US3884793A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrode type glow discharge apparatus
Assignee: Dart Industries Inc
•
Filing: 1971-09-07
•
Granted: 1975-05-20
•
Expires: 1991-09-07
Abstract
Abstract This is disclosed herein an electrode type glow discharge apparatus, such as that used for sputtering material from a cathode to provide a coating or the like on materials such as a substrate or substrates. Several exemplary embodiments are disclosed involving various combinations of constructural features including a flanged or spool type cathode, anode placement with respect thereto, provision of internal and/or external magnetic fields with field lines close to and substantially parallel with the barrel of the cathode, insulator placement, efficient cooling for anode and cathode, and the like. Furthermore, the assembly is constructed in a manner such that the same can be readily disassembled for enabling change of cathode materials and for cleaning cooling fluid passageways of the cathode and anode. Embodiments are described wherein at least a portion of the cathode may be in the form of a continuously moving member, such as a wire. The various constructural features enable apparatus to be provided which can create stable and uniform plasmas confined and controlled volume while operating at relatively low pressures with relatively low operating voltages.
Inventors
- 👤 Alan S Penfold
- 👤 John A Thornton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:41
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
200 words
ELECTRODE GLOW DISCHARGE APPARATUS FOR SPUTTERING MATERIAL IN A GASEOUS ENVIRONMENT OF APPROXIMATELTY 10**-2 TORR AND BELOW, COMPRISING: A HOUSING FOR SAID ENVIRONMENT AND MEANS THROUGH WHICH SAID HOUSING CAN BE EVACUATED; CATHODE MEANS FROM WHICH MATERIAL IS TO BE SPUTTERED, SAID CATHODE MEANS BEING ADAPTED TO BE COUPLED WITH A POWER SUPPLY AND INCLUDING A CENTRAL ELONGATED PORTION AND ENDS EXTENDING RADIALLY THEREFROM FORMING A TRAP REGION FOR HIGH AND LOW ENERGY ELECTRONS BETWEEN THE ENDS CONTIGUOUS TO SAID CENTRAL PORTION, SAID TRAP REGION INCLUDING A CATHODE SHEATH, SUBSTANTIALLY ALL OF SAID HIGH ENERGY ELECTRONS BEING GENERATED ON THE SURFACE OF SAID CATHODE MEANS BY SECONDARY EMISSION; ANODE MEANS BEING ADAPTED TO BE COUPLED TO A POWER SUPPLY, SAID ANODE MEANS BEING OUTSIDE SAID TRAP REGION OF SAID CATHODE MEANS; MAGNETIC FIELD MEANS FOR GENERATING A MAGNETIC FIELD OF APPROXIMATELY 300 GAUSS AND BELOW WITHIN SAID TRAP REGION, SAID MAGNETIC FIELD HAVING MAGNETIC FIELD LINES CLOSELY CONTIGUOUS TO AND SUBSTANTIALLY PARALLEL WITH SAID CENTRAL PORTION OF SAID CATHODE MEANS, WHEREBY SAID TRAP REGION IS FORMED COMPLETELY BY SAID MAGNETIC FIELD AND SURFACES AT SUBSTANTIALLY CATHODE POTENTIAL; AND MEANS FOR SUPPORTING WITHIN SAID HOUSING WORKPIECES INTENDED TO BE SPUTTER COATED.
