Patent US4522489A successfully refreshed from Google Patents.
US4522489A
Expired / Lapsed
US
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Device for photolithographically treating a thin substrate
Assignee: ASML Netherlands BV
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Filing: 1984-01-03
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Granted: 1985-06-11
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Expires: 2004-01-03
Abstract
Abstract A device for photolithographically treating a thin substrate comprises pre-alignment station, a substrate-supporting table and a transport arm which is provided with a vacuum connection for holding the substrate by suction at its lower side during transport of the substrate from the pre-alignment station to the substrate table. The substrate table is provided with supporting means for the substrate which are adjustable in the direction of height and which have a supporting surface which is adjustable to a distance above the substrate table exceeding the thickness of the transport arm and is adjustable in a downward direction at least through a distance such that the supporting surface is level with the upper surface of the substrate table, the supporting means leaving a space free for the movement of the transport arm above a part of the substrate table.
Inventors
- 👤 Adrianus G. Bouwer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 11:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70733; G03F7/7075
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
194 words
A device for photolithographically treating a thin substrate which is provided with a photosensitive layer on a major surface at the upper side of the substrate, which device comprises a pre-alignment station, a substrate table for holding the substrate during the photolithographic treatment and a transport arm which is provided with a vacuum connection for holding the substrate by suction at the lower side of the substrate during transport of the substrate from the pre-alignment station to the substrate table, characterized in that the substrate table is provided with supporting means for the substrate which are adjustable in the direction of height and which have a supporting surface which is adjustable to a distance above the substrate table exceeding the thickness of the part of the transport arm which serves to hold the substrate, the supporting means being adjustable in a downward direction at least through a distance such that said supporting surface is level with the upper surface of the substrate table, and the supporting means being so positioned in the substrate table as to leave a space free for the movement of the transport arm above a part of the substrate table.
Claim 2
Independent Claim
194 words
A device for photolithographically treating a thin substrate which is provided with a photosensitive layer on a major surface at the upper side of the substrate, which device comprises a pre-alignment station, a substrate table for holding the substrate during the photolithographic treatment and a transport arm which is provided with a vacuum connection for holding the substrate by suction at the lower side of the substrate during transport of the substrate from the pre-alignment station to the substrate table, characterized in that the substrate table is provided with supporting means for the substrate which are adjustable in the direction of height and which have a supporting surface which is adjustable to a distance above the substrate table exceeding the thickness of the part of the transport arm which serves to hold the substrate, the supporting means being adjustable in a downward direction at least through a distance such that said supporting surface is level with the upper surface of the substrate table, and the supporting means being so positioned in the substrate table as to leave a space free for the movement of the transport arm above a part of the substrate table.
Claim 3
Dependent Claim
40 words
A device as claimed in claim 1, characterized in that the supporting means comprise three cylindrical supporting elements having end faces which constitute the supporting surface, a resilient element being provided which presses the supporting elements in an upward direction.
Claim 4
Dependent Claim
43 words
A device as claimed in claim 1, characterized in that the supporting member comprises three cylindrical supporting elements having end faces which constitute the supporting surface, these supporting elements being adjustable in the direction of height by means of a controllable driving mechanism.
Claim 5
Dependent Claim
35 words
A device as claimed in claim 3, characterized in that the supporting means are provided with a least one duct which opens out of the supporting surface and can be connected to a vacuum source.
Claim 6
Dependent Claim
35 words
A device as claimed in claim 2, characterized in that the supporting means are provided with at least one duct which opens out of the supporting surface and can be connected to a vacuum source.
Claim 7
Dependent Claim
35 words
A device as claimed in claim 1, characterized in that the supporting means are provided with at least one duct which opens out of the supporting surface and can be connected to a vacuum source.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-06-10 | 1988-12-10 | 1989-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-06-10 | 1992-12-10 | 1993-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-06-10 | 1996-12-10 | 1997-06-11 | $7700.00 | Window Closed / Lapsed |