US3865254A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Prealignment system for an optical alignment and exposure instrument
Assignee: KASKER INSTRUMENTS Inc
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Filing: 1973-05-21
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Granted: 1975-02-11
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Expires: 1993-05-21
Abstract
Abstract An optical alignment and exposure instrument is provided with a first air bearing track for transporting a semiconductive wafer from a first magazine to a prealignment platform. The prealignment platform is pivotally mounted for tilting the semiconductive wafer into engagement with a stop member mounted on the prealignment platform and a plurality of drive rollers that automatically orient the semiconductive wafer in a prealigned position against the stop member. Apertures are provided in the prealignment platform and selectively connected to a source of vacuum and a source of air so that the semiconductive wafer may be vacuum clamped to the prealignment platform while the prealignment platform is being tilted, may be supported on an air cushion during the prealignment operation, and may then be vacuum clamped in the prealigned position while the prealignment platform is returned to its normal untilted position. The optical alignment and exposure instrument is also provided with a transfer arm having a vacuum cup at one end thereof for picking up the prealigned semiconductive wafer and transferring it to a wafer chuck where it is further aligned with a photomask and then exposed through the photomask. Apertures are also provided in the wafer chuck and selectively connected to the source of vacuum and the source of air so that the prealigned semiconductive wafer may be vacuum clamped in place on the wafer chuck during these alignment and exposure operations and may then be transferred on an air cushion to a second air bearing track employed for transporting the exposed semiconductive wafer to a second magazine.
Inventors
- 👤 Karl-Heinz Johannsmeier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:32
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70733; G03F7/7075; H; H10; H10P; H10P72/00; H10P72/30; H10P72/36; H10P72/3604; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/139
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
92 words
Apparatus for orienting a workpiece in a selected position, said apparatus comprising: holder means for holding the workpiece; drive means for engaging a rounded portion of a peripheral edge of the workpiece to rotate the workpiece in a first rotary direction towards the selected position and, when the workpiece reaches the selected position, for engaging a flat portion of the peripheral edge of the workpiece to maintain the workpiece in the selected position; and transfer means for transferring the workpiece in the selected position from the holder means to a work station.
Claim 2
Dependent Claim
92 words
Apparatus for orienting a workpiece in a selected position, said apparatus comprising: holder means for holding the workpiece; drive means for engaging a rounded portion of a peripheral edge of the workpiece to rotate the workpiece in a first rotary direction towards the selected position and, when the workpiece reaches the selected position, for engaging a flat portion of the peripheral edge of the workpiece to maintain the workpiece in the selected position; and transfer means for transferring the workpiece in the selected position from the holder means to a work station.
Claim 3
Dependent Claim
128 words
Apparatus as in claim 1 wherein: said holder means comprises a prealignment platform for holding the workpiece; said drive means comprises first drive means positioned adjacent to a peripheral portion of the prealignment platform for engaging the rounded portion of the peripheral edge of the workpiece to rotate the workpiece in the first rotary direction towards the selected position; said drive means further comprises second drive means positioned adjacent to said peripheral portion of the prealignment platform to rotate the workpiece in a second rotary direction opposite from the first rotary direction, said first and second drive means engaging the flat portion of the peripheral edge of the workpiece, when the workpiece reaches the selected position, to counteract one another and maintain the workpiece in the selected position.
Claim 4
Dependent Claim
34 words
ApparatuS as in claim 2 wherein said prealignment platform includes means for producing a cushion of air on the prealignment platform under the workpiece while the workpiece is being rotated to the selected position.
Claim 5
Dependent Claim
52 words
Apparatus as in claim 1 wherein said transfer means comprises: a transfer arm pivotally mounted for movement between the holder means and the work station; and vacuum pickup means coupled to the transfer arm for picking up the workpiece at the holder means and for depositing the workpiece at the work station.
Claim 6
Dependent Claim
34 words
Apparatus as in claim 4 wherein said vacuum pickup means comprises: an inverted outer member for fitting over the workpiece; and means for applying a vacuum to the workpiece within the inverted outer member.
Claim 7
Dependent Claim
77 words
Apparatus as in claim 1 wherein said drive means comprises: a plurality of spaced-apart rollers with their longitudinal axes extending in a vertical direction; and means for driving each of said rollers about its longitudinal axis, a first one of said rollers being driven to rotate the workpiece in the first rotary direction and a second one of said rollers being driven to rotate the workpiece in a second rotary direction opposite from the first rotary direction.
