Patent US4472239A successfully refreshed from Google Patents.
US4472239A
Expired / Lapsed
US
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Method of making semiconductor device
Assignee: Honeywell Inc
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Filing: 1983-07-08
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Granted: 1984-09-18
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Expires: 2003-07-08
Abstract
Abstract A semiconductor device comprising a semiconductor body having a depression formed into the first surface of the body. The device further comprises member means comprising a thermal-to-electric or static electric element, the member means having a predetermined configuration suspended over the depression. The member means is connected to the first surface at least at one location, the depression opening to the first surface around at least a portion of the predetermined configuration. The depression provides substantial physical and thermal isolation between the element and the semiconductor body. In this manner, an integrated semiconductor device provides an environment of substantial physical and thermal isolation between the element and the semiconductor body.
Inventors
- 👤 Robert G. Johnson
- 👤 Robert E. Higashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 16:43
CPC Classifications
H; H10; H10N; H10N19/00; G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/6845
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
171 words
A method of fabricating a semiconductor device comprising member means having a predetermined configuration suspended over a depression etched into a first surface of a semiconductor body, the member means being connected to the first surface at least at one location, the depression opening to the first surface around at least a portion of the predetermined configuration, the method comprising the steps of: providing a semiconductor body with the first surface having a predetermined orientation with respect to a crystalline structure in the semiconductor body; applying a layer of material of which the member means is comprised onto the first surface; exposing at least one predetermined area of the first surface, the exposed surface area being bounded in part by the predetermined configuration to be suspended, the predetermined configuration being oriented so that an anisotropic etch placed on the exposed surface area will undercut the predetermined configuration in a substantially minimum time; and applying the anisotropic etch to the exposed surface area to undercut the member means and create the depression.
Claim 2
Independent Claim
171 words
A method of fabricating a semiconductor device comprising member means having a predetermined configuration suspended over a depression etched into a first surface of a semiconductor body, the member means being connected to the first surface at least at one location, the depression opening to the first surface around at least a portion of the predetermined configuration, the method comprising the steps of: providing a semiconductor body with the first surface having a predetermined orientation with respect to a crystalline structure in the semiconductor body; applying a layer of material of which the member means is comprised onto the first surface; exposing at least one predetermined area of the first surface, the exposed surface area being bounded in part by the predetermined configuration to be suspended, the predetermined configuration being oriented so that an anisotropic etch placed on the exposed surface area will undercut the predetermined configuration in a substantially minimum time; and applying the anisotropic etch to the exposed surface area to undercut the member means and create the depression.
Claim 3
Independent Claim
176 words
A method of fabricating a semiconductor device comprising member means having a predetermined configuration bridging a depression etched into a first surface of a semiconductor body, the member means being connected to the first surface at first and second substantially opposing ends of the predetermined configuration, the depression opening to the first surface around at least a portion of the predetermined configuration, the method comprising the steps of: providing a semiconductor body with the first surface having a predetermined orientation with respect to a crystalline structure in the semiconductor body; applying a layer of material of which the member means is comprised onto the first surface; exposing first and second predetermined areas of the first surface, the exposed surface area being bounded in part by the predetermined configuration to be bridged, the predetermined configuration being oriented so that an anisotropic etch placed on the exposed surface area will undercut the predetermined configuration in a substantially minimum time; and applying the anisotropic etch to the exposed surface area to undercut the member means and create the depression.
Claim 4
Independent Claim
176 words
A method of fabricating a semiconductor device comprising member means having a predetermined configuration bridging a depression etched into a first surface of a semiconductor body, the member means being connected to the first surface at first and second substantially opposing ends of the predetermined configuration, the depression opening to the first surface around at least a portion of the predetermined configuration, the method comprising the steps of: providing a semiconductor body with the first surface having a predetermined orientation with respect to a crystalline structure in the semiconductor body; applying a layer of material of which the member means is comprised onto the first surface; exposing first and second predetermined areas of the first surface, the exposed surface area being bounded in part by the predetermined configuration to be bridged, the predetermined configuration being oriented so that an anisotropic etch placed on the exposed surface area will undercut the predetermined configuration in a substantially minimum time; and applying the anisotropic etch to the exposed surface area to undercut the member means and create the depression.
Claim 5
Dependent Claim
50 words
The method of claim 1 or 2 wherein: the semiconductor body comprises (100) silicon having a (100) plane and a [110] direction; the first surface of the semiconductor body is substantially parallel to the (100) plane; and the predetermined configuration is oriented at a non-zero angle to the [110] direction.
Claim 6
Dependent Claim
21 words
The method of claim 3 wherein the predetermined configuration comprises a substantially straight edge which is oriented at the non-zero angle.
Claim 7
Dependent Claim
23 words
The method of claim 4 wherein the non-zero angle is substantially 45 degrees, whereby the member means will be undercut with maximum efficiency.
Claim 8
Dependent Claim
19 words
The method of claim 3 wherein the predetermined configuration has an axis which is oriented at the non-zero angle.
Claim 9
Dependent Claim
23 words
The method of claim 6 wherein the non-zero angle is substantially 45 degrees, whereby the member means will be undercut with maximum efficiency.
Claim 10
Dependent Claim
23 words
The method of claim 3 wherein the non-zero angle is substantially 45 degrees, whereby the member means will be undercut with maximum efficiency.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-09-18 | 1988-03-19 | 1988-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-09-18 | 1992-03-19 | 1992-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-09-18 | 1996-03-19 | 1996-09-18 | $7700.00 | Window Closed / Lapsed |