US4022931A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for making semiconductor device
Assignee: Motorola Solutions Inc
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Filing: 1975-06-13
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Granted: 1977-05-10
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Expires: 1995-06-13
Abstract
Abstract A semiconductor device having metallization consisting essentially of beryllium. The beryllium makes ohmic contact by deposition on a substrate at 300° C-400° C or it is deposited at lower temperatures and then heat treated to render ohmic the contact to the semiconductor device.
Inventors
- 👤 James R. Black
- 👤 Elliott M. Philofsky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 07:13
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/83; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/60; H10D64/62; H10P; H10P14/00; H10P14/40; H10P14/412; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W72/00; H10W72/90; H10W72/50; H10W72/531; H10W72/536; H10W72/551; H10W72/552; H10W72/5522; H10W72/5524; H10W72/59
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
54 words
A process of manufacturing a semiconductor comprising providing a semiconductor substrate with an insulative layer; opening a window in said insulative layer to expose said semiconductor substrate; and depositing beryllium on said insulative layer and said substrate at a temperature between 300° C and 400° C to form an ohmic contact with the substrate.
Claim 2
Dependent Claim
54 words
A process of manufacturing a semiconductor comprising providing a semiconductor substrate with an insulative layer; opening a window in said insulative layer to expose said semiconductor substrate; and depositing beryllium on said insulative layer and said substrate at a temperature between 300° C and 400° C to form an ohmic contact with the substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-05-09 | 1980-11-08 | 1981-05-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-05-09 | 1984-11-08 | 1985-05-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-05-09 | 1988-11-08 | 1989-05-10 | $7700.00 | Window Closed / Lapsed |