Claim 2
Dependent Claim
200 words
ELECTRODE GLOW DISCHARGE APPARATUS FOR SPUTTERING MATERIAL IN A GASEOUS ENVIRONMENT OF APPROXIMATELTY 10**-2 TORR AND BELOW, COMPRISING: A HOUSING FOR SAID ENVIRONMENT AND MEANS THROUGH WHICH SAID HOUSING CAN BE EVACUATED; CATHODE MEANS FROM WHICH MATERIAL IS TO BE SPUTTERED, SAID CATHODE MEANS BEING ADAPTED TO BE COUPLED WITH A POWER SUPPLY AND INCLUDING A CENTRAL ELONGATED PORTION AND ENDS EXTENDING RADIALLY THEREFROM FORMING A TRAP REGION FOR HIGH AND LOW ENERGY ELECTRONS BETWEEN THE ENDS CONTIGUOUS TO SAID CENTRAL PORTION, SAID TRAP REGION INCLUDING A CATHODE SHEATH, SUBSTANTIALLY ALL OF SAID HIGH ENERGY ELECTRONS BEING GENERATED ON THE SURFACE OF SAID CATHODE MEANS BY SECONDARY EMISSION; ANODE MEANS BEING ADAPTED TO BE COUPLED TO A POWER SUPPLY, SAID ANODE MEANS BEING OUTSIDE SAID TRAP REGION OF SAID CATHODE MEANS; MAGNETIC FIELD MEANS FOR GENERATING A MAGNETIC FIELD OF APPROXIMATELY 300 GAUSS AND BELOW WITHIN SAID TRAP REGION, SAID MAGNETIC FIELD HAVING MAGNETIC FIELD LINES CLOSELY CONTIGUOUS TO AND SUBSTANTIALLY PARALLEL WITH SAID CENTRAL PORTION OF SAID CATHODE MEANS, WHEREBY SAID TRAP REGION IS FORMED COMPLETELY BY SAID MAGNETIC FIELD AND SURFACES AT SUBSTANTIALLY CATHODE POTENTIAL; AND MEANS FOR SUPPORTING WITHIN SAID HOUSING WORKPIECES INTENDED TO BE SPUTTER COATED.
Claim 3
Dependent Claim
51 words
Apparatus as in claim 1, wherein said ends of said cathode means comprise flanges and said central portion of said cathode means is movable through said flanges, said flanges and said central portion being electrically connected together, and said anode means includes an anode encircling a portion of said cathode means.
Claim 4
Dependent Claim
16 words
Apparatus as in claim 2, wherein said anoDe encircles said central portion of said cathode means.
Claim 5
Dependent Claim
36 words
Apparatus as in claim 3, wherein said anode means includes a tube coaxially mounted about said central portion of said cathode means, said tube being electrically insulated with respect to said flanges of said cathode means.
Claim 6
Dependent Claim
34 words
Apparatus as in claim 4, wherein said tube is insulated from said flanges by insulators in the form of rings respectively mounted between outer faces of said tube and inner faces of said flanges.
Claim 7
Dependent Claim
38 words
Apparatus as in claim 5, wherein gaps are formed between each of said insulators and the respective cathode flanges and ends of the anode tube, to prevent sputtered material from easily passing through said gaps to said insulators.
Claim 8
Dependent Claim
34 words
Apparatus as in claim 1, wherein said cathode means is hollow and said ends extend inwardly, said ends forming said trap region between the ends contiguous to said central portion of said cathode means.
Claim 9
Dependent Claim
37 words
Apparatus as in claim 7, wherein said anode means includes first and second anodes adapted to be electrically connected together, each anode being mounted close to but insulated from the respective opposite ends of said cathode means.
Claim 10
Dependent Claim
25 words
Apparatus as in claim 8, including: insulator means disposed between the ends of said cathode means and each of said respective first and second anodes.
Claim 11
Dependent Claim
52 words
Apparatus as in claim 9, wherein gaps are formed between the ends of said cathode means and each of said respective first and second anodes, at least a portion of said gaps extending perpendicularly to said field lines, to prevent sputtered material from easily passing through said gaps to said insulator means.
Claim 12
Dependent Claim
32 words
Apparatus as in claim 8, wherein said anodes having openings therethrough for allowing a substrate to be moved through one of said anodes, said cathode means and the other of said anodes.
Claim 13
Dependent Claim
59 words
Apparatus as in claim 7, wherein said central portion of said cathode means is in the form of a substantially cylindrical barrel and said ends are substantially cylindrical flanges located on the respective ends of said barrel and extend inwardly, said trap region being formed between the inward faces of said flanges about the inner periphery of said barrel.
Claim 14
Dependent Claim
12 words
Apparatus as in claim 12, wherein said flanges have substantially parallel faces.
Claim 15
Dependent Claim
22 words
Apparatus as in claim 12, wherein said anode means includes an annular anode closely spaced with respect to one of said flanges.
Claim 16
Dependent Claim
21 words
Apparatus as in claim 7, wherein said central portion of said cathode means includes a cavity for receiving cooling fluid therein.
