Apparatus for use in deposition of films from a vapor phase

Claim 1

In apparatus for use in uniformly treating the surfaces of separate workpieces, a plurality of separate platform discs for carrying the workpieces in a treating area and means in combination therewith comprising, first and second parts on a common axis for providing first and second spaced concentric support surfaces, respectively, for the disc, each disc being large enough to span the space between said support surfaces and rest at the bottom periphery of the disc at opposite points thereof on the first and second surfaces, and means for driving one of said disc support surfaces in rotation about the common axis relative to the other support surface, whereby the discs move in an orbit about the common axis and each disc rotates on its own axis in the treating area two sets of said platform discs being provided, an inner set and an outer set, the inner set resting on the first and second disc support surfaces, a third disc support surface for the outer set of discs on said second part, a fourth disc support surface for the outer set of discs on a third part concentric with the first and second parts, and drive means coupled to said second part for producing a relative rotational motion about the common axis of the second part, relative to the first and third parts, whereby the inner set of discs moves in one orbit about the common axis, the outer set of discs moves in a large orbit about the common axis and each disc in both sets rotates on its own axis.