Process for fabricating a bipolar transistor

Claim 2

In a process for fabricating an improved bipolar transistor in a silicon substrate of a first conductivity type, said substrate having a planar surface, a subcollector region of a second conductivity type formed in said substrate, an epitaxial layer of said second conductivity type formed on said planar surface of said substrate, and first, second and third spaced apart recessed oxide isolation regions extending through said epitaxial layer into said substrate, said process including the following steps: a. forming a first oxide layer on said epitaxial layer; b. utilizing a suitable block-out mask, ion implanting impurities of a second conductivity type into the epitaxial surface extending from said second recessed oxide region to said third recessed oxide region thereby forming a collector reach through region; c. forming a first silicon nitride layer on said first oxide layer; d. forming a second oxide layer on said first silicon nitride layer; e. forming a mask having first and second spaced apart windows, said windows respectively exposing discrete regions of said second oxide layer, said first window extending over a portion of said first recessed oxide isolation region and a portion of said epitaxial layer in the direction of said second recessed oxide isolation region, said second window extending over a portion of said second recessed oxide isolation region and said epitaxial layer in the direction of said first recessed oxide isolation region; f. utilizing reactive-ion etch techniques and said first and second windows etching said second oxide layer, said first silicon nitride layer, said first oxide layer, the oxide isolation regions and said epitaxial layer to the surface of said subcollector region, whereby a narrow portion of the epitaxial layer remains between said first and second recessed oxide isolation regions, said narrow portion of the epitaxial layer having vertical sidewalls; g. removing said mask formed in step e; h. chemically vapor depositing (CVD) a second silicon nitride layer on the exposed surface of the substrate; i. utilize reaction ion etching (RIE) techniques removing predetermined portions of the second silicon nitride layer; j. forming an oxide layer over the exposed surface of the subcollector; k. removing the remaining portions of said second silicon nitride layer; l. forming a layer of doped polysilicon of said second conductivity type over the exposed surface of the substrate; m. utilizing photoresist planarizing the exposed surface of the substrate; n. utilizing reactive ion etch (RIE) techniques etching back said photoresist and polysilicon to stop at the surface of said second oxide layer; o. removing said second oxide layer; and p. forming by thermal oxidation an oxide coating on said polysilicon whereby, in addition to the forming of said oxide coating on said polysilicon, a thin sleeve shaped region having impurities of said first conductivity type is formed in said narrow portion of said epitaxial layer residing between said first and second recessed oxide isolation regions.

Claim 3

In a process for fabricating an improved bipolar transistor (FIGS. 1A, 1B, 1C) in a silicon substrate of a first conductivity type, said substrate having a planar surface, a subcollector region of a second conductivity type formed in said substrate, an epitaxial layer of said second conductivity type formed on said planar surface of said substrate, and first, second and third spaced apart recessed oxide isolation regions extending through said epitaxial layer into said substrate, said process including the following steps: a. forming a first oxide layer (23, FIG. 7) on said epitaxial layer; b. utilizing a suitable block-out mask (24, FIG. 7) ion implanting impurities of a second conductivity type into the epitaxial surface extending from said second recessed oxide region to said third recessed oxide region thereby forming a collector reach through region (26, FIG. 7); c. forming a first silicon nitride layer (27, FIG. 8) on said first oxide layer; d. forming a second oxide layer (28, FIG. 8) on said first silicon nitride layer; e. forming a mask having first and second spaced apart windows (30, FIG. 8), said windows respectively exposing discrete regions of said second oxide layer, said first window extending over a portion of said first recessed oxide isolation region and a portion of said epitaxial layer in the direction of said second recessed oxide isolation region, said second window extending over a portion of said second recessed oxide isolation region and said epitaxial layer in the direction of said first recessed oxide isolation region; f. utilizing reactive-ion etch techniques and said first and second windows etching said second oxide layer, said first silicon nitride layer, said first oxide layer, the oxide isolation regions and said epitaxial layer to the surface of said subcollector region, whereby a narrow portion of the epitaxial layer remains between said first and second recessed oxide isolation regions, said narrow portion of the epitaxial layer having vertical sidewalls (FIG. 9); g. removing said mask formed in step e; h. chemically vapor depositing (CVD) a second silicon nitride layer (32, FIG. 10) on the exposed surface of the substrate; i. utilize reactive ion etching (RIE) techniques removing predetermined portions of the second silicon nitride layer (32, FIG. 10); j. forming an oxide layer (33, FIG. 11) over the exposed surface of the subcollector; k. removing the remaining portion of said second silicon nitride layer (32, FIG. 12); l. forming a layer (34, FIG. 12) of doped polysilicon of a second conductivity type over the exposed surface of the substrate; m. utilizing photoresist (35, FIG. 12) planarizing the exposed surface of the substrate; n. utilizing reactive ion etch (RIE) techniques etching back said photoresist and polysilicon to stop at the surface of said second oxide layer (FIG. 13); o. removing said second oxide layer (28, FIG. 14); p. forming by thermal oxidation an oxide coating (36, FIG. 14) on said polysilicon, whereby, in addition to the forming of said oxide coating on said polysilicon, a thin sleeve shaped region (37, FIG. 14) having impurities of said first conductivity type is formed in said narrow portion of said epitaxial layer residing between said first and second recessed oxide isolation regions; q. removing said first layer (27, FIG. 14) of silicon nitride and first layer (23, FIG. 14) of oxide over emitter and collector contact areas; r. ion implanting an emitter region (43, FIG. 16) with impurities of the second conductivity type; and s. ion implanting an active base region (47, FIG. 17) with impurities of the first conductivity type.

