coating material, exposing said radiation sensitive cladding material except over specified areas of conductors of said first level where optical coupling is to be made with conductors of said second level, thereby to harden said radiation sensitive cladding material except over said specified areas, washing away said unexposed radiation sensitive cladding material over said specified areas, spreading a second layer of liquid radiation sensitive plastic on said radiation sensitive cladding material and allowing said liquid radiation sensitive plastic thus spread to fill areas where radiation sensitive cladding material has been washed away, said second layer of liquid radiation sensitive plastic having an index of refraction substantially the same as said first layer of liquid radiation sensitive plastic used to form said first level of conductors, exposing said second layer of radiation sensitive plastic to radiation in a desired pattern for said conductors, thereby to harden said second layer of liquid radiation sensitive plastic to form a second level of conductors with optical coupling to said first level of conductors, and coating said second level of conductors of said optical circuit thus formed with material that will assure light in said conductors to be reflected by the interface between said second level of conductors and said coating material.
Claim 2
Independent Claim 377 words
A method for making a multilevel monolithic optical circuit on a supporting surface, said optical circuit consisting of conductors on at least two levels with optical coupling of conductors on one level to optical conductors on the second level through optical conductive columns, comprising the steps of preparing the supporting surface to be reflective to light in said circuit at the interface between light conductors of said circuit and said surface, spreading a layer of liquid radiation sensitive plastic on said surface to a thickness desired for said conductors of said circuit, exposing said radiation sensitive plastic to radiation in a pattern desired for said conductors, thereby to harden said liquid radiation sensitive plastic to form said circuit conductors on a first level, washing away unexposed liquid radiation sensitive plastic, coating said pattern of optical conductors thus formed on said support surface with liquid radiation sensitive cladding material that will assure light in said conductors on said first level to be reflected by the interface between said conductors and said coating material, exposing said radiation sensitive cladding material except over specified areas of conductors of said first level where optical coupling is to be made with conductors of said second level, thereby to harden said radiation sensitive cladding material except over said specified areas, washing away said unexposed radiation sensitive cladding material over said specified areas, spreading a second layer of liquid radiation sensitive plastic on said radiation sensitive cladding material and allowing said liquid radiation sensitive plastic thus spread to fill areas where radiation sensitive cladding material has been washed away, said second layer of liquid radiation sensitive plastic having an index of refraction substantially the same as said first layer of liquid radiation sensitive plastic used to form said first level of conductors, exposing said second layer of radiation sensitive plastic to radiation in a desired pattern for said conductors, thereby to harden said second layer of liquid radiation sensitive plastic to form a second level of conductors with optical coupling to said first level of conductors, and coating said second level of conductors of said optical circuit thus formed with material that will assure light in said conductors to be reflected by the interface between said second level of conductors and said coating material.
Claim 3
Dependent Claim 112 words
A method as defined in claim 1 wherein the ends of conductors on said first level are terminated with faces at 45° to reflect light up to said second level through optical coupling columns by exposing said first layer of liquid radiation sensitive plastic with a beam of light at 45°, and the ends of conductors on said second level are terminated with faces directly over and parallel with faces at 45° in the first level of conductors to complete optical coupling of conductors in the second level with optical conductors on the first level by exposing said second layer of liquid radiation sensitive plastic with a beam of light at 45°.
Claim 4
Dependent Claim 60 words
A method as defined in claim 1 wherein exposure for said pattern of conductors on said first level is comprised of a pattern that includes two conductors normal to each other, and the method includes forming in the second level of conductors a bridge for one crossing over the other of said two conductors in the first level of conductors.
Claim 5
Dependent Claim 85 words
A method as defined in claim 3 wherein the other conductor on the first level is terminated with a face at 45° to reflect light upward by exposing said first layer of liquid radiation sensitive plastic with a beam of light at 45°, and said bridge in the second level is terminated at its ends with faces parallel to and directly over 45° faces in the first level by exposing said second layer of liquid radiation sensitive plastic with a beam of light at 45°.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1986-03-07 1986-09-06 1987-03-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1990-03-07 1990-09-06 1991-03-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1994-03-07 1994-09-06 1995-03-08 $7700.00 Window Closed / Lapsed

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