US3797452A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Motor drives for vacuum deposition apparatus
Assignee: Individual
•
Filing: 1972-02-24
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Granted: 1974-03-19
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Expires: 1992-02-24
Abstract
Abstract Vacuum deposition apparatus including a base (10), a vacuum vessel (14), a rotary workholder (23, 25, 27), auxiliary services (12, 13) passing through the base, and a linear induction motor (30) for driving the rotary workholder. The stator of the induction motor may be included in a sealed case (43) or it may be formed as a solid metal core (FIG. 6) without a case. Additionally a tubular induction motor (62, 63) may be provided for feeding a metal wire (61) from a spool (60) within the vacuum vessel.
Inventors
- 👤 C Dobson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 07:56
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/505
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
44 words
Apparatus for use in vacuum deposition comprising, a vacuum chamber, driving means within said chamber comprising a motor, said motor being a linear induction motor and comprising a statically mounted stator cooperating with a movable armature, and means for preventing outgassing from said stator.
Claim 2
Dependent Claim
44 words
Apparatus for use in vacuum deposition comprising, a vacuum chamber, driving means within said chamber comprising a motor, said motor being a linear induction motor and comprising a statically mounted stator cooperating with a movable armature, and means for preventing outgassing from said stator.
Claim 3
Dependent Claim
31 words
Apparatus according to claim 1, wherein a rotary work supporting structure is also mounted within said chamber, said movable armature of said linear induction motor being effective to rotate said structure.
Claim 4
Dependent Claim
20 words
Apparatus according to claim 2, wherein a part of said rotary structure constitutes the armature of said linear induction motor.
Claim 5
Dependent Claim
33 words
Apparatus according to claim 2, wherein said rotary structure includes a rotatable metallic circular member constituting the movable armature and cooperating with the stator of said linear induction motor to rotate said structure.
Claim 6
Dependent Claim
31 words
Apparatus according to claim 1, wherein said linear motor is of the ''''short stator'''' type, the length of said stator being substantially less than the effective length of said movable armature.
Claim 7
Dependent Claim
27 words
Apparatus according to claim 1, wherein said last-mentioned means comprises a non-magnetic casing totally enclosing said stator to prevent outgassing from said stator into the vacuum chamber.
Claim 8
Dependent Claim
19 words
Apparatus according to claim 6, wherein said sealed casing is formed of a non-magnetic material, such as stainless steel.
Claim 9
Dependent Claim
39 words
Apparatus according to claim 1 wherein said stator comprises a solid body of ferro magnetic material without laminations supporting at least one winding and said last-named means comprises a coating of an inorganic refractory insulating material on said winding.
Claim 10
Dependent Claim
14 words
Apparatus according to claim 8, wherein said winding is formed of anodixed aluminium wire.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-03-18 | 1977-09-17 | 1978-03-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-03-18 | 1981-09-17 | 1982-03-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-03-18 | 1985-09-17 | 1986-03-19 | $7700.00 | Window Closed / Lapsed |