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US3210263A Expired / Lapsed US ⏱️ 0.0 years remaining

Electric discharge apparatus for etching

Assignee: Nuclear Materials and Equipment Corp
•
Filing: 1962-01-11
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Granted: 1965-10-05
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Expires: 1982-01-11
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Abstract

No abstract record available.

Inventors

  • 👤 Jones Wallace

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 04:21
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 110 words
A CATHODIC VACUUM ETCHER FOR ETCHING A SPECIMEN INCLUDING A CHAMBER HAVING AN ANODE ELECTRODE FOR SAID ETCHER, MEANS CONNECTED TO SAID CHAMBER FOR EVACUATING SAID CHAMBER, AND A READILY MANIPULATED CATHODE ASSEMBLY FOR MOUNTING SAID SPECIMEN A IN A POSITION TO BE ETCHED BY A DISCHARGE IN SAID CHAMBER, SAID ASSEMBLY INCLUDING A BLOCK OF THERMALLY AND ELECTRICALLY CONDUCTING MATERIAL HAVING A CAVITY THEREIN, MEANS FOR CONNECTING SAID BLOCK THERMALLY AND ELECTRICALLY TO SAID SPECIMEN, MEANS FOR MOUNTING SAID BLOCK SO THAT SAID BLOCK SUPPORTS SAID SPECIMEN IN SAID CHAMBER, SAID MOUNTING MEANS INCLUDING A SUBSTANTIALLY VACUUM TIGHT JOINT PERMITTING MOVEMENT OF SAID BLOCK, INLET AND OUTLET CONDUCTORS FOR
Claim 2
Dependent Claim 110 words
A CATHODIC VACUUM ETCHER FOR ETCHING A SPECIMEN INCLUDING A CHAMBER HAVING AN ANODE ELECTRODE FOR SAID ETCHER, MEANS CONNECTED TO SAID CHAMBER FOR EVACUATING SAID CHAMBER, AND A READILY MANIPULATED CATHODE ASSEMBLY FOR MOUNTING SAID SPECIMEN A IN A POSITION TO BE ETCHED BY A DISCHARGE IN SAID CHAMBER, SAID ASSEMBLY INCLUDING A BLOCK OF THERMALLY AND ELECTRICALLY CONDUCTING MATERIAL HAVING A CAVITY THEREIN, MEANS FOR CONNECTING SAID BLOCK THERMALLY AND ELECTRICALLY TO SAID SPECIMEN, MEANS FOR MOUNTING SAID BLOCK SO THAT SAID BLOCK SUPPORTS SAID SPECIMEN IN SAID CHAMBER, SAID MOUNTING MEANS INCLUDING A SUBSTANTIALLY VACUUM TIGHT JOINT PERMITTING MOVEMENT OF SAID BLOCK, INLET AND OUTLET CONDUCTORS FOR

References Cited (Backward Citations)

US2206020A Cited
US2219611A Cited
US2314683A Cited
US2521248A Cited
US2614793A Cited
US2647810A Cited
US2768036A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1968-10-04 1969-04-05 1969-10-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1972-10-04 1973-04-05 1973-10-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1976-10-04 1977-04-05 1977-10-05 $7700.00 Window Closed / Lapsed

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