US3574008A
Expired / Lapsed
US
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Mushroom epitaxial growth in tier-type shaped holes
Assignee: Motorola Solutions Inc
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Filing: 1968-08-19
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Granted: 1971-04-06
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Expires: 1988-08-19
Abstract
Abstract A STRUCTURE FORMED BY, AND A PROCESS FOR GROWING EPITAXIAL LAYERS OF SILICON ON AN EXPOSED SURFACE OF A SILICON WAFER THROUGH OPENINGS IN A PASSIVATING STRUCTURE HAVING A PREDETERMINED "TIER-TYPE" CONFIGURATION. THE DEVICES FORMED BY THIS METHOD HAVE IMPROVED BREAKDOWN VOLTAGE CHARACTERISTICS. FURTHER, THE METHOD MAKES POSSIBLE THE ABILITY TO VARY AND CONTROL JUNCTION CAPACITANCE AS REQUIRED.
Inventors
- 👤 Edward J Rice
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 21:02
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/27; H10P14/271; H10P14/276; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/026; Y10S148/043; Y10S148/05; Y10S148/085; Y10S148/106; Y10S148/145; Y10S438/00; Y10S438/936
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-04-05 | 1974-10-05 | 1975-04-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-04-05 | 1978-10-05 | 1979-04-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-04-05 | 1982-10-05 | 1983-04-06 | $7700.00 | Window Closed / Lapsed |