Patent US4617254A successfully refreshed from Google Patents.
US4617254A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming detailed images
Assignee: JNC Corp
•
Filing: 1985-04-16
•
Granted: 1986-10-14
•
Expires: 2005-04-16
Abstract
Abstract A process for forming a detailed image having a high sensitivity to far-UV light and capable of giving a positive type image with a high precision is provided, which process comprises applying onto a base a resist solution comprising an organic solution, of a homopolymer of methyl vinyl ketone or a copolymer thereof with a comonomer of the formula R 1 R 2 C═CH 2 wherein R 1 is H or --CH 3 and R 2 is acetoxy, nitrile, unsubstituted or substituted aryl or ##STR1## wherein R 3 is alkyl, to form a coating on the base; irradiating far-UV light; developing the coating with a developer composed mainly of a cellosolve compound; and rinsing or/and washing the resulting material.
Inventors
- 👤 Akihiro Kinoshita
- 👤 Yohichi Namariyama
- 👤 Hiromi Higashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 17:43
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
180 words
A process for forming detailed positive type images which comprises: providing a base; applying a resist solution to the base, said resist solution comprising an organic solvent and 1-15% by weight of at least one of a homopolymer of methyl vinyl ketone and a copolymer thereof with a comonomer selected from the group consisting of: vinyl acetate, acrylonitrile, styrene, α-methylstyrene, vinyltoluene, chlorostyrene, bromostyrene, nitrostyrene, cyanostyrene, methyl methacrylate, ethyl methacrylate, butyl methacrylate, ethyl acrylate and octyl acrylate, wherein the proportion of methyl vinyl ketone in the copolymer is at least 10% by mol, to form a coating on the base; imagewise irradiating the coating with far-ultraviolet light; developing the resulting coating with a liquid solvent as a developer, said liquid selected from the group consisting of at least one cellosolve compound and at least one cellosolve compound mixed with a lower alcohol wherein the cellosolve compound is expressed by the formula R.sup.4 --O--CH.sub.2 CH.sub.2 OH wherein R 4 represents an alkyl group of 1 to 4 carbon atoms; and at leasst one of rinsing and washing the base after the developing.
Claim 2
Dependent Claim
180 words
A process for forming detailed positive type images which comprises: providing a base; applying a resist solution to the base, said resist solution comprising an organic solvent and 1-15% by weight of at least one of a homopolymer of methyl vinyl ketone and a copolymer thereof with a comonomer selected from the group consisting of: vinyl acetate, acrylonitrile, styrene, α-methylstyrene, vinyltoluene, chlorostyrene, bromostyrene, nitrostyrene, cyanostyrene, methyl methacrylate, ethyl methacrylate, butyl methacrylate, ethyl acrylate and octyl acrylate, wherein the proportion of methyl vinyl ketone in the copolymer is at least 10% by mol, to form a coating on the base; imagewise irradiating the coating with far-ultraviolet light; developing the resulting coating with a liquid solvent as a developer, said liquid selected from the group consisting of at least one cellosolve compound and at least one cellosolve compound mixed with a lower alcohol wherein the cellosolve compound is expressed by the formula R.sup.4 --O--CH.sub.2 CH.sub.2 OH wherein R 4 represents an alkyl group of 1 to 4 carbon atoms; and at leasst one of rinsing and washing the base after the developing.
Claim 3
Dependent Claim
40 words
A process of claim 1 wherein said organic solvent is at least one member selected from the group consisting of a mixed solvent of chloroform and methyl cellosolve acetate and ethyl cellosolve acetate, acetone, methyl ethyl ketone, chlorobenzene and tetrahydrofuran.
Claim 4
Dependent Claim
34 words
A process according to claim 1, wherein the proportion of methyl vinyl ketone co-polymerized with the comonomer is in the range of 10 to 80% by mol and preferably 13 to 70% by mol.
Claim 5
Dependent Claim
30 words
A process according to claim 1, wherein after the applying step, the coated base is heated to a temperature in the range of about 60°-150° C. for about 2-30 minutes.
Claim 6
Dependent Claim
23 words
A process according to claim 4, wherein the coated base is heated to a temperature of about 80° C. for about 3-20 minutes.
Claim 7
Dependent Claim
21 words
A process according to claim 1, wherein, before irradiating, a chrome mask is adhered to the coated surface of the base.
Claim 8
Dependent Claim
42 words
A process according to claim 1, wherein in the irradiating step the coated base is subjected to an illuminance of 2.5 mW/cm 2 of far-ultraviolet light and wherein the light source is separated from the base by a distance of 40 cm.
