US3208873A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for depositing films of refractory metal oxides and refractory metals
Assignee: International Business Machines Corp
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Filing: 1962-01-05
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Granted: 1965-09-28
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Expires: 1982-01-05
Abstract
No abstract record available.
Inventors
- 👤 Ames Irving
- 👤 Royce G Simmons
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 23:48
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/0021; C23C16/00; C23C16/06
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
160 words
A METHOD FOR DEPOSITING A COATING ONTO A SUBSTRATE COMPRISING: (1) HEATING A REFRACTORY METAL TO A PREDETERMINED TEMPERATURE IN A FIRST ZONE, (A) SAID REFRACTORY METAL BEING ONE WHICH IS CAPABLE OF REACTING WITH OXYGEN AT SAID PREDETERMINED TEMPERATURE TO FORM REFRACTORY METAL OXIDE VAPORS, AND (B) SAID PREDETERMINED TEMPERATURE BEING BELOW THE MELTING POINT OF SAID REFRACTORY METAL, (2) CONTACTING SAID REFRACTORY METAL AT SAID PREDETERMINED TEMPERATURE IN SAID FIRST ZONE WITH OXYGEN TO GENERATE REFRACTORY METAL OXIDE VAPORS, (3) CONTACTING A SUBSTRATE WITH SAID REFRACTORY METAL OXIDE VAPORS IN A SECOND ZONE, (A) SAID SUBSTRATE BEING MAINTAINED AT A TEMPERATURE BELOW THE CONDENSATION TEMERPATURE OF SAID REFRACTORY METAL OXIDE VAPORS THEREBY CAUSING THE CONDENSATION OF SAID VAPORS AND THE DEPOSITION OF A FILM OF REFRACTORY METAL OXIDE ON THE SURFACE OF SAID SUBSTRATE, AND (4) CONTINUOUSLY MAINTAINING SAID SECOND ZONE AT AN OXYGEN PARTIAL PRESSURE SUBSTANTIALLY LOWER THAN THE OXYGEN PARTIAL PRESSURE MAINTAINED IN SAID FIRST ZONE.
Claim 2
Independent Claim
160 words
A METHOD FOR DEPOSITING A COATING ONTO A SUBSTRATE COMPRISING: (1) HEATING A REFRACTORY METAL TO A PREDETERMINED TEMPERATURE IN A FIRST ZONE, (A) SAID REFRACTORY METAL BEING ONE WHICH IS CAPABLE OF REACTING WITH OXYGEN AT SAID PREDETERMINED TEMPERATURE TO FORM REFRACTORY METAL OXIDE VAPORS, AND (B) SAID PREDETERMINED TEMPERATURE BEING BELOW THE MELTING POINT OF SAID REFRACTORY METAL, (2) CONTACTING SAID REFRACTORY METAL AT SAID PREDETERMINED TEMPERATURE IN SAID FIRST ZONE WITH OXYGEN TO GENERATE REFRACTORY METAL OXIDE VAPORS, (3) CONTACTING A SUBSTRATE WITH SAID REFRACTORY METAL OXIDE VAPORS IN A SECOND ZONE, (A) SAID SUBSTRATE BEING MAINTAINED AT A TEMPERATURE BELOW THE CONDENSATION TEMERPATURE OF SAID REFRACTORY METAL OXIDE VAPORS THEREBY CAUSING THE CONDENSATION OF SAID VAPORS AND THE DEPOSITION OF A FILM OF REFRACTORY METAL OXIDE ON THE SURFACE OF SAID SUBSTRATE, AND (4) CONTINUOUSLY MAINTAINING SAID SECOND ZONE AT AN OXYGEN PARTIAL PRESSURE SUBSTANTIALLY LOWER THAN THE OXYGEN PARTIAL PRESSURE MAINTAINED IN SAID FIRST ZONE.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-09-27 | 1969-03-29 | 1969-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-09-27 | 1973-03-29 | 1973-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-09-27 | 1977-03-29 | 1977-09-28 | $7700.00 | Window Closed / Lapsed |