Claim 17
Dependent Claim
51 words
Apparatus as in claim 7, wherein said cathode means includes a substantially cylindrical hollow barrel removably mounted with respect to said ends, said ends being in the form of flanges having cavities therein, and said cavities communicating with a cavity in said barrel for receiving cooling fluid within said cathode means.
Claim 18
Dependent Claim
57 words
Apparatus as in claim 1, wherein said central portion of said cathode means is in the form of a substantially cylindrical barrel and said ends are outwardly extending substantially cylindrical flanges on the ends of said barrel, said trap region being formed between the inward faces of said flanges and around the outer periphery of said barrel.
Claim 19
Dependent Claim
26 words
Apparatus as in claim 17, wherein said anode means includes an annular anode mounted about the periphery of and closely spaced from one of said flanges.
Claim 20
Dependent Claim
39 words
Apparatus as in claim 18, including insulator means coupled with the outward face of said one of said flanges but in a spaced relationship therefrom defining an annular gap having a central axis substantially parallel with said field lines.
Claim 21
Dependent Claim
36 words
Apparatus as in claim 19, including: insulator means mounted on the outer face of the other of said flanges and spaced therefrom to form an annular gap having an axis substantially parallel with said field lines.
Claim 22
Dependent Claim
22 words
Apparatus as in claim 18, wherein the other oF said flanges is of larger diameter than the said one of said flanges.
Claim 23
Dependent Claim
18 words
Apparatus as in claim 18, wherein said anode means includes an internal cavity for receiving cooling fluid therein.
Claim 24
Dependent Claim
12 words
Apparatus as in claim 17, wherein said flanges have substantially parallel faces.
Claim 25
Dependent Claim
37 words
Apparatus as in claim 17 wherein said anode means comprises a substantially annular anode mounted about and close to but spaced from one of said flanges, said anode having an internal cavity for receiving cooling fluid therein.
Claim 26
Dependent Claim
58 words
Apparatus as in claim 1, wherein said central portion of said cathode means comprises a substantially cylindrical barrel removably mounted with respect to said ends of said cathode means, said ends being in the form of flanges having cavities therein, and said cavities communicating with a cavity within said barrel for receiving cooling fluid within said cathode means.
Claim 27
Dependent Claim
27 words
Apparatus as in claim 25, wherein at least one of said flanges of said cathode means includes first and second separable complementary sections defining a coolant cavity.
Claim 28
Dependent Claim
16 words
Apparatus as in claim 26, wherein said first and second separable sections are of different materials.
Claim 29
Dependent Claim
27 words
Apparatus as in claim 26, wherein at least one of said separable sections is formed of a material for affecting the shape of said magnetic field lines.
Claim 30
Dependent Claim
15 words
Apparatus as in claim 25, including: a spool member mounted centrally within said cathode means.
Claim 31
Dependent Claim
55 words
Apparatus as in claim 1, wherein said ends of said cathode means comprise flanges and said central portion of said cathode means is movable through and makes electrical contact with said flanges, and said anode means includes at least an anode mounted adjacent to and spaced outwardly from at least one of said cathode flanges.
Claim 32
Dependent Claim
35 words
Apparatus as in claim 30, wherein said flanges are substantially cylindrical flanges, and said anode means includes an annular anode mounted about the periphery of and closely spaced with respect to one of said flanges.
Claim 33
Dependent Claim
22 words
Apparatus as in claim 31, wherein the other of said flanges is of larger diameter than the said one of said flanges.
Claim 34
Dependent Claim
33 words
Apparatus as in claim 30, wherein said cathode flanges are substantially cylindrical flanges, and said anode means includes an annular anode mounted about the periphery of and adjacent each of said cathode flanges.
Claim 35
Dependent Claim
17 words
Apparatus as in claim 1, wherein said ends of said cathode means are outwardly extending contiguous flanges.
Claim 36
Dependent Claim
55 words
Apparatus as in claim 34, wherein said anode means is a substantiallly annular anode mounted about one of said flanges and separated therefrom by a small annular gap, the width of said anode being at least as wide as said one of said flanges in a direction parallel to the axis of said anode means.
Claim 37
Dependent Claim
30 words
Apparatus as in claim 34, wherein said flanges of said cathode means are substantially cylindrical, and one of said flanges is of greater diameter than the other of said flanges.
