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US3207126A Expired / Lapsed US ⏱️ 0.0 years remaining

Mask changer means for vacuum deposition device

Assignee: Individual
•
Filing: 1961-11-14
•
Granted: 1965-09-21
•
Expires: 1981-11-14
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Abstract

No abstract record available.

Inventors

  • 👤 Byron Ernest

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 16:41
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 214 words
IN AN APPARATUS FOR FABRICATING THIN FILM CIRCUITS OF THE TYPE COMPRISING A VACUUM CHAMBER, MEANS FOR EVACUATING SAID CHAMBER, A SUBSTRATE MOUNTED IN SAID CHAMBER FOR SUPPORTING A CIRCUIT, A CIRCULAR ROTATABLY ARRANGED MASK CARRIER, A PLURALITY OF MASK HOLDERS ARRANGED WITHIN SAID CHAMBER IN PROXIMITY TO SAID SUBSTRATE AND SUPPORTED BY SAID MASK CARRIER, A PLURALITY OF MASKS EACH ARRANGED WITHIN A SEPARATE ONE OF SAID MASK HOLDERS, MEANS FOR REGISTERING EACH MASK HOLDER WITH SAID SUBSTRATE, AND EVAPORATING MEANS WITHIN SAID CHAMBER FOR SUPPLYING A VAPOR TO SAID SUBSTRATE, SAID MASK CARRIER BEING LOCATED BETWEEN SAID SUBSTRATE AND SAID VAPOR SUPPLYING MEANS SO THAT SAID VAPOR IS PASSED THROUGH ONE OF SAID MASKS BEFORE CONTACTING SAID SUBSTRATE, A PLURALITY OF PAIRS OF CONCENTRICALLY MOUNTED FRAMES, EACH OF SAID PAIRS OF FRAMES SECURING ONE OF SAID MASKS, THE OUTER OF EACH OF SAID PAIRS OF FRAMES HAVING A PLURALITY OF GUIDE HOLES EXTENDING VERTICALLY THERETHROUGH, A PLURALITY OF GUIDE PINS EACH POSITIONED IN A SEPARATE ONE OF SAID GUIDE HOLES AND EXTENDING OUTWARDLY OF ITS ASSOCIATED PAIR OF FRAMES, A SUBSTRATE HOLDER HAVING A BASE, A PLURALITY OF SPACED SPACING LUGS LOCATED ON SAID BASE, EACH HAVING A GUIDE HOLE EXTENDING VERTICALLY THERETHROUGH AND CAPABLE OF RECEIVING ONE OF SAID GUIDE PINS,
Claim 2
Dependent Claim 214 words
IN AN APPARATUS FOR FABRICATING THIN FILM CIRCUITS OF THE TYPE COMPRISING A VACUUM CHAMBER, MEANS FOR EVACUATING SAID CHAMBER, A SUBSTRATE MOUNTED IN SAID CHAMBER FOR SUPPORTING A CIRCUIT, A CIRCULAR ROTATABLY ARRANGED MASK CARRIER, A PLURALITY OF MASK HOLDERS ARRANGED WITHIN SAID CHAMBER IN PROXIMITY TO SAID SUBSTRATE AND SUPPORTED BY SAID MASK CARRIER, A PLURALITY OF MASKS EACH ARRANGED WITHIN A SEPARATE ONE OF SAID MASK HOLDERS, MEANS FOR REGISTERING EACH MASK HOLDER WITH SAID SUBSTRATE, AND EVAPORATING MEANS WITHIN SAID CHAMBER FOR SUPPLYING A VAPOR TO SAID SUBSTRATE, SAID MASK CARRIER BEING LOCATED BETWEEN SAID SUBSTRATE AND SAID VAPOR SUPPLYING MEANS SO THAT SAID VAPOR IS PASSED THROUGH ONE OF SAID MASKS BEFORE CONTACTING SAID SUBSTRATE, A PLURALITY OF PAIRS OF CONCENTRICALLY MOUNTED FRAMES, EACH OF SAID PAIRS OF FRAMES SECURING ONE OF SAID MASKS, THE OUTER OF EACH OF SAID PAIRS OF FRAMES HAVING A PLURALITY OF GUIDE HOLES EXTENDING VERTICALLY THERETHROUGH, A PLURALITY OF GUIDE PINS EACH POSITIONED IN A SEPARATE ONE OF SAID GUIDE HOLES AND EXTENDING OUTWARDLY OF ITS ASSOCIATED PAIR OF FRAMES, A SUBSTRATE HOLDER HAVING A BASE, A PLURALITY OF SPACED SPACING LUGS LOCATED ON SAID BASE, EACH HAVING A GUIDE HOLE EXTENDING VERTICALLY THERETHROUGH AND CAPABLE OF RECEIVING ONE OF SAID GUIDE PINS,

References Cited (Backward Citations)

US2160981A Cited
US2969296A Cited
US3117025A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1968-09-20 1969-03-22 1969-09-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1972-09-20 1973-03-22 1973-09-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1976-09-20 1977-03-22 1977-09-21 $7700.00 Window Closed / Lapsed

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