Energy efficient furnace with movable end wall

Claim 2

A furnace, comprising: a first tubular member having opposite first and second ends, said tubular member being open on at least said first end and defining an elongate chamber having an elongate inner section spaced inwardly from said open end and at least a first outer section terminating at said first end; means for introducing process gas through said second end; means for separately heating said inner and outer sections, comprising means for heating said elongate inner section and a guard heater on said first outer section for heating a substantial portion of said first outer section; means for closing said open end, comprising a first wall normal to the axis of said tubular member disposed in the open end of said tubular member, said wall being movable to and from a position in said first outer section that is adjacent the outer edge of said inner chamber section; means for sensing a differential in temperature between a central portion of said inner chamber section and the outer edge of said inner chamber section proximal to said open end; and means for varying the extent of heating of said first outer section in accordance with said sensed temperature differential to provide a predetermined temperature relationship between said first outer chamber section and said inner chamber section.

Claim 3

The furnace of claim 1 in which said first wall is carried on a second tubular member formed to slidably move in the open end of said first tubular member.

Claim 4

The furnace of claim 1 including: a second wall on said second end of said first tubular member opposite said open end; means for heating a second outer section of said chamber adjacent said second end; means for sensing a differential in temperature between a central portion of said inner chamber section and the outer edge of said inner chamber section proximal to said second end; and means for varying the extent of heating of said second outer section in accordance with said temperature differential to provide a predetermined temperature relationship between said second outer chamber section and said inner chamber section.

Claim 5

The furnace of claim 3 in which said second wall is formed with an outwardly extending horizontally disposed tubular member defining an opening therethrough for constituting said means for introducing process gas.

Claim 6

The furnace of claim 3 in which said second wall is disposed substantially in the plane of the proximal outer edge of said inner chamber section.

Claim 7

The furnace of claim 3 in which said second wall is disposed at a position spaced outwardly from the plane of the proximal outer edge of said inner chamber section and further including a chemical reactor disposed between said second wall and the plane of the proximal outer end of said inner chamber section.

Claim 8

The furnace of any one of claims 1-5 in which said predetermined temperature relationship is isothermal.

Claim 9

The furnace of any one of claims 1-5 in which said means for heating said inner and outer sections comprise spirally wound electrical resistance wire on said tubular member.

Claim 10

The furnace of claim 8 including a jacket of heat insulating material encasing said tubular member.

Claim 11

A furnace, comprising: a first tubular member, open on one end and formed with a fixed wall at the opposite and to define an elongate chamber between said ends into which can be inserted a plurality of units of semiconductor material to be contacted with process gas, said elongate chamber having an inner section, an outer section terminating outwardly at said open end, and an outer section terminating inwardly at said fixed wall, said fixed wall being formed with an outwardly extending horizontally disposed tubular member defining an opening therethrough for the introduction of process gas; spirally wound electrical resistance wire on said tubular member and electrically connected to separately heat said inner section and said outer sections; a closure for the open end of said first tubular member, comprising a second tubular member and a wall carried thereon formed to slidably move in said open end to substantially close said open end, said wall being movable to and from a portion of said outer section thereat adjacent the proximal outer edge of said inner chamber section; thermoelectric members placed centrally of said inner chamber and at the outer edges thereof, arranged to sense differentials of temperature between a central portion of said inner chamber section and the outer edges of said inner chamber section; and means for varying the extent of heating of said outer sections in accordance with said sensed temperature differentials to provide a predetermined temperature relationship between said inner and outer chamber sections.

Claim 12

A furnace, comprising: a first tubular member, open on one end and formed with a fixed wall at the opposite and to define an elongate chamber between said ends into which can be inserted a plurality of units of semiconductor material to be contacted with process gas, said elongate chamber having an inner section, an outer section terminating outwardly at said open end, and an outer section terminating inwardly at said fixed wall, said fixed wall being formed with an outwardly extending horizontally disposed tubular member defining an opening therethrough for the introduction of process gas; spirally wound electrical resistance wire on said tubular member and electrically connected to separately heat said inner section and said outer sections; a closure for the open end of said first tubular member, comprising a second tubular member and a wall carried thereon formed to slidably move in said open end to substantially close said open end, said wall being movable to and from a portion of said outer section thereat adjacent the proximal outer edge of said inner chamber section; thermoelectric members placed centrally of said inner chamber and at the outer edges thereof, arranged to sense differentials of temperature between a central portion of said inner chamber section and the outer edges of said inner chamber section; and means for varying the extent of heating of said outer sections in accordance with said sensed temperature differentials to provide a predetermined temperature relationship between said inner and outer chamber sections.

Claim 13

The furnace of claim 10 in which said predetermined temperature relationship is isothermal.

Claim 14

The furnace of claim 6 in which said predetermined temperature relationship is isothermal.

Claim 15

The furnace of claim 6 in which said means for heating said inner and outer sections comprise spirally wound electrically resistance wire on said tubular member and electrically connected for separate heating of said inner and outer sections.

Claim 16

The furnace of claim 13 including a jacket of heat insulating material encasing said tubular member.