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US3494853A Expired / Lapsed US ⏱️ 0.0 years remaining

Vacuum deposition apparatus including a programmed mask means having a closed feedback control system

Assignee: University of Minnesota Twin Cities
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Filing: 1967-06-30
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Granted: 1970-02-10
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Expires: 1987-06-30
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Abstract

No abstract record available.

Inventors

  • 👤 Donald E Anderson
  • 👤 William T Peria

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 23:47
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

US3015806A Cited
US3148085A Cited
US3207126A Cited
US3230109A Cited
US3228663A Cited
US3344054A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1973-02-09 1973-08-11 1974-02-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1977-02-09 1977-08-11 1978-02-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1981-02-09 1981-08-11 1982-02-10 $7700.00 Window Closed / Lapsed

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