US4409609A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor device and method of manufacturing the same
Assignee: Fujitsu Ltd
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Filing: 1981-03-18
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Granted: 1983-10-11
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Expires: 2001-03-18
Abstract
Abstract In a method of fabricating a semiconductor device having a V-groove insulating isolation structure with polycrystalline silicon filled in the groove of which internal surface is covered with an insulating film of silicon dioxide, the method according to this invention comprises the steps of selectively ion implanting an impurity material into a desired region of the polycrystalline silicon layer in order to give to this region a desired different type of electric conductivity relative to the polycrystalline silicon layer, followed by a selective annealing by an energy beam, such as laser, of a desired part of the polycrystalline silicon layer, including the region into which the impurity material has been ion implanted.
Inventors
- 👤 Takeshi Fukuda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 12:57
CPC Classifications
H; H10; H10P; H10P34/00; H10P34/40; H10P34/42; H10W; H10W10/00; H10W10/01; H10W10/041; H10W10/40; H10W20/00; H10W20/01; H10W20/031; H10W20/056; H10W20/067; H10W20/068; H10W20/40; H10W20/41; H10W20/435; H10W20/45; H10W20/48
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
114 words
A selected interconnection between a plurality of semiconductor devices on a substrate, comprising said semiconductor substrate having a first conductivity type, a semiconductor layer of a second conductivity type opposite to the first conductivity type, the layer being formed on the substrate, a V-groove for selectively separating said devices, penetrating through the semiconductor layer, and reaching into the substrate, an insulating film formed on the surface of the V-groove, a polycrystalline semiconductor layer formed in the V-groove on the insulating film, a single crystal semiconductor region formed along a surface portion of the polycrystal semiconductor layer, and a metal wiring layer formed to selectively contact with the single crystal semiconductor region and said devices.
Claim 2
Dependent Claim
114 words
A selected interconnection between a plurality of semiconductor devices on a substrate, comprising said semiconductor substrate having a first conductivity type, a semiconductor layer of a second conductivity type opposite to the first conductivity type, the layer being formed on the substrate, a V-groove for selectively separating said devices, penetrating through the semiconductor layer, and reaching into the substrate, an insulating film formed on the surface of the V-groove, a polycrystalline semiconductor layer formed in the V-groove on the insulating film, a single crystal semiconductor region formed along a surface portion of the polycrystal semiconductor layer, and a metal wiring layer formed to selectively contact with the single crystal semiconductor region and said devices.
Claim 3
Dependent Claim
15 words
The interconnection of claim 1, wherein said polycrystalline semiconductor layer has a high specific resistance.
Claim 4
Dependent Claim
64 words
The interconnection of claim 1, wherein said single crystal semiconductor region has a first region of one conductivity type and a second region of the other conductivity type to form a PN junction therebetween, the first region being formed in the second region and forming a respective portion of said interconnection, the second region electrically isolating the first region from the polycrystal silicon layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-10 | 1987-04-11 | 1987-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-10 | 1991-04-11 | 1991-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-10 | 1995-04-11 | 1995-10-11 | $7700.00 | Window Closed / Lapsed |