US3730873A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cathode sputtering etching device with movable guard ring
Assignee: US Philips Corp
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Filing: 1971-03-18
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Granted: 1973-05-01
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Expires: 1991-03-18
Abstract
Abstract A DEVICE FOR ENGRAVING OBJECTS BY CATHODIC SPUTTERING INCLUDING A CATHODE, WHICH AS THE OBJECT HOLDER, AN ANODE, A VERTICALLY MOVABLE GUARD RING LATERALLY SURROUNDING THE CATHODE, AND AN ANNULAR AUXILIARY ELECTRODE ELECTRICALLY INSULATED FROM THE OTHER ELECTRODES AND SPACED FROM THE CATHODE. A SUITABLE POTENTIAL IS APPLIED TO THE LATTER AUXILIARY ELECTRODE TO CORRECT ION TRAJECTORIES AND THEREBY IMPROVE ENGRAVING PRODUCED BY ION BOMBARDMENT OF THE OBJECT SURFACE.
Inventors
- 👤 J Pompei
- 👤 P Guiochon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:51
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-04-30 | 1976-10-30 | 1977-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-04-30 | 1980-10-30 | 1981-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-04-30 | 1984-10-30 | 1985-05-01 | $7700.00 | Window Closed / Lapsed |