Claim 8
Dependent Claim
42 words
Apparatus as in claim 6 wherein said holder means comprises: a prealignment platform for holding the workpiece; and means for producing a cushion of air on the prealignment platform under the workpiece while the workpiece is being rotated to the selected position.
Claim 9
Dependent Claim
52 words
Apparatus as in claim 7 wherein: said transfer means comprises a transfer arm pivotally mounted for movement between the prealignment platform and the work station; and vacuum pickup means coupled to the transfer arm for picking up the workpiece at the prealignment platform and for depositing the workpiece at the work station.
Claim 10
Dependent Claim
34 words
Apparatus as in claim 8 wherein said vacuum pickup means comprises: an inverted outer member for fitting over the workpiece; and means for applying a vacuum to the workpiece within the inverted outer member.
Claim 11
Dependent Claim
56 words
Apparatus as in claim 1 wherein said holder means comprises: a pivotally mounted prealignment platform for holding the workpiece; and means for tilting the prealignment platform towards the drive means to move the workpiece held by the prealignment platform into engagement with the drive means and for subsequently returning the prealignment platform to its untilted position.
Claim 12
Dependent Claim
78 words
Apparatus as in claim 10 wherein said prealignment platform includes means for vacuum clamping the workpiece to the prealignment platform while it is being tilted towards the drive means, for thereafter producing a cushion of air on the prealignment platform under the workpiece while the workpiece is being rotated to the selected position, and for thereafter vacuum clamping the workpiece in the selected position to the prealignment platform while the prealignment platform is returned to its untilted position.
Claim 13
Dependent Claim
77 words
Apparatus as in claim 10 wherein said drive means comprises: a plurality of spaced-apart rollers with their longitudinal axes extending in a vertical direction; and means for driving each of said rollers about its longitudinal axis, a first one of said rollers being driven to rotate the workpiece in the first rotary direction and a second one of said rollers being driven to rotate the workpiece in a second rotary direction opposite from the first rotary direction.
Claim 14
Dependent Claim
32 words
Apparatus as in claim 10 including means for moving the workpiece from a loading station onto the prealignment platform and for moving the workpiece from the work station to an unloading station.
Claim 15
Dependent Claim
52 words
Apparatus as in claim 10 wherein said transfer means comprises: a transfer arm pivotally mounted for movement between the prealignment platform and the work station; and vacuum pickup means coupled to the transfer arm for picking up the workpiece at the prealignment platform and for depositing the workpiece at the work station.
Claim 16
Dependent Claim
34 words
Apparatus as in claim 14 wherein said vacuum pickup means comprises: an inverted outer member for fitting over the workpiece; and means for applying a vacuum to the workpiece within the inverted outer member.
Claim 17
Dependent Claim
137 words
Apparatus as in claim 1 wherein said drive means comprises: a center drive roller and two outer drive rollers; and means for driving the center drive roller and one of the outer drive rollers in the first rotary direction and for driving the other of the outer drive rollers in a second rotary direction opposite from the first rotary direction, at least one of said center drive roller and said one of the outer drive rollers being positioned for engaging the rounded portion of the peripheral edge of the workpiece to rotate the workpiece towards the selected position, and said outer drive rollers being positioned to engage the flat portion of the peripheral edge of the workpiece, when the workpiece is in the selected position, to counteract one another and maintain the workpiece in the selected position.
Claim 18
Dependent Claim
149 words
Apparatus as in claim 16 wherein said holder means comprises: a pivotally mounted prealignment platform for holding the workpiece; and means for tilting the prealignment platform towards said one of the outer drive rollers to move the workpiece help by the prealignment platform into engagement with at least one of said center drive roller and said one of the outer drive rollers and for subsequently returning the prealignment platform to its untilted position, said prealignment platform including means for vacuum clamping the workpiece to the prealignment platform while it is being tilted towards said one of the outer drive rollers, for thereafter producing a cushion of air on the prealignment platform under the workpiece while the workpiece is being rotated to the selected position, and for thereafter vacuum clamping the workpiece in the selected position to the prealignment platform while the prealignment platform is returned to its untilted position.
Claim 19
Dependent Claim
52 words
Apparatus as in claim 17 wherein said transfer means comprises: a transfer arm pivotally mounted for movement between the prealignment platform and the work station; and vacuum pickup means coupled to the transfer arm for picking up the workpiece at the prealignment platform and for depositing the workpiece at the work station.
Claim 20
Dependent Claim
34 words
Apparatus as in claim 18 wherein said vacuum pickup means comprises: an inverted outer member for fitting over the workpiece; and means for applying a vacuum to the workpiece within the inverted outer member.
