Apparatus for depositing thin coats by vaporization under the simultaneous action of an ionized gas

Claim 1

An arrangement for depositing thin coats by vaporization on substrates under the simultaneous action of an ionized gas, comprising a first housing defining a first gas chamber having an evaporative coating material therein and means defining a counter electrode and a holder for an object to be coated, a second housing including an antechamber portion having a tubular gas discharge electrode therein, a supply line for the gas to be ionized, connected to said gas discharge electrode, a long tubular gas flow restrictor extending from said antechamber to said first chamber and having a first open end aligned with said gas discharge electrode, and an opposite end with an orifice restrictor opening into first chamber, an insulating sleeve surrounding said tubular gas flow restrictor and having flange means connecting said sleeve to said first housing and insulating said tubular gas flow restrictor and said antechamber portion from said first housing, and means to maintain a pressure gradient between said first chamber and said antechaber portion during vaporization.

Claim 5

An apparatus for depositing thin coatings on a substrate by evaporation, comprising a first housing having an interior first chamber, means for supporting an evaporation coating material in said first chamber, a holder for objects to be coated in said first chamber, a second housing defining a second chamber having one end with a passage therethrough and an opposite second end, a reaction gas supply connected to said passage for supplying reaction gas thereto, a high voltage hollow tubular electrode having a first end mounted in said one end of said second chamber in alignment with said passage and having an opposite second end terminating adjacent the opposite end of said second chamber, a tubular connecting line extending through said opposite second end and having an open end opening into said second chamber and an opposite end with a small size restrictor opening communicating with said first chamber, said tubular connecting line being aligned with said electrode to receive gases discharged thereby, and an insulating sleeve covering a portion of said tubular connecting line and being flanged to said first housing and insulating said tubular connecting line from said housing.

Claim 6

An apparatus for depositing thin coatings on a substrate by evaporation, comprising a first housing having an interior first chamber, means for supporting an evaporation coating material in said first chamber, a holder for objects to be coated in said first chamber, a second housing defining a second chamber having one end with a passage therethrough and an opposite second end, a reaction gas supply connected to said passage for supplying reaction gas thereto, a high voltage hollow tubular electrode having a first end mounted in said one end of said second chamber in alignment with said passage and having an opposite second end terminating adjacent the opposite end of said second chamber, a tubular connecting line extending through said opposite second end and having an open end opening into said second chamber and an opposite end with a small size restrictor opening communicating with said first chamber, said tubular connecting line being aligned with said electrode to receive gases discharged thereby, and an insulating sleeve covering a portion of said tubular connecting line and being flanged to said first housing and insulating said tubular connecting line from said housing.