US3294669A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for sputtering in a highly purified gas atmosphere
Assignee: AT&T Inc
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Filing: 1963-07-22
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Granted: 1966-12-27
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Expires: 1983-07-22
Abstract
No abstract record available.
Inventors
- 👤 Henry C Theuerer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 17:10
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/564; C23C14/34; C23C14/35; H; H01; H01J; H01J37/00; H01J37/30; H01J37/31; H01J37/32; H01J37/34; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/826
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
86 words
A CATHODIC SPUTTERING APPARATUS INCLUDING A FIRST VACUUM CHAMBER, MEANS FOR EVACUATING SAID FIRST VACUUM CHAMBER, MEANS FOR INTRODUCING AN INERT GAS INTO SAID FIRST VACUUM CHAMBER, AN ANODE MEMBER HAVING A TIGHTLY FITTED CONDUCTIVE LID DEFINED A SECOND VACUUM CHAMBER IN WHICH ARE DISPOSED IN SUCCESSION (A) A FIRST NON-SHIELDED CATHODE MEMBER, (B) A SUBSTRATE SUPPORT, AND (C) A NONSHIELDED SECOND CATHODE MEMBER COMPRISING THE SAME MATERIAL AS SAID FIRST CATHODE, AT LEAST ONE OF SAID CATHODE MEMBER BEING DISPOSED SIGNIFICANTLY NEARER TO SAID MEANS
Claim 2
Dependent Claim
86 words
A CATHODIC SPUTTERING APPARATUS INCLUDING A FIRST VACUUM CHAMBER, MEANS FOR EVACUATING SAID FIRST VACUUM CHAMBER, MEANS FOR INTRODUCING AN INERT GAS INTO SAID FIRST VACUUM CHAMBER, AN ANODE MEMBER HAVING A TIGHTLY FITTED CONDUCTIVE LID DEFINED A SECOND VACUUM CHAMBER IN WHICH ARE DISPOSED IN SUCCESSION (A) A FIRST NON-SHIELDED CATHODE MEMBER, (B) A SUBSTRATE SUPPORT, AND (C) A NONSHIELDED SECOND CATHODE MEMBER COMPRISING THE SAME MATERIAL AS SAID FIRST CATHODE, AT LEAST ONE OF SAID CATHODE MEMBER BEING DISPOSED SIGNIFICANTLY NEARER TO SAID MEANS
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-12-26 | 1970-06-27 | 1970-12-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-12-26 | 1974-06-27 | 1974-12-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-12-26 | 1978-06-27 | 1978-12-27 | $7700.00 | Window Closed / Lapsed |