US4316209A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Metal/silicon contact and methods of fabrication thereof
Assignee: International Business Machines Corp
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Filing: 1979-08-31
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Granted: 1982-02-16
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Expires: 1999-08-31
Abstract
Abstract Methods and resulting structures for thermally stable metal/silicon contacts are described. The resulting contacts are aluminum which is alloyed with at least one noble metal from the group of Pd and Pt wherein at least one region of the contact is further alloyed with silicon.
Inventors
- 👤 Paul S. Ho
- 👤 Uwe Koster
- 👤 Tung-Sheng Kuan
- 👤 Iwao Ohdomari
- 👤 Arnold Reisman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 09:05
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10D62/00; H10D62/80; H10D62/83; H10D64/012; H10D64/0121; H10D64/60; H10D64/62; H10D64/64
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
74 words
A contact for making an electrical connection between an aluminum conductor and a silicon substrate comprising: aluminum alloyed with at least one noble metal from the group Pd and Pt to form a resultant alloy wherein at least one region of said resultant alloy is further alloyed with silicon; and wherein the ratio of Al to said noble metals is in the atomic ratio of between about 3 to 2 and 2 to 3.
Claim 2
Dependent Claim
74 words
A contact for making an electrical connection between an aluminum conductor and a silicon substrate comprising: aluminum alloyed with at least one noble metal from the group Pd and Pt to form a resultant alloy wherein at least one region of said resultant alloy is further alloyed with silicon; and wherein the ratio of Al to said noble metals is in the atomic ratio of between about 3 to 2 and 2 to 3.
Claim 3
Dependent Claim
28 words
The contact of claim 1, wherein said further alloyed region has the ratio of Si to other elements of between about 1 to 6 and 1 to 10.
Claim 4
Dependent Claim
24 words
The contact of claim 2, wherein said noble metal is Pt and said further alloyed region forms the compound Al 3 Pt 4 Si.
Claim 5
Dependent Claim
25 words
The contact of claim 2, wherein said noble metal is Pd and one said further alloyed region forms the compound Al 3 Pd 4 Si.
Claim 6
Dependent Claim
15 words
The contact of claim 1, wherein said region alloyed with Si is throughout said contact.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-02-15 | 1985-08-17 | 1986-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-02-15 | 1989-08-17 | 1990-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-02-15 | 1993-08-17 | 1994-02-16 | $7700.00 | Window Closed / Lapsed |