US3207126A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask changer means for vacuum deposition device
Assignee: Individual
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Filing: 1961-11-14
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Granted: 1965-09-21
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Expires: 1981-11-14
Abstract
No abstract record available.
Inventors
- 👤 Byron Ernest
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:41
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
214 words
IN AN APPARATUS FOR FABRICATING THIN FILM CIRCUITS OF THE TYPE COMPRISING A VACUUM CHAMBER, MEANS FOR EVACUATING SAID CHAMBER, A SUBSTRATE MOUNTED IN SAID CHAMBER FOR SUPPORTING A CIRCUIT, A CIRCULAR ROTATABLY ARRANGED MASK CARRIER, A PLURALITY OF MASK HOLDERS ARRANGED WITHIN SAID CHAMBER IN PROXIMITY TO SAID SUBSTRATE AND SUPPORTED BY SAID MASK CARRIER, A PLURALITY OF MASKS EACH ARRANGED WITHIN A SEPARATE ONE OF SAID MASK HOLDERS, MEANS FOR REGISTERING EACH MASK HOLDER WITH SAID SUBSTRATE, AND EVAPORATING MEANS WITHIN SAID CHAMBER FOR SUPPLYING A VAPOR TO SAID SUBSTRATE, SAID MASK CARRIER BEING LOCATED BETWEEN SAID SUBSTRATE AND SAID VAPOR SUPPLYING MEANS SO THAT SAID VAPOR IS PASSED THROUGH ONE OF SAID MASKS BEFORE CONTACTING SAID SUBSTRATE, A PLURALITY OF PAIRS OF CONCENTRICALLY MOUNTED FRAMES, EACH OF SAID PAIRS OF FRAMES SECURING ONE OF SAID MASKS, THE OUTER OF EACH OF SAID PAIRS OF FRAMES HAVING A PLURALITY OF GUIDE HOLES EXTENDING VERTICALLY THERETHROUGH, A PLURALITY OF GUIDE PINS EACH POSITIONED IN A SEPARATE ONE OF SAID GUIDE HOLES AND EXTENDING OUTWARDLY OF ITS ASSOCIATED PAIR OF FRAMES, A SUBSTRATE HOLDER HAVING A BASE, A PLURALITY OF SPACED SPACING LUGS LOCATED ON SAID BASE, EACH HAVING A GUIDE HOLE EXTENDING VERTICALLY THERETHROUGH AND CAPABLE OF RECEIVING ONE OF SAID GUIDE PINS,
Claim 2
Dependent Claim
214 words
IN AN APPARATUS FOR FABRICATING THIN FILM CIRCUITS OF THE TYPE COMPRISING A VACUUM CHAMBER, MEANS FOR EVACUATING SAID CHAMBER, A SUBSTRATE MOUNTED IN SAID CHAMBER FOR SUPPORTING A CIRCUIT, A CIRCULAR ROTATABLY ARRANGED MASK CARRIER, A PLURALITY OF MASK HOLDERS ARRANGED WITHIN SAID CHAMBER IN PROXIMITY TO SAID SUBSTRATE AND SUPPORTED BY SAID MASK CARRIER, A PLURALITY OF MASKS EACH ARRANGED WITHIN A SEPARATE ONE OF SAID MASK HOLDERS, MEANS FOR REGISTERING EACH MASK HOLDER WITH SAID SUBSTRATE, AND EVAPORATING MEANS WITHIN SAID CHAMBER FOR SUPPLYING A VAPOR TO SAID SUBSTRATE, SAID MASK CARRIER BEING LOCATED BETWEEN SAID SUBSTRATE AND SAID VAPOR SUPPLYING MEANS SO THAT SAID VAPOR IS PASSED THROUGH ONE OF SAID MASKS BEFORE CONTACTING SAID SUBSTRATE, A PLURALITY OF PAIRS OF CONCENTRICALLY MOUNTED FRAMES, EACH OF SAID PAIRS OF FRAMES SECURING ONE OF SAID MASKS, THE OUTER OF EACH OF SAID PAIRS OF FRAMES HAVING A PLURALITY OF GUIDE HOLES EXTENDING VERTICALLY THERETHROUGH, A PLURALITY OF GUIDE PINS EACH POSITIONED IN A SEPARATE ONE OF SAID GUIDE HOLES AND EXTENDING OUTWARDLY OF ITS ASSOCIATED PAIR OF FRAMES, A SUBSTRATE HOLDER HAVING A BASE, A PLURALITY OF SPACED SPACING LUGS LOCATED ON SAID BASE, EACH HAVING A GUIDE HOLE EXTENDING VERTICALLY THERETHROUGH AND CAPABLE OF RECEIVING ONE OF SAID GUIDE PINS,
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-09-20 | 1969-03-22 | 1969-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-09-20 | 1973-03-22 | 1973-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-09-20 | 1977-03-22 | 1977-09-21 | $7700.00 | Window Closed / Lapsed |