Claim 4

In a process for fabricating an improved bipolar transistor (FIGS. 1A, 1B, 1C) in a silicon substrate of a first conductivity type, said substrate having a planar surface, a subcollector region of a second conductivity type formed in said substrate, an epitaxial layer of said second conductivity type formed on said planar surface of said substrate, and first, second and third spaced apart recessed oxide isolation regions extending through said epitaxial layer into said substrate, said process including the following steps: a. forming a first oxide layer (23, FIG. 7) on said epitaxial layer; b. utilizing a suitable block-out mask (24, FIG. 7) ion implanting impurities of a second conductivity type into the epitaxial surface extending from said second recessed oxide region to said third recessed oxide region thereby forming a collector reach through region (26, FIG. 7); c. forming a first silicon nitride layer (27, FIG. 8) on said first oxide layer; d. forming a second oxide layer (28, FIG. 8) on said first silicon nitride layer; e. forming a mask having first and second spaced apart windows (30, FIG. 8), said windows respectively exposing discrete regions of said second oxide layer, said first window extending over a portion of said first recessed oxide isolation region and a portion of said epitaxial layer in the direction of said second recessed oxide isolation region, said second window extending over a portion of said second recessed oxide isolation region and said epitaxial layer in the direction of said first recessed oxide isolation region; f. utilizing reactive-ion etch techniques and said first and second windows etching said second oxide layer, said first silicon nitride layer, said first oxide layer, the oxide isolation regions and said epitaxial layer to the surface of said subcollector region, whereby a narrow portion of the epitaxial layer remains between said first and second recessed oxide isolation regions, said narrow portion of the epitaxial layer having vertical sidewalls (FIG. 9); g. removing said mask formed in step e; h. chemically vapor depositing (CVD) a second silicon nitride layer (32, FIG. 10) on the exposed surface of the substrate; i. utilize reactive ion etching (RIE) techniques removing predetermined portions of the second silicon nitride layer (32, FIG. 10); j. forming an oxide layer (33, FIG. 11) over the exposed surface of the subcollector; k. removing the remaining portion of said second silicon nitride layer (32, FIG. 12); l. forming a layer (34, FIG. 12) of doped polysilicon of a second conductivity type over the exposed surface of the substrate; m. utilizing photoresist (35, FIG. 12) planarizing the exposed surface of the substrate; n. utilizing reactive ion etch (RIE) techniques etching back said photoresist and polysilicon to stop at the surface of said second oxide layer (FIG. 13); o. removing said second oxide layer (28, FIG. 14); p. forming by thermal oxidation an oxide coating (36, FIG. 14) on said polysilicon, whereby, in addition to the forming of said oxide coating on said polysilicon, a thin sleeve shaped region (37, FIG. 14) having impurities of said first conductivity type is formed in said narrow portion of said epitaxial layer residing between said first and second recessed oxide isolation regions; q. removing said first layer (27, FIG. 14) of silicon nitride and first layer (23, FIG. 14) of oxide over emitter and collector contact areas; r. ion implanting an emitter region (43, FIG. 16) with impurities of the second conductivity type; and s. ion implanting an active base region (47, FIG. 17) with impurities of the first conductivity type.

