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US4414561A
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Beryllium-gold ohmic contact to a semiconductor device
Assignee: AT&T Inc
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Filing: 1982-09-07
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Granted: 1983-11-08
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Expires: 2002-09-07
Abstract
Abstract An ohmic contact to a semiconductor device comprising p-type InP is formed by sequentially depositing beryllium-gold and gold layers on InP and then heat-treating the device at a temperature less than 440 degrees C. An ohmic contact to p-type InGaAsP can be similarly formed.
Inventors
- 👤 Vassilis G. Keramidas
- 👤 Robert J. McCoy
- 👤 Henryk Temkin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 01:16
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0116; H10D64/60; H10D64/62; H10D62/00; H10D62/80; H10D62/85
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
45 words
A semiconductor device comprising a layer of p-type semiconductor material, said semiconductor being selected from the group consisting of InP and InGaAsP, and an ohmic contact to said semiconductor characterized in that said ohmic contact comprises: a layer of beryllium-gold; and a layer of gold.
Claim 2
Dependent Claim
45 words
A semiconductor device comprising a layer of p-type semiconductor material, said semiconductor being selected from the group consisting of InP and InGaAsP, and an ohmic contact to said semiconductor characterized in that said ohmic contact comprises: a layer of beryllium-gold; and a layer of gold.
Claim 3
Dependent Claim
19 words
A semiconductor device as recited in claim 1 in which said ohmic contact further comprises a layer of palladium.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-11-07 | 1987-05-09 | 1987-11-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-11-07 | 1991-05-09 | 1991-11-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-11-07 | 1995-05-09 | 1995-11-08 | $7700.00 | Window Closed / Lapsed |