Claim 21
Dependent Claim
26 words
Apparatus as in claim 19 wherein said center drive roller and said outer drive rollers are mounted adjacent to a peripheral edge of the prealignment platform.
Claim 22
Dependent Claim
33 words
Apparatus as in claim 20 including: means for moving a workpiece from a loading station onto the prealignment platform; and means for moving the workpiece from the work station to an unloading station.
Claim 23
Dependent Claim
239 words
A prealignment system for positioning a semiconductive wafer in a prealigned position with respect to a wafer chuck, said prealignment system comprising: a pivotally-mounted prealignment platform for holding the semiconductive wafer while it is being prealigned with respect to the wafer chuck; a plurality of drive rollers positioned along a peripheral portion of the prealignment platform with their longitudinal axes extending in a vertical direction; means for driving each of the drive rollers in a rotary direction about its longitudinal axis; means for tilting the prealignment platform towards the drive rollers to move the semiconductive wafer held by the prealignment platform into engagement with a first one of the drive rollers at a peripheral edge of the semiconductive wafer and for subsequently returning the prealignment platform to its untilted position; said first one of the drive rollers being driven in one rotary direction to rotate the semiconductive wafer in a first rotary direction towarD the prealigned position at which a flat portion of the peripheral edge of the semiconductive wafer engages the first one and a second one of the drive rollers; said first and second ones of the drive rollers being driven in opposite rotary directions to counteract one another and thereby maintain the semiconductive wafer in the prealigned position once it has been rotated thereto by the first drive roller; and transfer means for transferring the prealigned semiconductive wafer from the prealignment platform to the wafer chuck.
Claim 24
Dependent Claim
239 words
A prealignment system for positioning a semiconductive wafer in a prealigned position with respect to a wafer chuck, said prealignment system comprising: a pivotally-mounted prealignment platform for holding the semiconductive wafer while it is being prealigned with respect to the wafer chuck; a plurality of drive rollers positioned along a peripheral portion of the prealignment platform with their longitudinal axes extending in a vertical direction; means for driving each of the drive rollers in a rotary direction about its longitudinal axis; means for tilting the prealignment platform towards the drive rollers to move the semiconductive wafer held by the prealignment platform into engagement with a first one of the drive rollers at a peripheral edge of the semiconductive wafer and for subsequently returning the prealignment platform to its untilted position; said first one of the drive rollers being driven in one rotary direction to rotate the semiconductive wafer in a first rotary direction towarD the prealigned position at which a flat portion of the peripheral edge of the semiconductive wafer engages the first one and a second one of the drive rollers; said first and second ones of the drive rollers being driven in opposite rotary directions to counteract one another and thereby maintain the semiconductive wafer in the prealigned position once it has been rotated thereto by the first drive roller; and transfer means for transferring the prealigned semiconductive wafer from the prealignment platform to the wafer chuck.
Claim 25
Dependent Claim
84 words
A prealignment system as in claim 22 wherein said prealignment platform includes means for vacuum clamping the semiconductive wafer to the prealignment platform while it is being tilted towards the drive rollers, for thereafter producing a cushion of air on the prealignment platform under the semiconductive wafer while the semiconductive wafer is being rotated to the prealigned position, and for thereafter vacuum clamping the semiconductive wafer in the prealigned position to the prealignment platform while the prealignment platform is returned to its untilted position.
Claim 26
Dependent Claim
58 words
A prealignment system as in claim 23 wherein said transfer means comprises: a transfer arm pivotally mounted for movement between the prealignment platform and the wafer chuck; and vacuum pickup means coupled to the transfer arm for picking up the prealigned semiconductive wafer at the prealignment platform and for depositing the prealigned semiconductive wafer at the wafer chuck.
Claim 27
Dependent Claim
40 words
A prealignment system as in claim 24 wherein said vacuum pickup means comprises: an inverted outer member for fitting over the prealigned semiconductive wafer; and means for applying a vacuum to the prealigned semiconductive wafer within the inverted outer member.
Claim 28
Dependent Claim
36 words
A prealignment system as in claim 25 including means for moving the semiconductive wafer from a loading station onto the prealignment platform and for moving the semiconductive wafer from the wafer chuck to an unloading station.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-02-10 | 1978-08-12 | 1979-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-02-10 | 1982-08-12 | 1983-02-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-02-10 | 1986-08-12 | 1987-02-11 | $7700.00 | Window Closed / Lapsed |