US3458426A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Symmetrical sputtering apparatus with plasma confinement
Assignee: FABRI TEK Inc
•
Filing: 1966-05-25
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Granted: 1969-07-29
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Expires: 1986-05-25
Abstract
No abstract record available.
Inventors
- 👤 William V Rausch
- 👤 Arthur Calderon Jr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 09:07
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
87 words
DEPOSITON APPARATUS COMPRISING: MEANS DEFINING A VACUUM CHAMBER; ANODE MEANS MOUNTED IN THE CHAMBER; FIRST AND SECOND FILAMENTS MEANS MOUNTED IN THE CHAMBER IN SPACED RELATION AND ONE ON EACH SIDE OF SAID ANODE MEANS; FIRST DEPOSITON MEANS INCLUDING TARGET AND SUBSTRATE HOLDER MEANS MOUNTED IN THE CHAMBER BETWEEN SAID FIRST FILAMENT AND SAID ANODE MEANS; SECOND DEPOSITION MEANS INCLUDING TARGET AND SUBSTRATE HOLDER MEANS MOUNTED IN THE CHAMBER BETWEEN SAID SECOND FILAMENT MEANS AND SAID ANODE MEANS. MEANS FOR PROVIDING GAS PARTICLES INTO THE CHAMBER; AND
Claim 2
Dependent Claim
87 words
DEPOSITON APPARATUS COMPRISING: MEANS DEFINING A VACUUM CHAMBER; ANODE MEANS MOUNTED IN THE CHAMBER; FIRST AND SECOND FILAMENTS MEANS MOUNTED IN THE CHAMBER IN SPACED RELATION AND ONE ON EACH SIDE OF SAID ANODE MEANS; FIRST DEPOSITON MEANS INCLUDING TARGET AND SUBSTRATE HOLDER MEANS MOUNTED IN THE CHAMBER BETWEEN SAID FIRST FILAMENT AND SAID ANODE MEANS; SECOND DEPOSITION MEANS INCLUDING TARGET AND SUBSTRATE HOLDER MEANS MOUNTED IN THE CHAMBER BETWEEN SAID SECOND FILAMENT MEANS AND SAID ANODE MEANS. MEANS FOR PROVIDING GAS PARTICLES INTO THE CHAMBER; AND
References Cited (Backward Citations)
US3293168A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-07-28 | 1973-01-27 | 1973-07-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-07-28 | 1977-01-27 | 1977-07-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-07-28 | 1981-01-27 | 1981-07-29 | $7700.00 | Window Closed / Lapsed |