US4376025A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cylindrical cathode for magnetically-enhanced sputtering
Assignee: JACKSON TUBE SERVICE Inc
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Filing: 1982-06-14
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Granted: 1983-03-08
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Expires: 2002-06-14
Abstract
Abstract In this cylindrical, magnetically-enhanced, sputtering cathode, the magnetic field at the cathode target is generated by applying an electric current through a hollow electrical conductor disposed within a tubular target, so that the electric current flowing along this conductor induces circular magnetic lines concentrically around its axis. By biasing negatively the tubular target immersed in a low pressure gas, a glow discharge is generated. Electrons, emitted from the target surface are accelerated radially by the electric field, but deviated perpendicularly by the magnetic field. The resulting motion is confined in a spirally-shaped area centered on the conductor axis.
Inventors
- 👤 Bogdan Zega
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 20:11
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
59 words
A cylindrical, magnetically-enhanced, sputtering cathode which produces a thin film on the surface of an object, which comprises: a tubular target; a hollow electrical conductor disposed within the tubular target; means for applying an electric current through the conductor which generates a magnetic field around the tubular target; and means for circulating a liquid coolant through the electrical conductor.
Claim 2
Dependent Claim
59 words
A cylindrical, magnetically-enhanced, sputtering cathode which produces a thin film on the surface of an object, which comprises: a tubular target; a hollow electrical conductor disposed within the tubular target; means for applying an electric current through the conductor which generates a magnetic field around the tubular target; and means for circulating a liquid coolant through the electrical conductor.
Claim 3
Dependent Claim
28 words
The cylindrical, magnetically-enhanced, sputtering cathode as recited in claim 1 wherein the ends of the electrical conductor are connected to a low voltage, current source isolated from ground.
Claim 4
Dependent Claim
33 words
A sputtering apparatus utilizing the cylindrical, magnetically-enhanced, sputtering cathode as recited in claim 2 further comprising a d.c. high voltage supply source having its negative terminal connected to the low voltage current source.
Claim 5
Dependent Claim
20 words
The cylindrical, magnetically-enhanced, sputtering cathode as recited in claim 2 wherein the low voltage current source is an a.c. source.
Claim 6
Dependent Claim
37 words
The cylindrical, magnetically-enhanced, sputtering cathode as recited in claim 1, further comprising an annular tight chamber provided between the tubular target and the electrical conductor, the annular tight chamber being connected to a pressurized gas coolant source.
Claim 7
Independent Claim
75 words
A method of producing a thin film onto a substrate within a cylindrical, magnetically-enhanced, cathodic sputtering apparatus, which comprises: providing a hollow electrical conductor disposed within a tubular target and at least one anode located outside the tubular conductor; circulating a liquid coolant through the electrical conductor; applying an electric current through the conductor which generates a magnetic field around the tubular target; and generating a glow discharge between the tubular target and the anode.
Claim 8
Independent Claim
75 words
A method of producing a thin film onto a substrate within a cylindrical, magnetically-enhanced, cathodic sputtering apparatus, which comprises: providing a hollow electrical conductor disposed within a tubular target and at least one anode located outside the tubular conductor; circulating a liquid coolant through the electrical conductor; applying an electric current through the conductor which generates a magnetic field around the tubular target; and generating a glow discharge between the tubular target and the anode.
Claim 9
Dependent Claim
21 words
The method of producing a thin film onto a substrate as recited in claim 6, wherein the anode is the substrate.
Claim 10
Dependent Claim
29 words
The method of producing a thin film onto a substrate as recited in claim 6, wherein the electric current applied through the conductor is a low voltage alternating current.
Claim 11
Dependent Claim
29 words
The method of producing a thin film onto a substrate as recited in claim 6, wherein the electric current that is applied through the conductor is a direct current.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-03-07 | 1986-09-06 | 1987-03-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-03-07 | 1990-09-06 | 1991-03-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-03-07 | 1994-09-06 | 1995-03-08 | $7700.00 | Window Closed / Lapsed |