US3573116A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for masked planar diffusions
Assignee: AT&T Inc
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Filing: 1968-01-03
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Granted: 1971-03-30
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Expires: 1988-01-03
Abstract
Abstract A PROCESS FOR MASKED PLANAR DIFFUSION OF GALLIUM INTO THE UNMASKED PORTION OF A BULK SEMICONDUCTOR IS DESCRIBED IN WHICH THE DIFFUSION OCCURS IN A COMPLETELY WATER-FREE INERT AMBIENT SUCH AS NITROGEN GAS. A QUARTZ BOX DIFFUSION CAPSULE IS USED WITH A CONVENTIONAL DIFFUSION FURNACE IN WHICH THE NITROGEN CIRCULATES THROUGHOUT THE PROCESS.
Inventors
- 👤 Barry G Cohen
- 👤 Robert Lilientual
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 09:16
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/10; C30B29/00; C30B29/02; C30B29/06; C30B31/08; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/049; Y10S438/00; Y10S438/914; Y10S438/92
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-03-29 | 1974-09-28 | 1975-03-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-03-29 | 1978-09-28 | 1979-03-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-03-29 | 1982-09-28 | 1983-03-30 | $7700.00 | Window Closed / Lapsed |