JPS54865A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Molecular beam crystal growing method
Assignee: NEC Corp
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Filing: 1977-06-03
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Granted: —
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Expires: 1997-06-03
Abstract
Abstract PURPOSE: To secure an accurate control for the distribution of the impurity element in the film thickness direction, by changing one of several kinds of the molecular beams into the positive ion beam and also securing a control through irradiation of the electron beam onto the signle-crystal surface. COPYRIGHT: (C)1979,JPO&Japio
Inventors
- 👤 Yasuo Seki
- 👤 Tatsuo Fuji
- 👤 Hisatsune Watanabe
- 👤 Akira Usui
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-27 10:07
CPC Classifications
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