US4011745A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor sensors
Assignee: Massachusetts Institute of Technology
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Filing: 1975-11-07
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Granted: 1977-03-15
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Expires: 1995-11-07
Abstract
Abstract A semiconductor sensor adapted to detect with a high degree of sensitivity small magnitudes of a mechanical force, presence of traces of a gas or light. The sensor includes a high energy gap (i.e., DIFFERENCE 1.0 electron volts) semiconductor wafer. Mechanical force is measured by employing a non-centrosymmetric material for the semiconductor. Distortion of the semiconductor by the force creates a contact potential difference (cpd) at the semiconductor surface, and this cpd is determined to give a measure of the force. When such a semiconductor is subjected to illumination with an energy less than the energy gap of the semiconductors, such illumination also creates a cpd at the surface. Detection of this cpd is employed to sense the illumination itself or, in a variation of the system, to detect a gas. When either a gas or light is to be detected and a crystal of a non-centrosymmetric material is employed, the presence of gas or light, in appropriate circumstances, results in a strain within the crystal which distorts the same and the distortion provides a mechanism for qualitative and quantitative evaluation of the gas or the light, as the case may be.
Inventors
- 👤 Harry C. Gatos
- 👤 Jacek Lagowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 14:56
CPC Classifications
H; H10; H10D; H10D48/00; H10D48/50; G; G01; G01N; G01N33/00; G01N33/0004; G01N33/0009; G01N33/0027
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
111 words
A gas sensor comprising: a. a semiconductor wafer formed of a non-centrosymmetric material having a high energy gap and selected from the group consisting of materials having wurtzite and zinc-blende structure; b. a vacuum chamber containing the wafer and adapted to receive traces of a gas that introduces surface states in the wafer through absorption; c. a source of illumination whose energy corresponds to the energy of the introduced surface states, said source illuminating the wafer for causing the latter to deflect an amount dependent on the wavelength of the illumination; and d. means for measuring the deflection of the wafer for detecting the presence of said gas in the chamber.
Claim 2
Dependent Claim
111 words
A gas sensor comprising: a. a semiconductor wafer formed of a non-centrosymmetric material having a high energy gap and selected from the group consisting of materials having wurtzite and zinc-blende structure; b. a vacuum chamber containing the wafer and adapted to receive traces of a gas that introduces surface states in the wafer through absorption; c. a source of illumination whose energy corresponds to the energy of the introduced surface states, said source illuminating the wafer for causing the latter to deflect an amount dependent on the wavelength of the illumination; and d. means for measuring the deflection of the wafer for detecting the presence of said gas in the chamber.
Claim 3
Dependent Claim
15 words
A sensor according to claim 1 wherein said source produces monochromatic illumination of said wafer.
Claim 4
Dependent Claim
41 words
A sensor according to claim 2 wherein said source produces chopped monochromatic illumination of said wafer for causing the latter to vibrate at a frequency dependent on the chopping frequency and with an amplitude dependent on the wavelength of the illumination.
Claim 5
Dependent Claim
41 words
A sensor according to claim 3 wherein said source includes a xenon lamp producing a beam, a monochromator responsive to said beam to produce an excitation beam incident on the wafer, and a light chopper for periodically chopping said excitation beam.
Claim 6
Dependent Claim
41 words
A sensor according to claim 4 wherein the means for measuring the deflection of said wafer includes a light beam incident on the wafer and reflected thereby onto a screen whereby the amplitude of vibration of said wafer can be measured.
Claim 7
Dependent Claim
17 words
A sensor according to claim 1 wherein said source produces steady state monochromatic illumination of said wafer.
Claim 8
Dependent Claim
41 words
A sensor according to claim 6 wherein said means for measuring the deflection of said wafer includes a vibrating probe for detecting the contact potential difference that arises due to changes in surface states in response to illumination of said wafer.
Claim 9
Dependent Claim
17 words
A sensor according to claim 1 wherein the material of the wafer has a structure like zinc-blende.
Claim 10
Dependent Claim
17 words
A sensor according to claim 4 wherein the material of the wafer has a structure like wurtzite.
Claim 11
Dependent Claim
18 words
A sensor according to claim 1 wherein the gas is oxygen and the wafer material is cadmium sulfide.
Claim 12
Independent Claim
92 words
A method for detecting traces of oxygen in a vacuum chamber comprising the steps of: a. placing a cadmium sulfide wafer in the vacuum chamber; b. illuminating the wafer with radiation whose energy corresponds to the energy of surface states introduced by oxygen for causing the wafer to deflect an amount dependent on the wavelength of the illumination; and c. measuring the deflection of the wafer when it is known that oxygen is absent from the chamber so that changes in the deflection due to the presence of oxygen can be detected.
Claim 13
Independent Claim
92 words
A method for detecting traces of oxygen in a vacuum chamber comprising the steps of: a. placing a cadmium sulfide wafer in the vacuum chamber; b. illuminating the wafer with radiation whose energy corresponds to the energy of surface states introduced by oxygen for causing the wafer to deflect an amount dependent on the wavelength of the illumination; and c. measuring the deflection of the wafer when it is known that oxygen is absent from the chamber so that changes in the deflection due to the presence of oxygen can be detected.
References Cited (Backward Citations)
US2965842A
Cited
US3194053A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-03-14 | 1980-09-13 | 1981-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-03-14 | 1984-09-13 | 1985-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-03-14 | 1988-09-13 | 1989-03-15 | $7700.00 | Window Closed / Lapsed |