US4454647A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Isolation for high density integrated circuits
Assignee: International Business Machines Corp
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Filing: 1981-08-27
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Granted: 1984-06-19
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Expires: 2001-08-27
Abstract
Abstract An integrated circuit structure having substrate contacts formed as a part of the isolation structure and the method to form such structure is described. The integrated circuit structure is composed of a monocrystalline silicon body having a pattern of dielectric isolation surrounding regions of the monocrystalline silicon in the body. The dielectric isolation pattern includes a recessed dielectric portion at and just below the surface of the integrated circuit and a deep portion which extends through the recessed dielectric portion and extends further into the monocrystalline silicon body than the recessed portion. A highly doped polycrystalline silicon substrate contact is located within the deep portion of the pattern of isolation. The substrate contact extends from the surface of the pattern of isolation down to the bottom of the deep portion of the isolation where the contact electrically connects to the silicon body. Any of a variety of integrated circuit device structures may be incorporated within the monocrystalline silicon regions. These devices include bipolar transistors, field effect transistors, capacitors, diodes, resistors and the like.
Inventors
- 👤 Richard C. Joy
- 👤 Bernard M. Kemlage
- 👤 John L. Mauer, IV
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 04:14
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10W10/041; H10W10/10; H10W10/13; H10W10/40; H10W20/00; H10W20/01; H10W20/021
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
177 words
Method for forming a recessed isolation structure for an integrated circuit structure having substrate contacts comprising: forming a first masking layer over a major surface of a monocrystalline silicon substrate; opening a pattern in said first masking layer to said major surface wherein said isolation structure is desired; oxidizing the exposed monocrystalline substrate to produce said recessed isolation structure; removing said first masking layer; forming a second masking layer over said major surface; opening a pattern in said second masking layer in the recessed isolation structure wherein said substrate contacts are to be formed; forming through said opening a pattern of trenches having substantially vertical sidewalls through the said recessed isolation structure and into the said monocrystalline silicon thereunder; forming an insulating layer upon the surfaces of said trenches; removing said insulating layer from the bottom surfaces of said trenches; depositing a layer of polycrystalline silicon over said substrate to fill said trenches; and planarizing said major surface of said substrate by an etching process which substantially removes said layer of polycrystalline silicon except from said trenches.
Claim 2
Dependent Claim
177 words
Method for forming a recessed isolation structure for an integrated circuit structure having substrate contacts comprising: forming a first masking layer over a major surface of a monocrystalline silicon substrate; opening a pattern in said first masking layer to said major surface wherein said isolation structure is desired; oxidizing the exposed monocrystalline substrate to produce said recessed isolation structure; removing said first masking layer; forming a second masking layer over said major surface; opening a pattern in said second masking layer in the recessed isolation structure wherein said substrate contacts are to be formed; forming through said opening a pattern of trenches having substantially vertical sidewalls through the said recessed isolation structure and into the said monocrystalline silicon thereunder; forming an insulating layer upon the surfaces of said trenches; removing said insulating layer from the bottom surfaces of said trenches; depositing a layer of polycrystalline silicon over said substrate to fill said trenches; and planarizing said major surface of said substrate by an etching process which substantially removes said layer of polycrystalline silicon except from said trenches.
Claim 3
Dependent Claim
44 words
The method of claim 1 wherein prior to said oxidizing the said exposed substrate is etched so that when said oxidizing is completed the top surface of the formed silicon dioxide will be substantially planar with the said major surface of said silicon substrates.
Claim 4
Dependent Claim
15 words
The method of claim 1 wherein said first masking layer is composed of silicon oxynitride.
Claim 5
Dependent Claim
31 words
The method of claim 1 and further comprising removing said second masking layer and forming the desired active and passive devices in said monocrystalline silicon substrate between said recessed isolation structure.
Claim 6
Dependent Claim
43 words
The method of claim 4 wherein said devices form a bipolar integrated circuit structure, said monocrystalline substrate includes a base silicon layer and an epitaxial layer thereover and there is provided a subcollector layer overlapping said base silicon layer and said epitaxial layer.
Claim 7
Dependent Claim
17 words
The method of claim 1 wherein the said pattern of trenches are formed by reactive ion etching.
Claim 8
Dependent Claim
21 words
The method of claim 1 wherein said insulating layer is silicon dioxide and said insulating layer is formed by thermal oxidation.
Claim 9
Dependent Claim
25 words
The method of claim 7 wherein said insulating layer is removed from the said bottom surfaces by anisotropic etching using a reactive ion etching process.
Claim 10
Dependent Claim
29 words
The method of claim 5 wherein said base region is P, said subcollector is N+, said polycrystalline silicon is P+ and said bipolar integrated circuit structure contains NPN transistors.
Claim 11
Dependent Claim
22 words
The method of claim 1 wherein said planarization is accomplished by preferentially etching said polycrystalline silicon in a reactive ion etching ambient.
Claim 12
Dependent Claim
47 words
The method of claim 1 wherein said recessed isolation structure surface portion is greater than about 1.5 um in width and less than 1.5 μm in depth and the trench portion is less than about 5 μm in width and ≢μm in depth below said major surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-06-19 | 1987-12-19 | 1988-06-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-06-19 | 1991-12-19 | 1992-06-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-06-19 | 1995-12-19 | 1996-06-19 | $7700.00 | Window Closed / Lapsed |