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US4531055A Expired / Lapsed US ⏱️ 0.0 years remaining

Self-guarding Schottky barrier infrared detector array

Assignee: United States Department of the Air Force
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Filing: 1983-01-05
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Granted: 1985-07-23
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Expires: 2003-01-05
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Abstract

Abstract A two dimensional focal plane array of Schottky photodiodes on a silicon substrate for infrared imaging. The array is designed for mating with multiplexing circuitry and has a self-guarding feature wherein adjacent Schottky electrodes act as guard electrodes. This feature allows a substantial increase of the focal plane area coverage ratio.

Inventors

  • 👤 Freeman D. Shepherd, Jr.
  • 👤 Paul W. Pellegrini
  • 👤 Charlotte E. Ludington
  • 👤 Melanie M. Weeks

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 09:20
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/18; H10F39/184

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 112 words
A Schottky infrared internal photoemission focal plane array having architecture for maximizing the photosensitive area of said array comprising: a first semiconductor substrate; and a plurality of metallic photoemission elements disposed on a surface of said substrate forming a two dimensional matrix of Schottky barrier photodiodes on said substrate; said Schottky diodes being spaced at a distance within which their individual depletion regions overlap and merge to create a continuous depletion field below the surface of said substrate, thereby suppressing the high fields which occur when depletion region edges are permitted to meet said surface of said substrate, and resulting in the suppression of dark currents and breakdown effects in said array.
Claim 2
Dependent Claim 112 words
A Schottky infrared internal photoemission focal plane array having architecture for maximizing the photosensitive area of said array comprising: a first semiconductor substrate; and a plurality of metallic photoemission elements disposed on a surface of said substrate forming a two dimensional matrix of Schottky barrier photodiodes on said substrate; said Schottky diodes being spaced at a distance within which their individual depletion regions overlap and merge to create a continuous depletion field below the surface of said substrate, thereby suppressing the high fields which occur when depletion region edges are permitted to meet said surface of said substrate, and resulting in the suppression of dark currents and breakdown effects in said array.
Claim 3
Dependent Claim 25 words
A focal plane array as set forth in claim 1 wherein the spacing between adjacent ones of said Schottky diodes does not exceed five micrometers.
Claim 4
Dependent Claim 31 words
A focal plane array as set forth in claim 2 and further comprising: a Schottky perimeter electrode surrounding the matrix of photodiodes and separated by no more than five micrometers therefrom.
Claim 5
Dependent Claim 43 words
A focal plane array as set forth in claim 3 and further comprising: a second semiconductor substrate having signal multiplexing circuitry formed thereon, said second semiconductor substrate being positioned adjacent said first semiconductor substrate and bonded thereto at each of said Schottky photodiodes.
Claim 6
Dependent Claim 22 words
A focal plane array as set forth in claim 4 wherein said first and second substrates are each formed of silicon material.
Claim 7
Dependent Claim 19 words
A focal plane array as set forth in claim 5 wherein said metallic elements are formed of metal silicides.
Claim 8
Dependent Claim 22 words
A focal plane array as set forth in claim 3 and further comprising: a single guard ring surrounding said Schottky perimeter electrode.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1988-07-22 1989-01-21 1989-07-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1992-07-22 1993-01-21 1993-07-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1996-07-22 1997-01-21 1997-07-23 $7700.00 Window Closed / Lapsed

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