Claim 5

In a process for fabricating an improved bipolar transistor (FIG. 1BB) in a silicon substrate of a first conductivity type, said substrate having a planar surface, a subcollector region of a second conductivity type formed in said substrate, an epitaxial layer of said second conductivity type formed on said planar surface of said substrate, and first, second and third spaced apart recessed oxide isolation regions extending through said epitaxial layer into said substrate, said process including the following steps: a. forming a first oxide layer (23, FIG. 7) on said epitaxial layer; b. utilizing a suitable block-out mask (24, FIG. 7) ion implanting impurities of a second conductivity type into the epitaxial surface extending from said second recessed oxide region to said third recessed oxide region thereby forming a collector reach through region (26, FIG. 7); c. forming a block out mask (39B, FIG. 7A) to define the transistor region; d. implanting ions of said second conductivity type to provide said emitter region (43B FIG. 7A) and said collector reach through region (44B, FIG. 7A); e. forming a first silicon nitride layer (27, FIG. 8) on said first oxide layer; f. forming a second oxide layer (28, FIG. 8) on said first silicon nitride layer; g. forming a mask having first and second spaced apart windows (30, FIG. 8), said windows respectively exposing discrete regions of said second oxide layer, said first window extending over a portion of said first recessed oxide isolation region and a portion of said epitaxial layer in the direction of said second recessed oxide isolation region, said second window extending over a portion of said second recessed oxide isolation region and said epitaxial layer in the direction of said first recessed oxide isolation region; h. utilizing reactive-ion etch techniques and said first and second windows etching said second oxide layer, said first silicon nitride layer, said first oxide layer, the oxide isolation regions and said epitaxial layer to the surface of said subcollector region, whereby a narrow portion of the epitaxial layer remains between said first and second recessed oxide isolation regions, said narrow portion of the epitaxial layer having vertical sidewalls (FIG. 9); i. removing said mask formed in step g; j. forming, by low temperature oxidation, a 2000A thick oxide layer (49B, FIG. 9A) on exposed sidewalls of emitter region (43B, FIG. 9A) and a 500A thick oxide layer (50B, FIG. 94) on epitaxial layer (12, FIG. 9A); k. chemically vapor depositing (CVD) a second silicon nitride layer (32, FIG. 10) on the exposed surface of the substrate; l. utilize reactive ion etching (RIE) techniques removing predetermined portions of the second silicon nitride layer (32, FIG. 10); m. forming an oxide layer (33, FIG. 11) over the exposed surface of the subcollector; n. removing the remaining portions of said second silicon nitride layer (32, FIG. 11); o. using an oxide etching solution, etching for a sufficient time to remove the thin oxide (50B, FIG. 11A) on the sidewalls of the epitaxial layer (12, FIG. 11A); p. forming a layer (34, FIG. 12) of doped polysilicon of a second conductivity type over the exposed surface of the substrate; q. utilizing photoresist (35, FIG. 12) planarizing the exposed surface of the substrate; r. utilizing reactive ion etch (RIE) techniques etching back said photoresist and polysilicon to stop at the surface of said second oxide layer (FIG. 13); s. removing said second oxide layer (28, FIG. 14); t. forming by thermal oxidation an oxide coating (36, FIG. 14) on said polysilicon, whereby, in addition to the forming of said oxide coating on said polysilicon, a thin sleeve shaped region (37, FIG. 1BB), having impurities of said first conductivity type, is formed in said narrow portion of said epitaxial layer residing between said first and second recessed oxide isolation regions; u. removing said first layer (27, FIG. 14) of silicon nitride and said first layer (23, FIG. 14) of oxide over emitter and collector contact areas; and v. ion implanting an active base region (47, FIG. 1BB) with impurities of the first conductivity type.

