US4600489A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
Assignee: Hauzer Industries BV
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Filing: 1984-01-19
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Granted: 1986-07-15
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Expires: 2004-01-19
Abstract
Abstract Apparatus and method for evaporation arc stabilization including a target having a surface of material of non-permeable material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; and a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface.
Inventors
- 👤 Anthony R. T. Lefkow
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 05:56
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
80 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and a confinement ring surrounding contacting the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface.
Claim 2
Dependent Claim
80 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and a confinement ring surrounding contacting the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface.
Claim 3
Dependent Claim
17 words
Apparatus as in claim 1 where the mean charged particle energies of said arc are 20-100 eV.
Claim 4
Dependent Claim
17 words
Apparatus as in claim 2 where the mean charged particle energies of said arc are 40-60 eV.
Claim 5
Dependent Claim
20 words
Apparatus as in claim 1 where the permeable material is selected from the group consisting of soft iron and Permalloy.
Claim 6
Dependent Claim
19 words
Apparatus as in claim 1 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 7
Dependent Claim
14 words
Apparatus as in claim 5 where the anode and substrate are the same member.
Claim 8
Dependent Claim
15 words
Apparatus as in claim 1 where said target is composed of an electrically conductive material.
Claim 9
Dependent Claim
15 words
Apparatus as in claim 1 where said target is composed of an electrically insulative material.
Claim 10
Dependent Claim
22 words
Apparatus as in claim 1 where the means for establishing the arc on the target surface includes a cathode and an anode.
Claim 11
Dependent Claim
13 words
Apparatus as in claim 9 where said target is mounted on said cathode.
Claim 12
Dependent Claim
14 words
Apparatus as in claim 9 where said target and cathode are the same member.
Claim 13
Independent Claim
75 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a target of non-permeable material to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and confining the arc to the target surface with a confinement ring which surrounds and contacts the target surface, the ring being composed of a magnetically permeable material.
Claim 14
Independent Claim
75 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a target of non-permeable material to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and confining the arc to the target surface with a confinement ring which surrounds and contacts the target surface, the ring being composed of a magnetically permeable material.
Claim 15
Dependent Claim
18 words
A method as in claim 12 where the mean charged particle energies of said arc are 20-100 eV.
Claim 16
Dependent Claim
18 words
A method as in claim 13 where the mean charged particle energies of said arc are 40-60 eV.
Claim 17
Dependent Claim
21 words
A method as in claim 12 where the permeable material compound is selected from the group consisting of iron and Permalloy.
Claim 18
Dependent Claim
16 words
A method as in claim 12 where said target is composed of an electrically conductive material.
Claim 19
Dependent Claim
13 words
A method as in claim 16 where said electrically conductive material is metallic.
Claim 20
Dependent Claim
16 words
A method as in claim 12 where said target is composed of an electrically insulative material.
Claim 21
Dependent Claim
18 words
A method as in claim 12 including depositing the evaporated target material on a substrate as a coating.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-07-14 | 1990-01-13 | 1990-07-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-07-14 | 1994-01-13 | 1994-07-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-07-14 | 1998-01-13 | 1998-07-15 | $7700.00 | Window Closed / Lapsed |