US4622083A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Molecular beam epitaxial process
Assignee: Texas Instruments Inc
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Filing: 1985-03-11
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Granted: 1986-11-11
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Expires: 2005-03-11
Abstract
Abstract A molecular beam epitaxial growth process, for growth of III-V compounds, wherein a substrate is heated approximately to growth temperature before the group III cell is fully heated. That is, for example, to grow gallium arsenide, the arsenic cell would be heated, the arsenic cell's shutter opened, and the substrate heated up to growth temperature (e.g. 600 C), before the gallium cell is heated up. After the gallium cell is heated up, its shutter is opened, and epitaxial growth proceeds.
Inventors
- 👤 Hung-Dah Shih
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:05
CPC Classifications
C; C30; C30B; C30B23/00; C30B23/02; C30B23/06; C30B23/066; C30B29/00; C30B29/10; C30B29/40; H; H10; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; Y; Y10; Y10S; Y10S148/00; Y10S148/11; Y10S148/169
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
220 words
A method for growing epitaxial layers consisting essentially of III-V semiconductor material, comprising the steps of: providing a crystalline substrate; suspending said substrate in an ultra-high vacuum and facing a plurality of effusion cells; heating at least one of said effusion cells containing a group V element while maintaining each of said effusion cells containing a group III element at a temperature at least 100 degrees C. below a growth effusion temperature for said cell, said heated effusion cell containing a group V element to provide a vapor pressure of said group V element at the surface of said substrate which is approximately in equilibrium with a group V component of the surface of said substrate at a predetermined growth surface temperature; heating said substrate to at least 2/3 of said growth surface temperature in degrees Kelvin while maintaining all of said effusion cells containing group III elements at temperatures at least 100 degrees C. below growth effusion temperatures for said cells; maintaining said substrate at said at least 2/3 of said growth surface temperature while heating another one of said effusion cells containing a group III element to a predetermined growth effusion temperature: opening the shutter of said group III effusion cell while maintaining said substrate at said predetermined growth surface temperature, whereby epitaxial growth occurs on said substrate.
Claim 2
Independent Claim
220 words
A method for growing epitaxial layers consisting essentially of III-V semiconductor material, comprising the steps of: providing a crystalline substrate; suspending said substrate in an ultra-high vacuum and facing a plurality of effusion cells; heating at least one of said effusion cells containing a group V element while maintaining each of said effusion cells containing a group III element at a temperature at least 100 degrees C. below a growth effusion temperature for said cell, said heated effusion cell containing a group V element to provide a vapor pressure of said group V element at the surface of said substrate which is approximately in equilibrium with a group V component of the surface of said substrate at a predetermined growth surface temperature; heating said substrate to at least 2/3 of said growth surface temperature in degrees Kelvin while maintaining all of said effusion cells containing group III elements at temperatures at least 100 degrees C. below growth effusion temperatures for said cells; maintaining said substrate at said at least 2/3 of said growth surface temperature while heating another one of said effusion cells containing a group III element to a predetermined growth effusion temperature: opening the shutter of said group III effusion cell while maintaining said substrate at said predetermined growth surface temperature, whereby epitaxial growth occurs on said substrate.
Claim 3
Dependent Claim
19 words
The process of claim 1, wherein said surface temperature is in the range between 400 and 700 degrees C.
Claim 4
Dependent Claim
13 words
The process of claim 1, wherein said group III effusion cell contains gallium.
Claim 5
Dependent Claim
20 words
The process of claim 3, wherein gallium cell is heated to a temperature of greater than about 1000 degrees C.
Claim 6
Dependent Claim
15 words
The process of claim 1, wherein said group V effusion cell contains an arsenic-cracking source.
Claim 7
Dependent Claim
25 words
The process of claim 1, wherein said ultra-high vacuum chamber is evacuated to a background pressure less than one times ten to the -10 Torr.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-11-10 | 1990-05-12 | 1990-11-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-11-10 | 1994-05-12 | 1994-11-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-11-10 | 1998-05-12 | 1998-11-11 | $7700.00 | Window Closed / Lapsed |