Claim 6

In a process for fabricating an improved bipolar transistor (FIG. 1BB) in a silicon substrate of a first conductivity type, said substrate having a planar surface, a subcollector region of a second conductivity type formed in said substrate, an epitaxial layer of said second conductivity type formed on said planar surface of said substrate, and first, second and third spaced apart recessed oxide isolation regions extending through said epitaxial layer into said substrate, said process including the following steps: a. forming a first oxide layer (23, FIG. 7) on said epitaxial layer; b. utilizing a suitable block-out mask (24, FIG. 7) ion implanting impurities of a second conductivity type into the epitaxial surface extending from said second recessed oxide region to said third recessed oxide region thereby forming a collector reach through region (26, FIG. 7); c. forming a block out mask (39B, FIG. 7A) to define the transistor region; d. implanting ions of said second conductivity type to provide said emitter region (43B FIG. 7A) and said collector reach through region (44B, FIG. 7A); e. forming a first silicon nitride layer (27, FIG. 8) on said first oxide layer; f. forming a second oxide layer (28, FIG. 8) on said first silicon nitride layer; g. forming a mask having first and second spaced apart windows (30, FIG. 8), said windows respectively exposing discrete regions of said second oxide layer, said first window extending over a portion of said first recessed oxide isolation region and a portion of said epitaxial layer in the direction of said second recessed oxide isolation region, said second window extending over a portion of said second recessed oxide isolation region and said epitaxial layer in the direction of said first recessed oxide isolation region; h. utilizing reactive-ion etch techniques and said first and second windows etching said second oxide layer, said first silicon nitride layer, said first oxide layer, the oxide isolation regions and said epitaxial layer to the surface of said subcollector region, whereby a narrow portion of the epitaxial layer remains between said first and second recessed oxide isolation regions, said narrow portion of the epitaxial layer having vertical sidewalls (FIG. 9); i. removing said mask formed in step g; j. forming, by low temperature oxidation, a 2000A thick oxide layer (49B, FIG. 9A) on exposed sidewalls of emitter region (43B, FIG. 9A) and a 500A thick oxide layer (50B, FIG. 94) on epitaxial layer (12, FIG. 9A); k. chemically vapor depositing (CVD) a second silicon nitride layer (32, FIG. 10) on the exposed surface of the substrate; l. utilize reactive ion etching (RIE) techniques removing predetermined portions of the second silicon nitride layer (32, FIG. 10); m. forming an oxide layer (33, FIG. 11) over the exposed surface of the subcollector; n. removing the remaining portions of said second silicon nitride layer (32, FIG. 11); o. using an oxide etching solution, etching for a sufficient time to remove the thin oxide (50B, FIG. 11A) on the sidewalls of the epitaxial layer (12, FIG. 11A); p. forming a layer (34, FIG. 12) of doped polysilicon of a second conductivity type over the exposed surface of the substrate; q. utilizing photoresist (35, FIG. 12) planarizing the exposed surface of the substrate; r. utilizing reactive ion etch (RIE) techniques etching back said photoresist and polysilicon to stop at the surface of said second oxide layer (FIG. 13); s. removing said second oxide layer (28, FIG. 14); t. forming by thermal oxidation an oxide coating (36, FIG. 14) on said polysilicon, whereby, in addition to the forming of said oxide coating on said polysilicon, a thin sleeve shaped region (37, FIG. 1BB), having impurities of said first conductivity type, is formed in said narrow portion of said epitaxial layer residing between said first and second recessed oxide isolation regions; u. removing said first layer (27, FIG. 14) of silicon nitride and said first layer (23, FIG. 14) of oxide over emitter and collector contact areas; and v. ion implanting an active base region (47, FIG. 1BB) with impurities of the first conductivity type.

Claim 7

In a process for fabricating an improved bipolar transistor in a silicon substrate of a first conductivity type, said substrate having a planar surface, a subcollector region of a second conductivity type formed in said substrate, an epitaxial layer of said second conductivity type formed on said planar surface of said substrate, and first, second and third spaced apart recessed oxide isolation regions extending through said epitaxial layer into said substrate, said process including the following steps: a. forming a first oxide layer on said epitaxial layer; b. utilizing a suitable block-out mask ion implanting impurities of a second conductivity type into the epitaxial surface extending from said second recessed oxide region to said third recessed oxide region thereby forming a collector reach through region; c. forming a block-out mask to define the transistor region; d. implanting ions of said second conductivity type to provide said emitter region and said collector reach through region; e. forming a first silicon nitride layer on said first oxide layer; f. forming a second oxide layer on said first silicon nitride layer; g. forming a mask having first and second spaced apart windows, said windows respectively exposing discrete regions of said second oxide layer, said first window extending over a portion of said first recessed oxide isolation region and a portion of said epitaxial layer in the direction of said second recessed oxide isolation region, said second window extending over a portion of said second recessed oxide isolation region and said epitaxial layer in the direction of said first recessed oxide isolation region; h. utilizing reactive-ion etch techniques and said first and second windows etching said second oxide layer, said first silicon nitride layer, said first oxide layer, the oxide isolation regions and said epitaxial layer to the surface of said subcollector region, whereby a narrow portion of the epitaxial layer remains between said first and second recessed oxide isolation regions, said narrow portion of the epitaxial layer having vertical sidewalls; i. removing said mask formed in step g; j. forming, by low temperature oxidation, a 2000A thick oxide layer on exposed sidewalls of emitter region and a 500A thick oxide layer on epitaxial layer; k. chemically vapor depositing (CVD) a second silicon nitride layer on the exposed surface of the substrate; l. utilize reactive ion etching (RIE) techniques removing predetermined portions of the second silicon nitride layer; m. forming an oxide layer over the exposed surface of the subcollector; n. removing the remaining portions of said second silicon nitride layer; o. using an oxide etching solution, etching for a sufficient time to remove the thin oxide on the sidewalls of the epitaxial layer; p. forming a layer of doped polysilicon of a second conductivity type over the exposed surface of the substrate; q. utilizing photoresist planarizing the exposed surface of the substrate; r. utilizing reactive ion etch (RIE) techniques etching back said photoresist and polysilicon to stop at the surface of said second oxide layer; s. removing said second oxide layer; t. forming by thermal oxidation an oxide coating on said polysilicon, whereby, in addition to the forming of said oxide coating on said polysilicon, a thin sleeve shaped region, having impurities of said first conductivity type, is formed in said narrow portion of said epitaxial layer residing between said first and second recessed oxide isolation regions; u. removing said first layer of silicon nitride and said first layer of oxide over emitter and collector contact areas; and v. ion implanting an active base region with impurities of the first conductivity type.

