Patent US4448653A successfully refreshed from Google Patents.
US4448653A
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Cathode arrangement for sputtering material from a target in a cathode sputtering unit
Assignee: OC Oerlikon Balzers AG
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Filing: 1981-10-30
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Granted: 1984-05-15
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Expires: 2001-10-30
Abstract
Abstract A cathode arrangement for sputtering material from a target in a cathode sputtering unit comprises a frame-shape magnet disposed adjacent the target and remote from the surface to be sputtered and another magnet located within the frame-shape magnet. The directions of magnetization of the two magnets form an angle of from 45 to 90 degrees. The frame-shape magnet is made of a permanent magnet material having an energy density of at least 40 kJ per m 3 . The other magnet is made of a permanent magnet material having an energy density of less than 40 kJ per m 3 .
Inventors
- 👤 Urs Wegmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 20:15
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3426; H01J37/3402; H01J37/3405; H01J37/3408
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
101 words
A cathode arrangement for sputtering material from a target in a cathode sputtering unit, comprising a frame-shape magnet being disposed adjacent the target remote from the surface to be sputtered, and another magnet being provided within said frame-shap magnet, and with the directions of magnetization of the two magnets forming an angle of between 45° and 90°, said frame-shape magnet being made of a permanent-magnet mterial having an energy density of at least 40 kJ per m 3 and the other magnet being made of a permanent-magnet material having an energy density of less than 40 kJ per m 3 .
Claim 2
Dependent Claim
101 words
A cathode arrangement for sputtering material from a target in a cathode sputtering unit, comprising a frame-shape magnet being disposed adjacent the target remote from the surface to be sputtered, and another magnet being provided within said frame-shap magnet, and with the directions of magnetization of the two magnets forming an angle of between 45° and 90°, said frame-shape magnet being made of a permanent-magnet mterial having an energy density of at least 40 kJ per m 3 and the other magnet being made of a permanent-magnet material having an energy density of less than 40 kJ per m 3 .
Claim 3
Dependent Claim
32 words
A cathode arrangement according to claim 1, wherein said energy content difference between the materials of said frame-shape magnet and said another magnet is at least 10 kJ per m 3 .
Claim 4
Dependent Claim
30 words
A cathode arrangement according to claim 1, including an additional magnet disposed centrally of said frame-shape magnet having an energy density of more than 40 kJ per m 3 .
Claim 5
Dependent Claim
43 words
A cathode arrangement according to claim 1, wherein said frame-shape magnet comprises a magnet of high-energy material, said another magnet comprising a magnet of low-energy material and they form magnetization directions which are at an angle of 90° in respect to each other.
Claim 6
Dependent Claim
23 words
A cathode arrangement according to claim 1, wherein said frame-shape magnet and said another magnet are mounted for movement relative to the target.
Claim 7
Dependent Claim
57 words
A cathode arrangement according to claim 1, including a support structure, a housing for said support structure in which said support structure is located having a top opening, said frame-shape magnet and said another magnet being mounted on said support structure below the top opening, the target plate positioned on said support structure above said cathode arrangement.
Claim 8
Dependent Claim
24 words
A cathode arrangement according to claim 6, including means for mounting said support structure at a spaced location from the interior of said housing.
Claim 9
Dependent Claim
20 words
A cathode arrangement according to claim 6, including a cooling plate mounted over said cathode arrangement and supporting said target.
Claim 10
Dependent Claim
36 words
A cathode arrangement according to claim 1, wherein said frame-shape magnet comprises an annular member, said another magnet being annular in form, and a tube comprising a material to be sputtered positioned around said annular member.
Claim 11
Dependent Claim
24 words
A cathode arrangement according to claim 1, wherein said target is a tube, said magnet and said another magnet being positioned around said tube.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-15 | 1987-11-14 | 1988-05-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-15 | 1991-11-14 | 1992-05-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-15 | 1995-11-14 | 1996-05-15 | $7700.00 | Window Closed / Lapsed |