US3748169A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for the production of hollow members of any length of semiconductor material
Assignee: Siemens AG
•
Filing: 1972-03-15
•
Granted: 1973-07-24
•
Expires: 1992-03-15
Abstract
Abstract A METHOD FOR THE PRODUCTION OF HOLLOW MEMBERS OF SEMICONDUCTOR MATERIAL OF ANY LENGTH BY THERMAL DECOMPOSITION OF A GASEOUS COMPOUND CONTAINING SEMICONDUCTOR MATERIAL IS DESCRIBED. PREFERABLY, A HOLLOW MEMBER OF GRAPHITE OR SILICON IS EMPOLYED AS A CARRIER ON THE FRONTAL SURFACE OF WHICH SEMICONDUCTOR MATERIAL IS DEPOSITED IN RESPONSE TO THE CREATION OF A TEMPERATURE GRADIENT ALONG THE CARRIER MEMBER. THE HALLOW MEMBER IS MOVED OUT OF THE DEPOSITING ZONE AT THE RATE OF DEPOSITION OF THE SEMICONDUCTOR MATERIAL.
Inventors
- 👤 W Keller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 12:51
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; Y; Y10; Y10S; Y10S148/00; Y10S148/073; Y10S148/122; Y10S148/135
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-23 | 1977-01-22 | 1977-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-23 | 1981-01-22 | 1981-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-23 | 1985-01-22 | 1985-07-24 | $7700.00 | Window Closed / Lapsed |