Patent US3189054A successfully refreshed from Google Patents.
Patent US3629095A successfully refreshed from Google Patents.
US3629095A
Expired / Lapsed
US
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In or relating to vacuum apparatus
Assignee: Edwards High Vacuum International Ltd
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Filing: 1968-06-21
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Granted: 1971-12-21
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Expires: 1988-06-21
Abstract
Abstract Vacuum apparatus for carrying out a vacuum process within a given region of the chamber, in which gas is introduced to and removed from the region continuously so that the process can be carried out at a selected pressure within the region notwithstanding the fact that the remaining part of the chamber is at a lower pressure.
Inventors
- 👤 Geoffrey Norman Jackson
- 👤 Colin Richard Dougl Priestland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 19:01
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
15 words
said pumping outlet arrangement comprises a pumping outlet connection leading directly from said first region,
Claim 2
Dependent Claim
36 words
Apparatus according to claim 1 in which said pumping outlet arrangement comprises a main pumping port leading from said second region of said chamber and a duct directing gas from said first region to said port.
Claim 3
Dependent Claim
49 words
Apparatus according to claim 1 in which said first region is constituted by an elongated auxiliary chamber bounded at one end by said jet means and at the other end by said pumping outlet connection, the apparatus also including a baffle which defines a part of said auxiliary chamber.
Claim 4
Dependent Claim
54 words
said jet means and pumping outlet connection being relatively positioned so that the gas is continuously projected into and removed from said first region through said jet means and pumping outlet connection for maintaining said low pressure in said first region without substantially affecting the maintenance of said lower pressure in said second region.
Claim 5
Dependent Claim
42 words
Apparatus according to claim 1 in which said sputtering unit includes an electron-emitting filamentary cathode within said first region adjacent said jet means, and an anode adjacent said pumping outlet connection, with said target electrode situated between said anode and said cathode.
Claim 6
Dependent Claim
40 words
Apparatus according to claim 1 in which said sputtering unit comprises a pair of radiofrequency electrodes connected across a radiofrequency voltage supply situated between said jet means and said pumping outlet connection and associated with a material to be sputtered.
References Cited (Backward Citations)
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Cited
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US3296115A
Cited
US3287243A
Cited
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Cited
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Cited
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Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-20 | 1975-06-21 | 1975-12-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-20 | 1979-06-21 | 1979-12-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-20 | 1983-06-21 | 1983-12-21 | $7700.00 | Window Closed / Lapsed |