Claim 8

In a process for fabricating an improved bipolar transistor in a silicon substrate of a first conductivity type, said substrate having a planar surface, a subcollector region of a second conductivity type formed in said substrate, an epitaxial layer of said second conductivity type formed on said planar surface of said substrate, and first, second and third spaced apart recessed oxide isolation regions extending through said epitaxial layer into said substrate, said process including the following steps: a. forming a first oxide layer on said epitaxial layer; b. utilizing a suitable block-out mask ion implanting impurities of a second conductivity type into the epitaxial surface extending from said second recessed oxide region to said third recessed oxide region thereby forming a collector reach through region; c. forming a block-out mask to define the transistor region; d. implanting ions of said second conductivity type to provide said emitter region and said collector reach through region; e. forming a first silicon nitride layer on said first oxide layer; f. forming a second oxide layer on said first silicon nitride layer; g. forming a mask having first and second spaced apart windows, said windows respectively exposing discrete regions of said second oxide layer, said first window extending over a portion of said first recessed oxide isolation region and a portion of said epitaxial layer in the direction of said second recessed oxide isolation region, said second window extending over a portion of said second recessed oxide isolation region and said epitaxial layer in the direction of said first recessed oxide isolation region; h. utilizing reactive-ion etch techniques and said first and second windows etching said second oxide layer, said first silicon nitride layer, said first oxide layer, the oxide isolation regions and said epitaxial layer to the surface of said subcollector region, whereby a narrow portion of the epitaxial layer remains between said first and second recessed oxide isolation regions, said narrow portion of the epitaxial layer having vertical sidewalls; i. removing said mask formed in step g; j. forming, by low temperature oxidation, a 2000A thick oxide layer on exposed sidewalls of emitter region and a 500A thick oxide layer on epitaxial layer; k. chemically vapor depositing (CVD) a second silicon nitride layer on the exposed surface of the substrate; l. utilize reactive ion etching (RIE) techniques removing predetermined portions of the second silicon nitride layer; m. forming an oxide layer over the exposed surface of the subcollector; n. removing the remaining portions of said second silicon nitride layer; o. using an oxide etching solution, etching for a sufficient time to remove the thin oxide on the sidewalls of the epitaxial layer; p. forming a layer of doped polysilicon of a second conductivity type over the exposed surface of the substrate; q. utilizing photoresist planarizing the exposed surface of the substrate; r. utilizing reactive ion etch (RIE) techniques etching back said photoresist and polysilicon to stop at the surface of said second oxide layer; s. removing said second oxide layer; t. forming by thermal oxidation an oxide coating on said polysilicon, whereby, in addition to the forming of said oxide coating on said polysilicon, a thin sleeve shaped region, having impurities of said first conductivity type, is formed in said narrow portion of said epitaxial layer residing between said first and second recessed oxide isolation regions; u. removing said first layer of silicon nitride and said first layer of oxide over emitter and collector contact areas; and v. ion implanting an active base region with impurities of the first conductivity type.