US3230109A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor deposition method and apparatus
Assignee: AT&T Inc
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Filing: 1961-12-18
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Granted: 1966-01-18
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Expires: 1981-12-18
Abstract
No abstract record available.
Inventors
- 👤 Joseph V Domaleski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 23:38
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/944
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
164 words
THE METHOD OF VAPOR DEPOSITING IN ONE VACUUM CYCLE, BOTH A PLURALITY OF SETS OF JUXTAPOSED METALLIC ELECTRODES ON A SEMICONDUCTOR SPECIMEN AND A NONMETALLIC COATING OVER SAID SETS OF ELECTRODES, THE ELECTRODES IN EACH SET BEING OF AT LEAST TWO DIFFERENT METALS, RESPECTIVELY, COMPRISING THE STEPS OF MASKING ALL AREAS ON ONE SURFACE OF SAID SPECIMEN OTHER THAN A FIRST ELECTRODE AREA IN EACH SET TO BE VAPOR-DEPOSITED WITH A FIRST CONTACT METAL, EVAPORATING SAID FIRST CONTACT METAL ON SAID FIRST ELECTRODE AREAS, MASKING ALL AREAS ON SAID ONE SURFACE OF SAID SPECIMEN OTHER THAN A SECOND ELECTRODE AREA IN EACH SET TO BE VAPOR-DEPOSITED WITH A SECOND CONTACT METAL, EVAPORATING SAID SECOND CONTACT METAL ON SAID UNMASKED SECOND ELECTRODE AREAS, MASKING ALL AREAS ON SAID ONE SURFACE OF SAID SPECIMEN OTHER THAN SAID FIRST AND SECOND ELECTRODE AREAS AND THE SPACE THEREBETWEEN IN EACH SET, AND THE VAPOR-DEPOSITING A NONMETALLIC COATING ON SAID LAST MENTIONED UNMASKED AREAS ENCOMPASSING EACH SET OF AREAS.
Claim 2
Independent Claim
164 words
THE METHOD OF VAPOR DEPOSITING IN ONE VACUUM CYCLE, BOTH A PLURALITY OF SETS OF JUXTAPOSED METALLIC ELECTRODES ON A SEMICONDUCTOR SPECIMEN AND A NONMETALLIC COATING OVER SAID SETS OF ELECTRODES, THE ELECTRODES IN EACH SET BEING OF AT LEAST TWO DIFFERENT METALS, RESPECTIVELY, COMPRISING THE STEPS OF MASKING ALL AREAS ON ONE SURFACE OF SAID SPECIMEN OTHER THAN A FIRST ELECTRODE AREA IN EACH SET TO BE VAPOR-DEPOSITED WITH A FIRST CONTACT METAL, EVAPORATING SAID FIRST CONTACT METAL ON SAID FIRST ELECTRODE AREAS, MASKING ALL AREAS ON SAID ONE SURFACE OF SAID SPECIMEN OTHER THAN A SECOND ELECTRODE AREA IN EACH SET TO BE VAPOR-DEPOSITED WITH A SECOND CONTACT METAL, EVAPORATING SAID SECOND CONTACT METAL ON SAID UNMASKED SECOND ELECTRODE AREAS, MASKING ALL AREAS ON SAID ONE SURFACE OF SAID SPECIMEN OTHER THAN SAID FIRST AND SECOND ELECTRODE AREAS AND THE SPACE THEREBETWEEN IN EACH SET, AND THE VAPOR-DEPOSITING A NONMETALLIC COATING ON SAID LAST MENTIONED UNMASKED AREAS ENCOMPASSING EACH SET OF AREAS.
Claim 3
Dependent Claim
121 words
APPARATUS FOR THE VAPOR DEPOSITION OF MATERIALS ONTO JUXTAPOSED SURFACE AREAS OF A WORK-PIECE, COMPRISING A CHAMBER CAPABLE OF BEING EVACUATED AND INCLUDING THEREIN A BASE FOR SUPPORTING A WORK-PIECE, A HINGED FRAMEWORK MOVABLY MOUNTED ON SAID BASE, MASKING MEANS WITH PREDETERMINED APERTURES SUPPORTED BY THE FRAMEWORK AND SUPERPOSITIONED WITH SAID WORK-PIECE, MEANS FOR MOVING THE FRAMEWORK AND THEREBY SAID MASKING MEANS RELATIVE TO SAID WORK-PIECE, MEANS ON THE SIDE OF SAID MASKING MEANS OPPOSITE SAID WORK-PIECE FOR EVAPORATING AT LEAST ONE EVAPORANT MATERIAL THROUGH SAID APERTURES ONTO THE SURFACE OF SAID WORK-PIECE, AND MEANS FOR PROGRAMMING THE LATERAL MOVEMENT OF SAID FRAMEWORK RELATIVE TO SAID WORK-PIECE INDEPENDENTLY OF TEMPERATURE OVER A DISTANCE SUBDIVIDED INTO A PLURALITY OF DISTINCT, PRESELECTED STOPS.
Claim 4
Dependent Claim
121 words
APPARATUS FOR THE VAPOR DEPOSITION OF MATERIALS ONTO JUXTAPOSED SURFACE AREAS OF A WORK-PIECE, COMPRISING A CHAMBER CAPABLE OF BEING EVACUATED AND INCLUDING THEREIN A BASE FOR SUPPORTING A WORK-PIECE, A HINGED FRAMEWORK MOVABLY MOUNTED ON SAID BASE, MASKING MEANS WITH PREDETERMINED APERTURES SUPPORTED BY THE FRAMEWORK AND SUPERPOSITIONED WITH SAID WORK-PIECE, MEANS FOR MOVING THE FRAMEWORK AND THEREBY SAID MASKING MEANS RELATIVE TO SAID WORK-PIECE, MEANS ON THE SIDE OF SAID MASKING MEANS OPPOSITE SAID WORK-PIECE FOR EVAPORATING AT LEAST ONE EVAPORANT MATERIAL THROUGH SAID APERTURES ONTO THE SURFACE OF SAID WORK-PIECE, AND MEANS FOR PROGRAMMING THE LATERAL MOVEMENT OF SAID FRAMEWORK RELATIVE TO SAID WORK-PIECE INDEPENDENTLY OF TEMPERATURE OVER A DISTANCE SUBDIVIDED INTO A PLURALITY OF DISTINCT, PRESELECTED STOPS.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-01-17 | 1969-07-19 | 1970-01-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-01-17 | 1973-07-19 | 1974-01-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-01-17 | 1977-07-19 | 1978-01-18 | $7700.00 | Window Closed / Lapsed |