US3549368A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for improving photoresist adhesion
Assignee: International Business Machines Corp
•
Filing: 1968-07-02
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Granted: 1970-12-22
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Expires: 1988-07-02
Abstract
No abstract record available.
Inventors
- 👤 Robert H Collins
- 👤 Frank T Deverse
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 00:46
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/6903; G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0751; H10D; H10D99/00; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6502; H10P14/6506; H10P14/68; H10P14/683; Y; Y10; Y10S; Y10S430/00; Y10S430/136
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-12-21 | 1974-06-22 | 1974-12-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-12-21 | 1978-06-22 | 1978-12-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-12-21 | 1982-06-22 | 1982-12-22 | $7700.00 | Window Closed / Lapsed |