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US4431685A Expired / Lapsed US ⏱️ 0.0 years remaining

Decreasing plated metal defects

Assignee: International Business Machines Corp
•
Filing: 1982-07-02
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Granted: 1984-02-14
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Expires: 2002-07-02
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Abstract

Abstract A method of decreasing plated metal defects by applying a layer of a noble metal such as palladium, platinum, gold, iridium, rhodium, or mixtures thereof between a photoresist and a metallic surface.

Inventors

  • 👤 Michael J. Canestaro
  • 👤 Donald G. McBride
  • 👤 John A. Welsh

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 18:02
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/22; H05K3/24; H05K3/244; C; C23; C23C; C23C18/00; C23C18/16; C23C18/1601; C23C18/1603; C23C18/1605; C23C18/1633; C23C18/1646; C23C18/165; C23C18/1651; C23C18/54; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/11; H05K3/38; H05K3/382; H05K3/384; H10; H10D; H10D84/00; H10D84/01; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347; H05K2203/00; H05K2203/07; H05K2203/0703; H05K2203/072; H05K3/10; H05K3/108

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 47 words
A method for decreasing plated metal defects which comprises applying to a metallic surface a layer of a metal different from said metallic surface and being a noble metal, then applying a photoresist layer onto the resulting noble metal coated surface and then electrolessly plating a metal.
Claim 2
Independent Claim 47 words
A method for decreasing plated metal defects which comprises applying to a metallic surface a layer of a metal different from said metallic surface and being a noble metal, then applying a photoresist layer onto the resulting noble metal coated surface and then electrolessly plating a metal.
Claim 3
Dependent Claim 20 words
The method of claim 1 wherein said metallic surface is selected from the group of copper, nickel, iron, or steel.
Claim 4
Dependent Claim 14 words
The method of claim 1 wherein said metallic surface is copper or copper alloy.
Claim 5
Dependent Claim 19 words
The method of claim 1 wherein said metallic surface is a metal or alloy supported by a dielectric substrate.
Claim 6
Dependent Claim 11 words
The method of claim 4 wherein said metallic surface is copper.
Claim 7
Dependent Claim 16 words
The method of claim 5 wherein the copper is about 2 to about 12 microns thick.
Claim 8
Independent Claim 27 words
The method of claims 1, 2, 3, 4, 5, or 6 wherein said noble metal is selected from the group of palladium, platinum, gold, iridium, or rhodium.
Claim 9
Independent Claim 25 words
The method of claims 1, 2, 3, 4, 5, or 6 wherein said noble metal is selected from the group of palladium, gold, or platinum.
Claim 10
Independent Claim 21 words
The method of claims 1, 2, 3, 4, 5, or 6 wherein the thickness of said metal layer is a monolayer.
Claim 11
Independent Claim 21 words
The method of claims 1, 2, 3, 4, 5, or 6 wherein said noble metal is applied by immersion coating technique.
Claim 12
Dependent Claim 34 words
The method of claim 1 wherein, prior to the step of plating a metal, the photoresist is developed to expose desired portions of the underlying metallic surface for the subsequent plating of metal thereon.
Claim 13
Dependent Claim 17 words
The method of claim 11 wherein said metal is selected from the group of nickel or copper.
Claim 14
Dependent Claim 12 words
The method of claim 11 wherein said metal is electrolessly coated copper.
Claim 15
Dependent Claim 17 words
The method of claim 11 wherein the plated metal is coated with an immersion tin coating layer.
Claim 16
Dependent Claim 14 words
The method of claim 14 which further includes removing the previously unremoved photoresist material.
Claim 17
Dependent Claim 23 words
The method of claim 15 which further includes removing the thin underlying metallic surface which was protected during the plating by the photoresist.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-02-13 1987-08-15 1988-02-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-02-13 1991-08-15 1992-02-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-02-13 1995-08-15 1996-02-14 $7700.00 Window Closed / Lapsed

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