Patent US4622093A successfully refreshed from Google Patents.
US4622093A
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Method of selective area epitaxial growth using ion beams
Assignee: Nokia Bell Labs
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Filing: 1986-01-08
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Granted: 1986-11-11
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Expires: 2006-01-08
Abstract
Abstract A method of selective area epitaxial growth using a scanning ion beam is described.
Inventors
- 👤 Won-Tien Tsang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 11:11
CPC Classifications
C; C30; C30B; C30B23/00; C30B23/02; C30B23/04; B; B82; B82Y; B82Y10/00; C30B23/08; H; H10; H10D; H10D30/00; H10D30/40; H10D30/43; H10D30/435; H10D62/00; H10D62/80; H10D62/81; H10D62/812; H10D62/813; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B2006/12166; G02B2006/12178
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
73 words
A method of epitaxially growing on selected areas within a larger area comprising the steps of: scanning a first beam of ionized Group III particles over said selected areas, said particles having an energy between 10 eV and 35 keV; and flooding said larger area with a second thermal beam of Group V particles thereby growing essentially one-dimensional features on said selected areas where said first beam and said second thermal beam impinge.
Claim 2
Independent Claim
73 words
A method of epitaxially growing on selected areas within a larger area comprising the steps of: scanning a first beam of ionized Group III particles over said selected areas, said particles having an energy between 10 eV and 35 keV; and flooding said larger area with a second thermal beam of Group V particles thereby growing essentially one-dimensional features on said selected areas where said first beam and said second thermal beam impinge.
Claim 3
Dependent Claim
25 words
A method as recited in claim 1 comprising the further step of flooding said larger area with a third thermal beam of Group III particles.
Claim 4
Dependent Claim
17 words
A method as recited in claim 2 further comprising scanning a fourth beam of Group III particles.
Claim 5
Dependent Claim
21 words
A method as recited in claim 2 further comprising flooding said larger area with a fifth beam of Group III particles.
Claim 6
Dependent Claim
16 words
A method as recited in claim 3 in which said voltage is greater than 2000 volts.
Claim 7
Dependent Claim
16 words
A method as recited in claim 5 in which said scanning and flooding steps occur sequentially.
Claim 8
Dependent Claim
16 words
A method as recited in claim 3 in which said voltage is less than 2000 volts.
Claim 9
Dependent Claim
16 words
A method as recited in claim 3 in which said flooding and scanning steps occur simultaneously.
Claim 10
Dependent Claim
15 words
A method as recited in claim 3 in which said scanning is by electromagnetic means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-11-10 | 1990-05-12 | 1990-11-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-11-10 | 1994-05-12 | 1994-11-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-11-10 | 1998-05-12 | 1998-11-11 | $7700.00 | Window Closed / Lapsed |