Claim 9
Dependent Claim
31 words
A process according to claim 1, wherein the developer liquid is selected from the group consisting of butyl cellosolve and methanol mixed solvent and butyl cellosolve and ethyl cellosolve mixed solvent.
Claim 10
Dependent Claim
24 words
A process according to claim 1, wherein a silicone compound is applied to the base before the applying step as an adhesion improving agent.
Claim 11
Dependent Claim
22 words
A process according to claim 1, wherein the cellosolve compound used in the developing step is also used for rinsing and drying.
Claim 12
Dependent Claim
34 words
A process according to claim 1 wherein the organic solvent is selected from the group consisting of a mixed solution of chloroform and methyl cellosolve, ethyl cellosolve acetate, acetone, methyl ethyl ketone, chlorobenzene, tetrahydrofuran.
Claim 13
Dependent Claim
22 words
A process according to claim 1, wherein the concentration of polymer in the resist solution is up to about 5% by weight.
Claim 14
Dependent Claim
21 words
A process according to claim 1, wherein the liquid solvent developer is a 5:2 mixture of butyl cellosolve and ethyl cellosolve.
Claim 15
Dependent Claim
20 words
A process according to claim 1, wherein the liquid solvent developer is a 7:3 mixture of butyl cellosolve and methanol.
Claim 16
Dependent Claim
21 words
A process according to claim 1, wherein the liquid solvent developer is a 5:1 mixture of butyl cellosolve and ethyl cellosolve.
Claim 17
Dependent Claim
22 words
A process according to claim 1, wherein the homopolymer or copolymer has a molecular weight in the range of 150,000 to 700,000.
Claim 18
Dependent Claim
19 words
A process according to claim 3 wherein said comonomer is in the range of 13 to 70% by mol.
Claim 19
Dependent Claim
180 words
A process for forming detailed positive type images which comprises: providing a base; applying a resist solution to the base, said resist solution comprising an organic solvent and 1-15% by weight of at least one of a homopolymer of methyl vinyl ketone and a copolymer thereof with a comonomer selected from the group consisting of: vinyl acetate, acrylonitrile, styrene, α-methylstyrene, vinyltoluene, chlorostyrene, bromostyrene, nitrostyrene, cyanostyrene, methyl methacrylate, ethyl methacrylate, butyl methacrylate, ethyl acrylate and octyl acrylate, wherein the proportion of methyl vinyl ketone in the copolymer is at least 30% by mol, to form a coating on the base; imagewise irradiating the coating with far-ultraviolet light; developing the resulting coating with a liquid solvent as a developer, said liquid selected from the group consisting of at least one cellosolve compound and at least one cellosolve compound mixed with a lower alcohol wherein the cellosolve compound is expressed by the formula R.sup.4 --O--CH.sub.2 CH.sub.2 OH wherein R 4 represents an alkyl group of 1 to 4 carbon atoms; and at least one of rinsing and washing the base after the developing.
Claim 20
Dependent Claim
180 words
A process for forming detailed positive type images which comprises: providing a base; applying a resist solution to the base, said resist solution comprising an organic solvent and 1-15% by weight of at least one of a homopolymer of methyl vinyl ketone and a copolymer thereof with a comonomer selected from the group consisting of: vinyl acetate, acrylonitrile, styrene, α-methylstyrene, vinyltoluene, chlorostyrene, bromostyrene, nitrostyrene, cyanostyrene, methyl methacrylate, ethyl methacrylate, butyl methacrylate, ethyl acrylate and octyl acrylate, wherein the proportion of methyl vinyl ketone in the copolymer is at least 30% by mol, to form a coating on the base; imagewise irradiating the coating with far-ultraviolet light; developing the resulting coating with a liquid solvent as a developer, said liquid selected from the group consisting of at least one cellosolve compound and at least one cellosolve compound mixed with a lower alcohol wherein the cellosolve compound is expressed by the formula R.sup.4 --O--CH.sub.2 CH.sub.2 OH wherein R 4 represents an alkyl group of 1 to 4 carbon atoms; and at least one of rinsing and washing the base after the developing.
Claim 21
Dependent Claim
22 words
A process according to claim 18, wherein the proportion of methyl vinyl ketone in the copolymer is at least 13% by mol.
Claim 22
Dependent Claim
25 words
A process according to claim 12 wherein the concentration of polymer in the resist solution is in the range of 2 to 3% by weight.
References Cited (Backward Citations)
US4012536A
Cited
US4018937A
Cited
US4264715A
Cited
US4302529A
Cited
US4401745A
Cited
US4394438A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-13 | 1990-04-14 | 1990-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-13 | 1994-04-14 | 1994-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-13 | 1998-04-14 | 1998-10-14 | $7700.00 | Window Closed / Lapsed |