US3852129A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of carrying out diffusions with two sources
Assignee: US Philips Corp
•
Filing: 1973-03-29
•
Granted: 1974-12-03
•
Expires: 1993-03-29
Abstract
Abstract The invention relates to a method of diffusing a doping material in a semiconductor body via the vapour phase. Two doping sources are used which differ in composition but have the same doping material. The diffusion operation consists of successive phases in which always one of the doping sources is used.
Inventors
- 👤 D Diguet
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 10:56
CPC Classifications
H; H10; H10P; H10P95/00; C; C30; C30B; C30B31/00; C30B31/06; C30B31/16; C30B31/165; H10P32/00; H10P32/10; H10P32/12; H10P32/17; H10P32/171
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
159 words
A METHOD OF DIFFUSING DOPING MATERIAL IN A SEMICONDUCTOR BODY IN WHICH THE DOPING MATERIAL IS TRANSPORTED TO THE SAID BODY VIA THE VAPOR PHASE FROM A DOPING SOURCE AND IN WHICH THE SAID SOURCE AND THE BODY ARE HEATED IN A SPACE, CHARACTERIZED IN THAT THE SAID SPACE COMPRISES THREE REGIONS, NAMELY A CENTRAL REGION IN WHICH THE SAID BODY IS PLACE AND TWO END REGIONS WHICH ARE PRESENT ON EITHER SIDE OF THE SAID CENTRAL REGION AND WHICH ARE DESTINED FOR AT LEAST TWO SOURCES OF THE SAME DOPING MATERIAL BUT OF DIFFERENT COMPOSITION AND THAT THE SAID SPACE IN A FIRST PHASE IS ARRANGED SO THAT THE SAID BODY AND A SINGLE DOPING SOURCE ARE PRESENT IN A ZONE OF HIGH TEMPERATURE, AFTER WHICH THE SPACE IS MOVED RELATIVE TO THE HEATING MEANS AND, IN A SECOND PHASE, THE SAID BODY AND ONLY A SECOND DOPING SOURCE ARE HELD N THE SAID ZONE OF HIGH TEMPERATURE.
Claim 2
Independent Claim
159 words
A METHOD OF DIFFUSING DOPING MATERIAL IN A SEMICONDUCTOR BODY IN WHICH THE DOPING MATERIAL IS TRANSPORTED TO THE SAID BODY VIA THE VAPOR PHASE FROM A DOPING SOURCE AND IN WHICH THE SAID SOURCE AND THE BODY ARE HEATED IN A SPACE, CHARACTERIZED IN THAT THE SAID SPACE COMPRISES THREE REGIONS, NAMELY A CENTRAL REGION IN WHICH THE SAID BODY IS PLACE AND TWO END REGIONS WHICH ARE PRESENT ON EITHER SIDE OF THE SAID CENTRAL REGION AND WHICH ARE DESTINED FOR AT LEAST TWO SOURCES OF THE SAME DOPING MATERIAL BUT OF DIFFERENT COMPOSITION AND THAT THE SAID SPACE IN A FIRST PHASE IS ARRANGED SO THAT THE SAID BODY AND A SINGLE DOPING SOURCE ARE PRESENT IN A ZONE OF HIGH TEMPERATURE, AFTER WHICH THE SPACE IS MOVED RELATIVE TO THE HEATING MEANS AND, IN A SECOND PHASE, THE SAID BODY AND ONLY A SECOND DOPING SOURCE ARE HELD N THE SAID ZONE OF HIGH TEMPERATURE.
Claim 3
Dependent Claim
30 words
A method of carrying out diffusions as claimed in claim 1, characterized in that the temperatures of the said zone of high temperature are kept constant during the diffusion operation.
Claim 4
Dependent Claim
31 words
A method of carrying out diffusions as claimed in claim 1, wherein two regions of the said space which are present in the zone of high temperature have the same temperatures.
Claim 5
Dependent Claim
35 words
A method of carrying out diffusions as claimed in claim 1, wherein the source used during the second phase consists of condensate of vapours of the doping material which is formed during the first phase.
Claim 6
Dependent Claim
25 words
A method of carrying out diffusions as claimed in claim 1, wherein at least the first source consists of a compound of a doping element.
Claim 7
Dependent Claim
55 words
A method of carrying out diffusions as claimed in claim 1, wherein the diffusion is carried out in a space of the half-open type in which a gas exchange takes place between the space and a constantly refreshed atmosphere of a protective gas via a passage the cross-section of which is smaller than the length.
Claim 8
Dependent Claim
65 words
A method of carrying out diffusions as claimed in claim 1, wherein the diffusion is carried out in a first space which is traversed at a low rate by a flow of protective gas, the direction of the gas through the space being reversed between the two operation phases so that each time it is in the direction extending from the source to the body.
Claim 9
Dependent Claim
21 words
A method of carrying out diffusions as claimed in claim 1 wherein the diffusion is carried out in a sealed space.
Claim 10
Dependent Claim
31 words
A method of carrying out diffusions as claimed in claim 1, wherein the first source consists of a gallium zinc compound and the second source consists of a zinc arsenic compound.
References Cited (Backward Citations)
US3154446A
Cited
US3305412A
Cited
US3377216A
Cited
GB1054360A
Cited
GB1086660A
Cited
US3617820A
Cited
US3540952A
Cited
US3660178A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-12-02 | 1978-06-03 | 1978-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-12-02 | 1982-06-03 | 1982-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-12-02 | 1986-06-03 | 1986-12-03 | $7700.00 | Window Closed / Lapsed |