Patent US4365588A successfully refreshed from Google Patents.
US4365588A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fixture for VPE reactor
Assignee: RCA Corp
•
Filing: 1981-03-13
•
Granted: 1982-12-28
•
Expires: 2001-03-13
Abstract
Abstract A fixture for use within an epitaxial deposition reactor includes a box adapted to receive a semiconductor substrate. The box is movable to a position of reactant gas flow within the reactor and it includes a porous cover. A stagnant mixture of reactant gases is maintained between the substrate and the cover while the box is within the zone of reactant gas flow.
Inventors
- 👤 Stuart T. Jolly
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 02:01
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C30; C30B; C30B25/00; C30B25/02; C30B25/14
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
76 words
A fixture for use within an epitaxial deposition reactor, comprising: a box adapted to receive a semiconductor substrate, the box being movable to a position of turbulent reactant gas flow within the reactor; and a porous cover for said box, said cover permitting reactant gas to diffuse therethrough, such that a stagnant mixture of reactant gas is maintained between the substrate and the cover while the box is within the zone of turbulent reactant gas flow.
Claim 2
Dependent Claim
76 words
A fixture for use within an epitaxial deposition reactor, comprising: a box adapted to receive a semiconductor substrate, the box being movable to a position of turbulent reactant gas flow within the reactor; and a porous cover for said box, said cover permitting reactant gas to diffuse therethrough, such that a stagnant mixture of reactant gas is maintained between the substrate and the cover while the box is within the zone of turbulent reactant gas flow.
Claim 3
Dependent Claim
15 words
A fixture in accordance with claim 1, wherein the cover is sintered quartz filter plate.
Claim 4
Dependent Claim
21 words
A fixture in accordance with claim 1, wherein the spacing between the cover and the substrate ranges approximately between 0.005-0.20 inches.
Claim 5
Dependent Claim
15 words
A fixture in accordance with claim 1, wherein the box is attached to a rod.
Claim 6
Dependent Claim
74 words
An epitaxial deposition system, comprising: a reactor having a deposition zone of turbulent reactant gas flow; a box adapted to receive a semiconductor substrate, the box being movable to a position within the deposition zone; and a porous cover for said box, said cover permitting reactant gas to diffuse therethrough, such that a stagnant mixture of reactant gas is maintained between the substrate and the cover while the box is within the deposition zone.
Claim 7
Dependent Claim
74 words
An epitaxial deposition system, comprising: a reactor having a deposition zone of turbulent reactant gas flow; a box adapted to receive a semiconductor substrate, the box being movable to a position within the deposition zone; and a porous cover for said box, said cover permitting reactant gas to diffuse therethrough, such that a stagnant mixture of reactant gas is maintained between the substrate and the cover while the box is within the deposition zone.
Claim 8
Dependent Claim
15 words
A system in accordance with claim 5, wherein: the deposition zone contains flowing reactant gas.
Claim 9
Dependent Claim
12 words
A system in accordance with claim 5, wherein the reactor is tube-shaped.
References Cited (Backward Citations)
US3316130A
Cited
US3394390A
Cited
US3617371A
Cited
US3603284A
Cited
US3901746A
Cited
US3701682A
Cited
US4129090A
Cited
US4256053A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-12-27 | 1986-06-28 | 1986-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-12-27 | 1990-06-28 | 1990-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-12-27 | 1994-06-28 | 1994-12-28 | $7700.00 | Window Closed / Lapsed |