Patent US4445997A successfully refreshed from Google Patents.
US4445997A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rotatable sputtering apparatus
Assignee: Von Ardenne Anlagentechnik GmbH
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Filing: 1983-08-17
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Granted: 1984-05-01
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Expires: 2003-08-17
Abstract
Abstract A magnetron cathode for sputter-coating non-planar substrates, which includes a rotatable elongated tubular member having a layer of the coating material to be sputtered applied to the outer surface thereof, and magnetic means mounted in said tubular member, said tubular member being contoured longitudinally to provide a non-cylindrical sputtering surface.
Inventors
- 👤 Harold E. McKelvey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:21
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; H01J37/3405
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
40 words
A sputtering cathode for sputter-coating non-planar substrates, comprising a rotatable elongated tubular member having a layer of coating material to be sputtered applied to the outer surface thereof, said tubular member being contoured longitudinally to provide a non-cylindrical sputtering surface.
Claim 2
Dependent Claim
40 words
A sputtering cathode for sputter-coating non-planar substrates, comprising a rotatable elongated tubular member having a layer of coating material to be sputtered applied to the outer surface thereof, said tubular member being contoured longitudinally to provide a non-cylindrical sputtering surface.
Claim 3
Dependent Claim
18 words
A sputtering cathode as claimed in claim 1, in which said tubular member is of substantially barrel-like configuration.
Claim 4
Dependent Claim
17 words
A sputtering cathode as claimed in claim 1, in which said tubular member has a non-cylindrical profile.
Claim 5
Dependent Claim
18 words
A sputtering cathode as claimed in claim 1, in which said tubular member varies in diameter longitudinally thereof.
Claim 6
Dependent Claim
16 words
A sputtering cathode as claimed in claim 1, including magnetic means mounted in said tubular member.
Claim 7
Dependent Claim
31 words
A sputtering cathode as claimed in claim 5, in which said magnetic means extends lengthwise of said tubular member and is contoured to conform to the contour of said tubular member.
Claim 8
Dependent Claim
90 words
A magnetron cathode sputtering apparatus, comprising an evacuable coating chamber, a cathode including an elongated tubular member mounted in said chamber and having a layer of coating material to be sputtered applied to the outer surface thereof, said tubular member being contoured longitudinally to provide a non-cylindrical sputtering surface, magnetic means mounted in said tubular member, means for rotating said tubular about its longitudinal axis, and means for moving the substrates to be coated relative to said tubular member in a direction at right angles to the longitudinal axis thereof.
Claim 9
Dependent Claim
90 words
A magnetron cathode sputtering apparatus, comprising an evacuable coating chamber, a cathode including an elongated tubular member mounted in said chamber and having a layer of coating material to be sputtered applied to the outer surface thereof, said tubular member being contoured longitudinally to provide a non-cylindrical sputtering surface, magnetic means mounted in said tubular member, means for rotating said tubular about its longitudinal axis, and means for moving the substrates to be coated relative to said tubular member in a direction at right angles to the longitudinal axis thereof.
Claim 10
Dependent Claim
20 words
A magnetron cathode sputtering apparatus as claimed in claim 7, in which said tubular member is of substantially barrel-like configuration.
Claim 11
Dependent Claim
19 words
A magnetron cathode sputtering apparatus as claimed in claim 7, in which said tubular member has a non-cylindrical profile.
Claim 12
Dependent Claim
20 words
A magnetron cathode sputtering apparatus as claimed in claim 7, in which said tubular member varies in diameter longitudinally thereof.
Claim 13
Dependent Claim
33 words
A magnetron cathode sputtering apparatus as claimed in claim 7, in which said magnetic means extends lengthwise of said tubular member and is contoured to conform to the contour of said tubular member.
References Cited (Backward Citations)
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Cited
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US4374722A
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US4290877A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-01 | 1987-10-31 | 1988-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-01 | 1991-10-31 | 1992-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-01 | 1995-10-31 | 1996-05-01 | $7700.00 | Window Closed / Lapsed |