Claim 38
Dependent Claim
38 words
Apparatus as in claim 1, wherein said magnetic field means includes a field winding encircling said cathode means and said anode means, and includes ferromagnetic end plates for aiding in forming said magnetic field in said trap region.
Claim 39
Dependent Claim
34 words
Apparatus as in claim 37, wherein said field winding is mounted on a housing within which said cathode means and anode means are supported, said housing and end plates together forming a vacuum chamber.
Claim 40
Dependent Claim
27 words
Apparatus as in claim 1, wherein said anode means includes an anode mounted adjacent to and spaced outwardly from one of said ends of said cathode means.
Claim 41
Dependent Claim
19 words
Apparatus as in claim 1, wherein said magnetic field means includes a field winding mounted within said cathode means.
Claim 42
Dependent Claim
57 words
Apparatus as in claim 1, wherein said cathode means and anode means are adapted to be mounted within a vacuum chamber, and said magnetic field means includes a field winding mounted within said central porTion of said cathode means and a field winding mounted on a vacuum chamber for providing a resultant field in said trap region.
Claim 43
Dependent Claim
21 words
Apparatus as in claim 1, wherein said central portion of said cathode means includes a cavity for receiving cooling fluid therein.
Claim 44
Dependent Claim
144 words
Electrode glow discharge apparatus for sputtering material, comprising: anode means and cathode means spaced from one another and adapted to be coupled with a power supply for forming an electron discharge, said cathode means having an elongated central portion and contiguous ends extending radially therefrom; trap means forming an electron trap for high and low energy electrons surrounding said cathode means for enabling said apparatus to be operated in a low-pressure gaseous environment of approximately 10 3 torr and below, said trap means including means providing magnetic field lines close to and substantially parallel to said elongated central portion of said cathode means and intersecting said ends of said cathode means, whereby said trap is formed completely by said magnetic field lines and a cathode sheath adjacent surfaces at cathode potential; and means for supporting outside said trap workpieces intended to be sputter coated.
Claim 45
Dependent Claim
144 words
Electrode glow discharge apparatus for sputtering material, comprising: anode means and cathode means spaced from one another and adapted to be coupled with a power supply for forming an electron discharge, said cathode means having an elongated central portion and contiguous ends extending radially therefrom; trap means forming an electron trap for high and low energy electrons surrounding said cathode means for enabling said apparatus to be operated in a low-pressure gaseous environment of approximately 10 3 torr and below, said trap means including means providing magnetic field lines close to and substantially parallel to said elongated central portion of said cathode means and intersecting said ends of said cathode means, whereby said trap is formed completely by said magnetic field lines and a cathode sheath adjacent surfaces at cathode potential; and means for supporting outside said trap workpieces intended to be sputter coated.
Claim 46
Dependent Claim
21 words
Apparatus as in claim 43, wherein said ends of said cathode means comprise flanges on the ends of said cathode means.
Claim 47
Dependent Claim
102 words
Electrode glow discharge apparatus having means for preventing undesired sputter coating, comprising: anode means and cathode means spaced from one another and adapted to be coupled to a power supply for causing electron discharge from said cathode means; magnetic field means for providing a magnetic field within said apparatus; insulator means supported adjacent said cathode means and forming a gap between at least a portion of said insulator means and said cathode means, said gap being a narrow and elongated channel with the elongated dimension of said gap being substantially perpendicular to the field lines of said magnetic field traversing said gap.
Claim 48
Dependent Claim
102 words
Electrode glow discharge apparatus having means for preventing undesired sputter coating, comprising: anode means and cathode means spaced from one another and adapted to be coupled to a power supply for causing electron discharge from said cathode means; magnetic field means for providing a magnetic field within said apparatus; insulator means supported adjacent said cathode means and forming a gap between at least a portion of said insulator means and said cathode means, said gap being a narrow and elongated channel with the elongated dimension of said gap being substantially perpendicular to the field lines of said magnetic field traversing said gap.
References Cited (Backward Citations)
US3507774A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-05-19 | 1978-11-18 | 1979-05-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-05-19 | 1982-11-18 | 1983-05-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-05-19 | 1986-11-18 | 1987-05-20 | $7700.00 | Window Closed / Lapsed |