Vacuum evaporation system for the deposition of a thin evaporated layer having a high degree of uniformity

Claim 1

A vacuum evaporation system for forming a thin evaporated layer on a plurality of substrate members as said substrate members rotate about their central axis within a housing enclosing a plurality of substrates and a plurality of substrate carrier rings, said system comprising: a carrier support track; rolling engagement surface means for rotatively supporting a plurality of substrate members, which rolling engagement surface means employs a plurality of substantially circular members having a first surface and a second surface, said first surface providing an area of rolling contact with said carrier support track, said second surface having each of said substrate members disposed within a recess provided in said second surface and supporting said substrate members about their outer periphery; frame means for supporting said rolling engagement surface means, which frame means employs a plurality of frame members, each of said frame members having a first end portion, said first end portion being primarily coplanar with and mechanically conjoined to each of the other said first end portion, each of said frame members extending away from said first end portions in an arc describing segments of great circles, said frame means including a plurality of roller engagement means rotatably connected thereto; rolling engagement means for rotatively supporting said rolling engagement surface means each of said rolling engagement means having a plurality of upper rolling members, and each of said upper rolling members employing a plurality of rollers, and said rolling engagement means further employing a plurality of lower rolling members having a plurality of rollers, said rolling engagement means having a rolling contact surface with said rolling engagement surface means; drive arm means mechanically attached to said frame means for imparting a rotational motive force to said frame means, and drive means contacting said drive arm means for providing rotational movement between said rolling engagement surface and said rolling contact surface.