Abstract There is disclosed herein an electrode type glow discharge apparatus, such as that used for sputtering material from a cathode to provide a coating or the like on materials such as a substrate or substrates. Several exemplary embodiments are disclosed involving various combinations of constructural features including a flanged or spool type cathode, anode placement with respect thereto, provision of internal and/or external magnetic fields with field lines close to and substantially parallel with the barrel of the cathode, insulator placement, efficient cooling for anode and cathode, and the like. Furthermore, the assembly is constructed in a manner such that the same can be readily disassembled for enabling change of cathode materials and for cleaning cooling fluid passageways of the cathode and anode. Embodiments are described wherein at least a portion of the cathode may be in the form of a continuously moving member, such as a wire. The various constructural features enable apparatus to be provided which can create stable and uniform plasmas confined and controlled volume while operating at relatively low pressures with relatively low operating voltages.
Electrode-type glow discharge apparatus comprising: a low pressure gaseous environment; anode means and cathode means within said low pressure gaseous environment and adapted to be coupled to a power supply; said cathode means including a central cathode and a pair of electrically conductive end flanges physically and electrically coupled with said cathode, said cathode comprising an elongated member and said flanges comprising outwardly extending flanges electrically coupled with said elongated member, said elongated member being movable from outside said gaseous environment into said gaseous environment through and with respect to said flanges along the longitudinal axis of said flanges.
Claim 2
Dependent Claim
99 words
Electrode-type glow discharge apparatus comprising: a low pressure gaseous environment; anode means and cathode means within said low pressure gaseous environment and adapted to be coupled to a power supply; said cathode means including a central cathode and a pair of electrically conductive end flanges physically and electrically coupled with said cathode, said cathode comprising an elongated member and said flanges comprising outwardly extending flanges electrically coupled with said elongated member, said elongated member being movable from outside said gaseous environment into said gaseous environment through and with respect to said flanges along the longitudinal axis of said flanges.
Claim 3
Dependent Claim
19 words
Apparatus as set forth in claim 1, wherein said central cathode is a wire movable through said end flanges.
Claim 4
Dependent Claim
27 words
Apparatus as in claim 1 wherein said anode means includes a tube encircling said elongated member of said cathode means and insulated from said cathode and flanges.